JP2018030087A - 超純水製造装置 - Google Patents
超純水製造装置 Download PDFInfo
- Publication number
- JP2018030087A JP2018030087A JP2016163519A JP2016163519A JP2018030087A JP 2018030087 A JP2018030087 A JP 2018030087A JP 2016163519 A JP2016163519 A JP 2016163519A JP 2016163519 A JP2016163519 A JP 2016163519A JP 2018030087 A JP2018030087 A JP 2018030087A
- Authority
- JP
- Japan
- Prior art keywords
- membrane
- ultrafiltration membrane
- membrane module
- ultrapure water
- ultrafiltration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021642 ultra pure water Inorganic materials 0.000 title claims abstract description 43
- 239000012498 ultrapure water Substances 0.000 title claims abstract description 43
- 239000012528 membrane Substances 0.000 claims abstract description 213
- 238000000108 ultra-filtration Methods 0.000 claims abstract description 52
- 238000001914 filtration Methods 0.000 claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 claims description 24
- 239000012510 hollow fiber Substances 0.000 claims description 12
- 230000004907 flux Effects 0.000 claims description 8
- 239000010419 fine particle Substances 0.000 abstract description 49
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 63
- 239000002245 particle Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 7
- 239000012466 permeate Substances 0.000 description 6
- 229920002492 poly(sulfone) Polymers 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000007800 oxidant agent Substances 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005342 ion exchange Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003673 groundwater Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000008235 industrial water Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001471 micro-filtration Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000002894 organic compounds Chemical group 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
- B01D63/02—Hollow fibre modules
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/145—Ultrafiltration
- B01D61/146—Ultrafiltration comprising multiple ultrafiltration steps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
- B01D61/18—Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/58—Multistep processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/08—Hollow fibre membranes
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2315/00—Details relating to the membrane module operation
- B01D2315/08—Fully permeating type; Dead-end filtration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2317/00—Membrane module arrangements within a plant or an apparatus
- B01D2317/02—Elements in series
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2317/00—Membrane module arrangements within a plant or an apparatus
- B01D2317/02—Elements in series
- B01D2317/025—Permeate series
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2317/00—Membrane module arrangements within a plant or an apparatus
- B01D2317/04—Elements in parallel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2317/00—Membrane module arrangements within a plant or an apparatus
- B01D2317/08—Use of membrane modules of different kinds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/30—Treatment of water, waste water, or sewage by irradiation
