JP2017537227A5 - - Google Patents
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- Publication number
- JP2017537227A5 JP2017537227A5 JP2017527875A JP2017527875A JP2017537227A5 JP 2017537227 A5 JP2017537227 A5 JP 2017537227A5 JP 2017527875 A JP2017527875 A JP 2017527875A JP 2017527875 A JP2017527875 A JP 2017527875A JP 2017537227 A5 JP2017537227 A5 JP 2017537227A5
- Authority
- JP
- Japan
- Prior art keywords
- apertures
- collimator
- openings
- aspect ratio
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 230000007704 transition Effects 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005477 sputtering target Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462085009P | 2014-11-26 | 2014-11-26 | |
| US62/085,009 | 2014-11-26 | ||
| US14/607,273 US9543126B2 (en) | 2014-11-26 | 2015-01-28 | Collimator for use in substrate processing chambers |
| US14/607,273 | 2015-01-28 | ||
| PCT/US2015/061826 WO2016085805A1 (en) | 2014-11-26 | 2015-11-20 | Collimator for use in substrate processing chambers |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017537227A JP2017537227A (ja) | 2017-12-14 |
| JP2017537227A5 true JP2017537227A5 (enExample) | 2019-01-10 |
| JP6959863B2 JP6959863B2 (ja) | 2021-11-05 |
Family
ID=56009603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017527875A Active JP6959863B2 (ja) | 2014-11-26 | 2015-11-20 | 基板処理チャンバで使用するためのコリメータ |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9543126B2 (enExample) |
| EP (2) | EP3140851B1 (enExample) |
| JP (1) | JP6959863B2 (enExample) |
| KR (1) | KR101824517B1 (enExample) |
| CN (2) | CN107002220B (enExample) |
| IL (1) | IL251944B (enExample) |
| SG (2) | SG10202009604WA (enExample) |
| TW (1) | TWI618172B (enExample) |
| WO (1) | WO2016085805A1 (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20240127488A (ko) * | 2015-10-27 | 2024-08-22 | 어플라이드 머티어리얼스, 인코포레이티드 | Pvd 스퍼터 챔버를 위한 바이어스가능 플럭스 최적화기/콜리메이터 |
| KR102311740B1 (ko) | 2016-03-05 | 2021-10-08 | 어플라이드 머티어리얼스, 인코포레이티드 | 물리 기상 증착 프로세스들에서 이온 프랙션을 제어하기 위한 방법들 및 장치 |
| US10697057B2 (en) | 2016-11-18 | 2020-06-30 | Applied Materials, Inc. | Collimator for use in a physical vapor deposition chamber |
| JP2018154880A (ja) * | 2017-03-17 | 2018-10-04 | 株式会社東芝 | コリメータおよび処理装置 |
| CN109390222B (zh) * | 2017-08-08 | 2021-01-05 | 宁波江丰电子材料股份有限公司 | 准直器检具及其使用方法 |
| USD858468S1 (en) | 2018-03-16 | 2019-09-03 | Applied Materials, Inc. | Collimator for a physical vapor deposition chamber |
| USD859333S1 (en) | 2018-03-16 | 2019-09-10 | Applied Materials, Inc. | Collimator for a physical vapor deposition chamber |
| US11017989B2 (en) | 2018-03-16 | 2021-05-25 | Samsung Electronics Co., Ltd. | Collimator, fabrication apparatus including the same, and method of fabricating a semiconductor device using the same |
| WO2020088415A1 (zh) * | 2018-10-31 | 2020-05-07 | 北京北方华创微电子装备有限公司 | 反应腔室及半导体加工设备 |
| CN109457231B (zh) * | 2018-11-26 | 2020-04-03 | 武汉华星光电半导体显示技术有限公司 | 蒸镀载板及利用该蒸镀载板对基板进行蒸镀的方法 |
| CN111826607A (zh) * | 2019-04-18 | 2020-10-27 | 天通（嘉兴）新材料有限公司 | 一种激光管帽镀膜遮挡治具 |
| CN110643958A (zh) * | 2019-10-21 | 2020-01-03 | 吴浪生 | 一种利用溅镀实现晶圆的物理镀膜设备 |
| USD937329S1 (en) | 2020-03-23 | 2021-11-30 | Applied Materials, Inc. | Sputter target for a physical vapor deposition chamber |
| USD998575S1 (en) | 2020-04-07 | 2023-09-12 | Applied Materials, Inc. | Collimator for use in a physical vapor deposition (PVD) chamber |
| US11635338B2 (en) * | 2020-10-23 | 2023-04-25 | Applied Materials, Inc. | Rapid chamber vacuum leak check hardware and maintenance routine |
| USD1009816S1 (en) | 2021-08-29 | 2024-01-02 | Applied Materials, Inc. | Collimator for a physical vapor deposition chamber |
| USD997111S1 (en) | 2021-12-15 | 2023-08-29 | Applied Materials, Inc. | Collimator for use in a physical vapor deposition (PVD) chamber |
| USD1038901S1 (en) * | 2022-01-12 | 2024-08-13 | Applied Materials, Inc. | Collimator for a physical vapor deposition chamber |
