JP2019201159A - 逆導通型半導体装置 - Google Patents
逆導通型半導体装置 Download PDFInfo
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Abstract
Description
本発明の実施形態に係る逆導通型半導体装置100は、図1及び図2に示すように、半導体チップ1、及び配線部材10を備える。半導体チップ1は、平面視において、上面1a、第1の辺1bおよび第1の辺1bに直交する第2の辺1cを有する。半導体チップ1には、少なくとも配線部材10の下方において、複数のトランジスタ部12及び複数のダイオード部14が交互に配置される。複数のトランジスタ部12及び複数のダイオード部14の上面側には上面電極9が設けられる。半導体チップ1は平面視において矩形であってよく、第1の辺1b及び第2の辺1cの長さが等しくてもよいし、第1の辺1bが第2の辺1cより長くてもよい。
図4は、半導体チップ1におけるRC−IGBTの他の構造を示す。図示を省略しているが、このRC−IGBTも、図3と同様な等価回路表示が可能である。図4の平面パターンでは、ストライプ状のダイオード部14aが、IGBT部(トランジスタ部)12aの主電流通路と交互に活性領域3の端部まで延伸している。図4に示す半導体チップ1にはワイヤボンディングまたはリードフレームを電気的に接続できる。
図8は、配線部材10の平板部10aの端部を、複数のダイオード部14aのストライプのパターンの延伸方向(X軸方向)に平行に配置した逆導通型半導体装置200を示す。図8に示す構造では配線部材10の平板部10aから立ち上がる導電部10bの主面の方向は、複数のダイオード部14aのストライプパターンの延伸方向に平行に配置される。
上記のように、本発明は一つの実施形態によって記載したが、この開示の一部をなす論述及び図面は本発明を限定するものであると理解すべきではない。特に、実施形態に係る逆導通型半導体装置として、スイッチング素子であるIGBTと、このIGBTを保護するFWDが同一半導体チップに集積化されたRC−IGBTについて例示したが、RC−IGBTに限定されるものではない。実施形態に係る逆導通型半導体装置は、半導体チップの主面に垂直方向に主電流が流れる縦型のスイッチング素子と、この主電流の反対方向に還流電流を流す縦型の保護ダイオードを備えた構造であれば構わない。例えば逆導通型半導体装置を構成するスイッチング素子は、ゲートターンオフ(GTO)サイリスタや静電誘導(SI)サイリスタ等のサイリスタであっても構わない。
2・・・スイッチング素子
3・・・活性領域
4・・・保護ダイオード
9・・・上面電極(エミッタ電極)
10・・・配線部材
10a・・・平板部
10b・・・導電部
12、12a・・・トランジスタ部
14、14a・・・ダイオード部(環流電流通路)
20・・・接合部材
100,200,300,400 逆導通型半導体装置
Claims (6)
- 平面視において、上面、第1の辺及び前記第1の辺に直交する第2の辺を有し、複数のトランジスタ部及び複数のダイオード部が交互に配置され、前記複数のトランジスタ部及び前記複数のダイオード部の上面側に上面電極が設けられた半導体チップと、
前記ダイオード部の上方において、接合部材を介して前記上面電極に金属学的に接合される矩形の平板部を有する配線部材と、を備え、
前記複数のトランジスタ部は、それぞれ、平面視において前記第1の辺に平行に延伸するストライプ状のパターンを有し、前記半導体チップの上面に垂直な方向に主電流通路を構成し、
前記複数のダイオード部は、それぞれ、平面視において前記第1の辺に平行に延伸するストライプ状のパターンを有し、前記半導体チップの上面に垂直な方向に環流電流通路を構成し、
更に、前記配線部材が前記平板部の端部から前記上面電極の反対方向に立ち上がる導電部を有し、前記平板部の端部が前記第1の辺に平行に配置されている逆導通型半導体装置。 - 前記半導体チップは平面視において矩形であり、前記第1の辺が前記第2の辺より長い請求項1に記載の逆導通型半導体装置。
- 前記複数のダイオード部の環流電流通路は、前記複数のトランジスタ部の主電流通路の一部を挟んで、互いに平行に延伸することを特徴とする請求項1に記載の逆導通型半導体装置。
- 前記導電部が、外部回路に電気的に接続され得る請求項1〜3のいずれか1項に記載の逆導通型半導体装置。
- 前記複数のダイオード部の全領域が、平面視において、前記平板部で覆われる請求項1〜4のいずれか1項に記載の逆導通型半導体装置。
- 平面視において、前記平板部で覆われた前記ダイオード部の面積が、前記平板部の面積に対して20%以上、60%以下である請求項1〜5のいずれか1項に記載の逆導通型半導体装置。
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