- C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
- C02F2001/427—Treatment of water, waste water, or sewage by ion-exchange using mixed beds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/02—Non-contaminated water, e.g. for industrial water supply
- C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/002—Construction details of the apparatus
- C02F2201/006—Cartridges
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2209/00—Controlling or monitoring parameters in water treatment
- C02F2209/40—Liquid flow rate
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/08—Multistage treatments, e.g. repetition of the same process step under different conditions
Abstract
Description
外圧型のUF膜モジュールにおいて大流量で長時間の通水を行う場合、水流の衝撃による(中空糸膜の)糸切れの発生やろ過安定性の低下などの不具合が生じるおそれがある。そのため、第2のUF膜モジュール12は、このような不具合の発生を抑制するという観点からは、内圧型の通水方式であってもよい。また、第2のUF膜モジュール12では、上述したように、回収率を高く設定しても、目詰まりの心配が少ないため、ろ過方法として、被処理水の全量をろ過するデッドエンド方式が採用されていてもよい。
2 一次純水タンク
3 ポンプ
4 熱交換器
5 紫外線酸化装置
6 非再生型混床式イオン交換装置(カートリッジポリッシャー)
7 ユースポイント
10 UF膜装置
11 第1のUF膜モジュール
12 第2のUF膜モジュール
Claims (9)
- 限外ろ過膜装置を備えた超純水製造装置であって、
前記限外ろ過膜装置が、直列に接続された複数の限外ろ過膜を有し、
前記複数の限外ろ過膜が、第1の限外ろ過膜と、前記複数の限外ろ過膜のうち最も下流側に位置し、前記第1の限外ろ過膜とはろ過性能が異なる第2の限外ろ過膜とを含む、
超純水製造装置。 - 前記第2の限外ろ過膜の透過流束が、前記第1の限外ろ過膜の透過流束よりも大きい、請求項1に記載の超純水製造装置。
- 前記第2の限外ろ過膜の分画分子量が、前記第1の限外ろ過膜の分画分子量よりも大きい、請求項1または2に記載の超純水製造装置。
- 前記複数の限外ろ過膜が、それぞれ中空糸膜である、請求項1から3のいずれか1項に記載の超純水製造装置。
- 限外ろ過膜装置を備えた超純水製造装置であって、
前記限外ろ過膜装置が、直列に接続された複数の限外ろ過膜モジュールを有し、
前記複数の限外ろ過膜モジュールが、第1の限外ろ過膜モジュールと、前記複数の限外ろ過膜モジュールのうち最も下流側に位置し、前記第1の限外ろ過膜モジュールとはろ過性能が異なる第2の限外ろ過膜モジュールとを含む、
超純水製造装置。 - 前記第2の限外ろ過膜モジュールの単位圧力当たりの透過流量が、前記第1の限外ろ過膜モジュールの単位圧力当たりの透過流量よりも大きい、請求項5に記載の超純水製造装置。
- 前記複数の限外ろ過膜モジュールが、それぞれ中空糸膜モジュールである、請求項5または6に記載の超純水製造装置。
- 前記第2の限外ろ過膜モジュールが、内圧型の中空糸膜モジュールである、請求項7に記載の超純水製造装置。
- 前記第2の限外ろ過膜モジュールが、デッドエンド方式の中空糸膜モジュールである、請求項7に記載の超純水製造装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016163519A JP6670206B2 (ja) | 2016-08-24 | 2016-08-24 | 超純水製造装置 |
PCT/JP2017/022615 WO2018037686A1 (ja) | 2016-08-24 | 2017-06-20 | 超純水製造装置 |
SG11201901281TA SG11201901281TA (en) | 2016-08-24 | 2017-06-20 | Ultrapure water production apparatus |
US16/327,226 US20190217250A1 (en) | 2016-08-24 | 2017-06-20 | Ultrapure water production apparatus |
CN201780047472.4A CN109562964B (zh) | 2016-08-24 | 2017-06-20 | 超纯水生产设备 |
KR1020187031976A KR102119838B1 (ko) | 2016-08-24 | 2017-06-20 | 초순수 제조장치 |
TW106125795A TWI771310B (zh) | 2016-08-24 | 2017-08-01 | 超純水製造裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016163519A JP6670206B2 (ja) | 2016-08-24 | 2016-08-24 | 超純水製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018030087A true JP2018030087A (ja) | 2018-03-01 |
JP6670206B2 JP6670206B2 (ja) | 2020-03-18 |
Family
ID=61245574
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2016163519A Active JP6670206B2 (ja) | 2016-08-24 | 2016-08-24 | 超純水製造装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20190217250A1 (ja) |
JP (1) | JP6670206B2 (ja) |
KR (1) | KR102119838B1 (ja) |
CN (1) | CN109562964B (ja) |
SG (1) | SG11201901281TA (ja) |
TW (1) | TWI771310B (ja) |
WO (1) | WO2018037686A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3580177B1 (en) * | 2017-02-13 | 2023-12-13 | Merck Patent GmbH | Method and system for producing ultrapure water |
