JP2018006576A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2018006576A JP2018006576A JP2016131706A JP2016131706A JP2018006576A JP 2018006576 A JP2018006576 A JP 2018006576A JP 2016131706 A JP2016131706 A JP 2016131706A JP 2016131706 A JP2016131706 A JP 2016131706A JP 2018006576 A JP2018006576 A JP 2018006576A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 67
- 239000000463 material Substances 0.000 claims abstract description 54
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 29
- 229910052802 copper Inorganic materials 0.000 claims description 29
- 239000010949 copper Substances 0.000 claims description 29
- 229910052782 aluminium Inorganic materials 0.000 claims description 28
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 21
- 239000010409 thin film Substances 0.000 claims description 17
- 239000010408 film Substances 0.000 claims description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 8
- 238000009792 diffusion process Methods 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- 238000005304 joining Methods 0.000 claims description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 229910002601 GaN Inorganic materials 0.000 claims description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000005452 bending Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 10
- 230000017525 heat dissipation Effects 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 6
- 238000003825 pressing Methods 0.000 description 6
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 230000008646 thermal stress Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000013071 indirect material Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
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Abstract
Description
実施の形態1.
まず本実施の形態の半導体装置の構成について図1〜図5を用いて説明する。なお、説明の便宜のため、X方向、Y方向、Z方向が導入されている。
図10を参照して、本実施の形態の半導体装置も、実施の形態1の半導体装置と同様に、超音波接合機12を用いて電極端子5とワイヤ4と回路パターン3とが接合される。また本実施の形態の半導体装置においても複数のワイヤ4がすべて、たとえばX方向に関して互いに間隔をあけるように、Y方向に沿って延びている。ただし図10を図6と比較して、本実施の形態においては、複数のワイヤ4のうち少なくとも1つは、屈曲部5Bと平面視において重なる領域を通るように配置される。この点において本実施の形態は、複数のワイヤ4はすべて水平延在部5Aと平面視において重なる領域を通るように配置される実施の形態1と異なっている。なお本実施の形態においても、図10に示すように、複数のワイヤ4のうちのたとえば1つは屈曲部5Bと平面視において重なる領域を通るが、それ以外のワイヤ4は実施の形態1と同様に、水平延在部5Aと平面視において重なる領域を通るように配置されていてもよい。
通常は実施の形態1のように、屈曲部5Bにはワイヤ4を接合することができない。しかし本実施の形態のように屈曲部5Bと平面視において重なる領域を通るようにワイヤ4を配置すれば、少なくとも屈曲部5Bの真下にも、屈曲部5Bの最下面の曲面形状の如何によらずワイヤ4を間接材として配置させることができる。
図13を参照して、本実施の形態の半導体装置は、実施の形態1の半導体装置100と比べて、ワイヤ4の延びる方向が異なっている。具体的には、図13を図2と比較して、本実施の形態においては回路パターン3の一方の主表面3A上に接合されるワイヤ4は、X方向、すなわち水平延在部5Aと屈曲部5Bとを結ぶ方向に沿って延びている。この点においてワイヤ4がY方向、すなわち水平延在部5Aと屈曲部5Bとを結ぶ方向に交差する方向に延びる実施の形態1の図2と異なっている。
図13のようにワイヤ4を配置すれば、水平延在部5Aの真下に加えて、屈曲部5Bの真下にもワイヤ4が配置される。また実施の形態2と異なり水平延在部5Aと屈曲部5Bとを結ぶ方向にワイヤ4が延びる。すなわち個々のワイヤ4は、水平延在部5Aの真下と屈曲部5Bの真下との双方に配置されるように延びる。このためワイヤ4は少なくとも水平延在部5Aの真下において水平延在部5Aからの接触押圧力により十分に位置決めされ仮固定された状態で超音波接合される。したがって実施の形態2のように、屈曲部5Bの真下においてワイヤ4が外側に移動する可能性を低減することができ、高い位置精度でワイヤ4が回路パターン3上に接合される。
Claims (9)
- 絶縁基板の一方の主表面上に形成された、少なくとも一部に導電性を有する回路パターンと、
前記回路パターンに接合された導電性の少なくとも1つ以上のワイヤと、
前記ワイヤに接合されることにより、前記回路パターンと電気的に接続された電極端子と、
前記回路パターンに接合された半導体素子とを備え、
前記電極端子は、前記主表面に沿うように拡がり前記ワイヤと接続される水平延在部と、前記水平延在部に対して延在方向を変更するための屈曲部とを含み、
平面視において、前記回路パターンと前記ワイヤとが接合される接合部は、前記ワイヤと前記電極端子とが重なる部分よりも外側に配置されている、半導体装置。 - 前記接合部は互いに間隔をあけて2か所以上設けられる、請求項1に記載の半導体装置。
- 前記接合部は、前記水平延在部と前記屈曲部とを結ぶ方向に関して、前記屈曲部よりも前記水平延在部側の領域に配置されている、請求項1または2に記載の半導体装置。
- 前記ワイヤは複数配置され、
前記複数のワイヤのうち少なくとも1つは、前記屈曲部と平面視において重なる領域を通るように配置される、請求項1〜3のいずれか1項に記載の半導体装置。 - 前記ワイヤは、銅、アルミニウムまたは銀のいずれかを含む不純物からなる素材であり、
前記ワイヤを構成する前記素材の拡散温度は、前記回路パターンおよび前記電極端子を構成する母材の拡散温度よりも低い、請求項1〜4のいずれか1項に記載の半導体装置。 - 前記回路パターンおよび前記電極端子は、銅系またはアルミニウム系の前記母材により構成され、
前記母材においては、80質量%以上100質量%以下の銅、または90質量%以上100質量%以下のアルミニウムが含まれる、請求項5に記載の半導体装置。 - 前記回路パターンは、前記母材と、前記母材の表面上に形成された第1の薄膜とを含み、
前記第1の薄膜は、銅系のめっき膜、ニッケル系のめっき膜およびアルミニウム系のコーティング膜からなる群から選択されるいずれかである、請求項6に記載の半導体装置。 - 前記電極端子は、前記母材と、前記母材の表面上に形成された第2の薄膜とを含み、
前記第2の薄膜は、銅系のめっき膜、ニッケル系のめっき膜およびアルミニウム系のコーティング膜からなる群から選択されるいずれかである、請求項6または7に記載の半導体装置。 - 前記半導体素子は、シリコン、炭化珪素、窒化ガリウムからなる群より選択されるいずれかからなる、請求項1〜8のいずれか1項に記載の半導体装置。
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