JP2018050041A5 - - Google Patents

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Publication number
JP2018050041A5
JP2018050041A5 JP2017170127A JP2017170127A JP2018050041A5 JP 2018050041 A5 JP2018050041 A5 JP 2018050041A5 JP 2017170127 A JP2017170127 A JP 2017170127A JP 2017170127 A JP2017170127 A JP 2017170127A JP 2018050041 A5 JP2018050041 A5 JP 2018050041A5
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JP
Japan
Prior art keywords
gas
pump
flow rate
cleaning
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017170127A
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English (en)
Japanese (ja)
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JP2018050041A (ja
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Publication date
Priority claimed from US15/263,838 external-priority patent/US11332824B2/en
Application filed filed Critical
Publication of JP2018050041A publication Critical patent/JP2018050041A/ja
Publication of JP2018050041A5 publication Critical patent/JP2018050041A5/ja
Pending legal-status Critical Current

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JP2017170127A 2016-09-13 2017-09-05 ポンプ排気システムにおける廃物の蓄積を低減するためのシステムおよび方法 Pending JP2018050041A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/263,838 2016-09-13
US15/263,838 US11332824B2 (en) 2016-09-13 2016-09-13 Systems and methods for reducing effluent build-up in a pumping exhaust system

Publications (2)

Publication Number Publication Date
JP2018050041A JP2018050041A (ja) 2018-03-29
JP2018050041A5 true JP2018050041A5 (enExample) 2018-05-17

Family

ID=61559644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017170127A Pending JP2018050041A (ja) 2016-09-13 2017-09-05 ポンプ排気システムにおける廃物の蓄積を低減するためのシステムおよび方法

Country Status (6)

Country Link
US (2) US11332824B2 (enExample)
JP (1) JP2018050041A (enExample)
KR (2) KR102425423B1 (enExample)
CN (2) CN107863307B (enExample)
SG (2) SG10202102425UA (enExample)
TW (1) TWI777975B (enExample)

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