CN110300735A (zh) | 2017-02-13 | 2019-10-01 | 默克专利股份公司 | 用于生产超纯水的方法 |
WO2018146318A1 (en) | 2017-02-13 | 2018-08-16 | Merck Patent Gmbh | A method for producing ultrapure water |
KR20200134217A (ko) * | 2018-03-27 | 2020-12-01 | 노무라마이크로사이엔스가부시키가이샤 | 초순수 제조 시스템 및 초순수 제조 시스템의 운전 방법 |
CN111072107A (zh) * | 2019-11-27 | 2020-04-28 | 天津膜天膜科技股份有限公司 | 生活饮用水给水处理工艺 |
KR102630445B1 (ko) | 2021-02-26 | 2024-01-29 | 대경대학교 산학협력단 | 막걸리 제조 방법 |
Citations (10)
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JPS59183807A (ja) * | 1983-04-04 | 1984-10-19 | Asahi Chem Ind Co Ltd | 膜ろ過方法 |
JPS61200811A (ja) * | 1985-03-01 | 1986-09-05 | Kurita Water Ind Ltd | 膜分離装置 |
JPH06319959A (ja) * | 1993-05-07 | 1994-11-22 | Japan Organo Co Ltd | 両端集水中空糸モジュール取付け配管 |
JPH11179164A (ja) * | 1997-12-19 | 1999-07-06 | Nitto Denko Corp | 膜モジュ−ル |
JP2007152265A (ja) * | 2005-12-07 | 2007-06-21 | Toray Ind Inc | 淡水製造装置の運転方法および淡水製造装置 |
JP2012200696A (ja) * | 2011-03-28 | 2012-10-22 | Panasonic Corp | 脱塩方法および脱塩装置 |
JP2015039677A (ja) * | 2013-08-23 | 2015-03-02 | 日立造船株式会社 | 海水淡水化システムおよび海水淡水化方法 |
WO2015050125A1 (ja) * | 2013-10-04 | 2015-04-09 | 栗田工業株式会社 | 超純水製造装置 |
JP2016064342A (ja) * | 2014-09-24 | 2016-04-28 | オルガノ株式会社 | 超純水製造装置 |
JP2016155052A (ja) * | 2015-02-23 | 2016-09-01 | 栗田工業株式会社 | 水中微粒子の除去装置及び超純水製造・供給システム |
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-
2016
- 2016-08-24 JP JP2016163519A patent/JP6670206B2/ja active Active
-
2017
- 2017-06-20 KR KR1020187031976A patent/KR102119838B1/ko active IP Right Grant
- 2017-06-20 SG SG11201901281TA patent/SG11201901281TA/en unknown
- 2017-06-20 CN CN201780047472.4A patent/CN109562964B/zh active Active
- 2017-06-20 WO PCT/JP2017/022615 patent/WO2018037686A1/ja active Application Filing
- 2017-06-20 US US16/327,226 patent/US20190217250A1/en active Pending
- 2017-08-01 TW TW106125795A patent/TWI771310B/zh active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS59183807A (ja) * | 1983-04-04 | 1984-10-19 | Asahi Chem Ind Co Ltd | 膜ろ過方法 |
JPS61200811A (ja) * | 1985-03-01 | 1986-09-05 | Kurita Water Ind Ltd | 膜分離装置 |
JPH06319959A (ja) * | 1993-05-07 | 1994-11-22 | Japan Organo Co Ltd | 両端集水中空糸モジュール取付け配管 |
JPH11179164A (ja) * | 1997-12-19 | 1999-07-06 | Nitto Denko Corp | 膜モジュ−ル |
JP2007152265A (ja) * | 2005-12-07 | 2007-06-21 | Toray Ind Inc | 淡水製造装置の運転方法および淡水製造装置 |
JP2012200696A (ja) * | 2011-03-28 | 2012-10-22 | Panasonic Corp | 脱塩方法および脱塩装置 |
JP2015039677A (ja) * | 2013-08-23 | 2015-03-02 | 日立造船株式会社 | 海水淡水化システムおよび海水淡水化方法 |
WO2015050125A1 (ja) * | 2013-10-04 | 2015-04-09 | 栗田工業株式会社 | 超純水製造装置 |
JP2016064342A (ja) * | 2014-09-24 | 2016-04-28 | オルガノ株式会社 | 超純水製造装置 |
JP2016155052A (ja) * | 2015-02-23 | 2016-09-01 | 栗田工業株式会社 | 水中微粒子の除去装置及び超純水製造・供給システム |
Also Published As
Publication number | Publication date |
---|---|
TW201806662A (zh) | 2018-03-01 |
CN109562964A (zh) | 2019-04-02 |
US20190217250A1 (en) | 2019-07-18 |
SG11201901281TA (en) | 2019-03-28 |
CN109562964B (zh) | 2021-11-05 |
KR102119838B1 (ko) | 2020-06-05 |
WO2018037686A1 (ja) | 2018-03-01 |
KR20180125595A (ko) | 2018-11-23 |
TWI771310B (zh) | 2022-07-21 |
JP6670206B2 (ja) | 2020-03-18 |
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