| FI20225334A1 (en) * | 2022-04-21 | 2023-10-22 | Biomensio Ltd | Collimator to produce piezoelectric layers having tilted c-axis orientation |
| USD1026054S1 (en) * | 2022-04-22 | 2024-05-07 | Applied Materials, Inc. | Collimator for a physical vapor deposition (PVD) chamber |
| USD1025935S1 (en) * | 2022-11-03 | 2024-05-07 | Applied Materials, Inc. | Collimator for a physical vapor deposition (PVD) chamber |
| USD1026839S1 (en) * | 2022-12-16 | 2024-05-14 | Applied Materials, Inc. | Collimator for a physical vapor deposition (PVD) chamber |
| USD1024149S1 (en) * | 2022-12-16 | 2024-04-23 | Applied Materials, Inc. | Collimator for a physical vapor deposition (PVD) chamber |
| USD1025936S1 (en) * | 2022-12-16 | 2024-05-07 | Applied Materials, Inc. | Collimator for a physical vapor deposition (PVD) chamber |
| CN118854235B (zh) * | 2023-04-27 | 2025-10-10 | 北京北方华创微电子装备有限公司 | 工艺腔室以及半导体工艺设备 |
| CN119020736A (zh) * | 2023-05-24 | 2024-11-26 | 北京北方华创微电子装备有限公司 | 物理气相沉积设备的准直装置及物理气相沉积设备 |
| USD1103950S1 (en) * | 2024-03-21 | 2025-12-02 | Applied Materials, Inc. | Process chamber collimator |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5223108A (en) * | 1991-12-30 | 1993-06-29 | Materials Research Corporation | Extended lifetime collimator |
| JPH06295903A (ja) * | 1993-02-09 | 1994-10-21 | Matsushita Electron Corp | スパッタリング装置 |
| KR970009828B1 (en) * | 1994-02-23 | 1997-06-18 | Sansung Electronics Co Ltd | Fabrication method of collimator |
| JPH08260139A (ja) * | 1995-03-23 | 1996-10-08 | Sony Corp | 成膜用コリメータ、成膜装置及び電子装置の製造方法 |
| US5650052A (en) * | 1995-10-04 | 1997-07-22 | Edelstein; Sergio | Variable cell size collimator |
| US6362097B1 (en) | 1998-07-14 | 2002-03-26 | Applied Komatsu Technlology, Inc. | Collimated sputtering of semiconductor and other films |
| JP2005504885A (ja) | 2001-07-25 | 2005-02-17 | アプライド マテリアルズ インコーポレイテッド | 新規なスパッタ堆積方法を使用したバリア形成 |
| US20030029715A1 (en) | 2001-07-25 | 2003-02-13 | Applied Materials, Inc. | An Apparatus For Annealing Substrates In Physical Vapor Deposition Systems |
| WO2005041172A1 (en) * | 2003-09-29 | 2005-05-06 | Seagate Technology Llc | System, method and collimator for oblique deposition |
| JP2007273490A (ja) * | 2004-03-30 | 2007-10-18 | Renesas Technology Corp | 半導体集積回路装置の製造方法 |
| EP1710324B1 (en) | 2005-04-08 | 2008-12-03 | STMicroelectronics S.r.l. | PVD process and chamber for the pulsed deposition of a chalcogenide material layer of a phase change memory device |
| US9316413B2 (en) | 2008-06-11 | 2016-04-19 | Honeywell International Inc. | Selectable efficiency versus comfort for modulating furnace |
| KR20200093084A (ko) * | 2008-06-17 | 2020-08-04 | 어플라이드 머티어리얼스, 인코포레이티드 | 균일한 증착을 위한 장치 및 방법 |
| US20090308739A1 (en) | 2008-06-17 | 2009-12-17 | Applied Materials, Inc. | Wafer processing deposition shielding components |
| KR101929971B1 (ko) * | 2009-04-24 | 2018-12-18 | 어플라이드 머티어리얼스, 인코포레이티드 | 웨이퍼 프로세싱 증착 차폐 부품 |
| CN103343317A (zh) * | 2013-07-11 | 2013-10-09 | 南京大学 | 基于纳米团簇束流沉积系统制备TiO2纳米颗粒减反膜的方法 |
-
2015
- 2015-01-28 US US14/607,273 patent/US9543126B2/en active Active
- 2015-11-20 SG SG10202009604WA patent/SG10202009604WA/en unknown
- 2015-11-20 SG SG11201703543RA patent/SG11201703543RA/en unknown
- 2015-11-20 TW TW104138508A patent/TWI618172B/zh active
- 2015-11-20 EP EP15862359.5A patent/EP3140851B1/en active Active
- 2015-11-20 JP JP2017527875A patent/JP6959863B2/ja active Active
- 2015-11-20 EP EP20172767.4A patent/EP3723113A1/en not_active Withdrawn
- 2015-11-20 WO PCT/US2015/061826 patent/WO2016085805A1/en not_active Ceased
- 2015-11-20 KR KR1020167031655A patent/KR101824517B1/ko active Active
- 2015-11-20 CN CN201580061359.2A patent/CN107002220B/zh active Active
- 2015-11-20 CN CN201811129929.9A patent/CN109338293B/zh active Active
-
2017
- 2017-04-26 IL IL251944A patent/IL251944B/en active IP Right Grant
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