JP2016216332A5 - - Google Patents
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- Publication number
- JP2016216332A5 JP2016216332A5 JP2015106565A JP2015106565A JP2016216332A5 JP 2016216332 A5 JP2016216332 A5 JP 2016216332A5 JP 2015106565 A JP2015106565 A JP 2015106565A JP 2015106565 A JP2015106565 A JP 2015106565A JP 2016216332 A5 JP2016216332 A5 JP 2016216332A5
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- material solution
- alcohol
- organometallic complex
- yttrium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000002994 raw material Substances 0.000 claims description 21
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 125000002524 organometallic group Chemical group 0.000 claims description 12
- 229910052727 yttrium Inorganic materials 0.000 claims description 9
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 9
- 239000003595 mist Substances 0.000 claims description 8
- 239000012046 mixed solvent Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 239000012159 carrier gas Substances 0.000 claims description 6
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 5
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 claims description 4
- 229910001507 metal halide Inorganic materials 0.000 claims description 4
- 150000005309 metal halides Chemical class 0.000 claims description 4
- 239000002904 solvent Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 230000008021 deposition Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015106565A JP6876893B2 (ja) | 2015-05-26 | 2015-05-26 | 酸化イットリウム膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015106565A JP6876893B2 (ja) | 2015-05-26 | 2015-05-26 | 酸化イットリウム膜の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016216332A JP2016216332A (ja) | 2016-12-22 |
| JP2016216332A5 true JP2016216332A5 (enExample) | 2018-07-12 |
| JP6876893B2 JP6876893B2 (ja) | 2021-05-26 |
Family
ID=57578052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015106565A Active JP6876893B2 (ja) | 2015-05-26 | 2015-05-26 | 酸化イットリウム膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6876893B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7165314B2 (ja) * | 2017-12-01 | 2022-11-04 | 株式会社Flosfia | 着色膜形成用組成物 |
| JP7165313B2 (ja) * | 2017-12-01 | 2022-11-04 | 株式会社Flosfia | 着色方法 |
| JP6980182B2 (ja) * | 2017-12-01 | 2021-12-15 | 株式会社Flosfia | 超音波ミスト |
| JP2019116676A (ja) * | 2017-12-27 | 2019-07-18 | テクノクオーツ株式会社 | 成膜装置の構成部材の耐食構造およびその構成部材の製造方法 |
| JP7280462B2 (ja) * | 2018-04-27 | 2023-05-24 | 株式会社Flosfia | 光導波路の製造方法 |
| CN117837273A (zh) * | 2021-08-31 | 2024-04-05 | 京瓷株式会社 | 耐等离子层叠体、其制造方法和等离子处理装置 |
| CN116024550B (zh) * | 2023-03-06 | 2025-02-07 | 青禾晶元(天津)半导体材料有限公司 | 一种利用雾化学气相沉积生长氧化物薄膜的装置系统及方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4205912B2 (ja) * | 2002-08-13 | 2009-01-07 | 時田シーブイディーシステムズ株式会社 | 透明な酸化イットリウム膜とその製造方法 |
| JP2007197296A (ja) * | 2005-07-27 | 2007-08-09 | Showa Denko Kk | 金属酸化物微粒子の分散液およびその製造方法 |
| US20130260047A1 (en) * | 2012-03-27 | 2013-10-03 | Rajan Bamola | Coating and methods thereof |
| JP6137668B2 (ja) * | 2012-08-26 | 2017-05-31 | 国立大学法人 熊本大学 | 酸化亜鉛結晶層の製造方法及びミスト化学気相成長装置 |
| JP5397795B1 (ja) * | 2013-06-21 | 2014-01-22 | Ｒｏｃａ株式会社 | 半導体装置及びその製造方法、結晶及びその製造方法 |
-
2015
- 2015-05-26 JP JP2015106565A patent/JP6876893B2/ja active Active
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