JP2016155963A5 - - Google Patents
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- Publication number
- JP2016155963A5 JP2016155963A5 JP2015035941A JP2015035941A JP2016155963A5 JP 2016155963 A5 JP2016155963 A5 JP 2016155963A5 JP 2015035941 A JP2015035941 A JP 2015035941A JP 2015035941 A JP2015035941 A JP 2015035941A JP 2016155963 A5 JP2016155963 A5 JP 2016155963A5
- Authority
- JP
- Japan
- Prior art keywords
- ultraviolet light
- emitting material
- gallium
- oxide semiconductor
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000463 material Substances 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 9
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 8
- 229910052733 gallium Inorganic materials 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000003595 mist Substances 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052593 corundum Inorganic materials 0.000 claims description 4
- 239000010431 corundum Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910052738 indium Inorganic materials 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 4
- 239000012159 carrier gas Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 229910052594 sapphire Inorganic materials 0.000 claims description 2
- 239000010980 sapphire Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 2
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015035941A JP6620921B2 (ja) | 2015-02-25 | 2015-02-25 | 紫外線発光材料およびその製造方法 |
| JP2019201137A JP6920630B2 (ja) | 2015-02-25 | 2019-11-06 | 紫外線発光材料およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015035941A JP6620921B2 (ja) | 2015-02-25 | 2015-02-25 | 紫外線発光材料およびその製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019201137A Division JP6920630B2 (ja) | 2015-02-25 | 2019-11-06 | 紫外線発光材料およびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016155963A JP2016155963A (ja) | 2016-09-01 |
| JP2016155963A5 true JP2016155963A5 (enExample) | 2018-04-19 |
| JP6620921B2 JP6620921B2 (ja) | 2019-12-18 |
Family
ID=56825165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015035941A Active JP6620921B2 (ja) | 2015-02-25 | 2015-02-25 | 紫外線発光材料およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6620921B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6920630B2 (ja) * | 2015-02-25 | 2021-08-18 | 株式会社Flosfia | 紫外線発光材料およびその製造方法 |
| JP6620328B2 (ja) * | 2015-09-08 | 2019-12-18 | 株式会社Flosfia | 深紫外光発生用ターゲット、深紫外光源および深紫外発光素子 |
| JP6774592B2 (ja) * | 2015-09-08 | 2020-10-28 | 株式会社Flosfia | 深紫外発光素子 |
| WO2020004250A1 (ja) * | 2018-06-26 | 2020-01-02 | 株式会社Flosfia | 結晶性酸化物膜 |
| CN114423883B (zh) | 2019-09-30 | 2024-03-12 | 日本碍子株式会社 | α－Ga2O3系半导体膜 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3556916B2 (ja) * | 2000-09-18 | 2004-08-25 | 三菱電線工業株式会社 | 半導体基材の製造方法 |
| JP5222916B2 (ja) * | 2010-09-17 | 2013-06-26 | シャープ株式会社 | 半導体基材の製造方法、半導体装置、および電気機器 |
| JP5569987B2 (ja) * | 2012-05-25 | 2014-08-13 | 双葉電子工業株式会社 | 紫外線発光材料及び紫外線光源 |
| JP5397794B1 (ja) * | 2013-06-04 | 2014-01-22 | Ｒｏｃａ株式会社 | 酸化物結晶薄膜の製造方法 |
-
2015
- 2015-02-25 JP JP2015035941A patent/JP6620921B2/ja active Active
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