JP2017519971A5 - - Google Patents

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Publication number
JP2017519971A5
JP2017519971A5 JP2016564037A JP2016564037A JP2017519971A5 JP 2017519971 A5 JP2017519971 A5 JP 2017519971A5 JP 2016564037 A JP2016564037 A JP 2016564037A JP 2016564037 A JP2016564037 A JP 2016564037A JP 2017519971 A5 JP2017519971 A5 JP 2017519971A5
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JP
Japan
Prior art keywords
wafer
position detector
filter
line
image sensor
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Pending
Application number
JP2016564037A
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English (en)
Japanese (ja)
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JP2017519971A (ja
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Publication date
Priority claimed from US14/691,966 external-priority patent/US9927371B2/en
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Publication of JP2017519971A publication Critical patent/JP2017519971A/ja
Publication of JP2017519971A5 publication Critical patent/JP2017519971A5/ja
Pending legal-status Critical Current

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JP2016564037A 2014-04-22 2015-04-22 共焦点ライン検査光学システム Pending JP2017519971A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201461982754P 2014-04-22 2014-04-22
US61/982,754 2014-04-22
US14/691,966 US9927371B2 (en) 2014-04-22 2015-04-21 Confocal line inspection optical system
US14/691,966 2015-04-21
PCT/US2015/027162 WO2015164540A1 (en) 2014-04-22 2015-04-22 Confocal line inspection optical system

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021000852A Division JP2021067697A (ja) 2014-04-22 2021-01-06 ウエハ検査システム及び装置

Publications (2)

Publication Number Publication Date
JP2017519971A JP2017519971A (ja) 2017-07-20
JP2017519971A5 true JP2017519971A5 (https=) 2018-05-31

Family

ID=54333152

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2016564037A Pending JP2017519971A (ja) 2014-04-22 2015-04-22 共焦点ライン検査光学システム
JP2021000852A Pending JP2021067697A (ja) 2014-04-22 2021-01-06 ウエハ検査システム及び装置
JP2022167694A Active JP7599463B2 (ja) 2014-04-22 2022-10-19 ウエハ検査システム及び装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2021000852A Pending JP2021067697A (ja) 2014-04-22 2021-01-06 ウエハ検査システム及び装置
JP2022167694A Active JP7599463B2 (ja) 2014-04-22 2022-10-19 ウエハ検査システム及び装置

Country Status (6)

Country Link
US (1) US9927371B2 (https=)
JP (3) JP2017519971A (https=)
KR (1) KR20160146913A (https=)
CN (1) CN106233125B (https=)
IL (1) IL247812A0 (https=)
WO (1) WO2015164540A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT516887B1 (de) * 2015-02-27 2022-12-15 Ait Austrian Inst Tech Gmbh Bildaufnahmeeinheit
US9860466B2 (en) 2015-05-14 2018-01-02 Kla-Tencor Corporation Sensor with electrically controllable aperture for inspection and metrology systems
US10778925B2 (en) 2016-04-06 2020-09-15 Kla-Tencor Corporation Multiple column per channel CCD sensor architecture for inspection and metrology
US10313622B2 (en) 2016-04-06 2019-06-04 Kla-Tencor Corporation Dual-column-parallel CCD sensor and inspection systems using a sensor
US11662646B2 (en) 2017-02-05 2023-05-30 Kla Corporation Inspection and metrology using broadband infrared radiation
CN108519329B (zh) * 2018-03-26 2021-01-15 华中科技大学 一种多路扫描与探测的线共聚焦成像装置
US11624710B2 (en) * 2019-05-24 2023-04-11 Lawrence Livermore National Security, Llc Fast image acquisition system and method using pulsed light illumination and sample scanning to capture optical micrographs with sub-micron features

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61149812A (ja) * 1984-12-24 1986-07-08 Mitsubishi Electric Corp 振動する物体の表面検査装置
JPS62103503A (ja) * 1985-10-31 1987-05-14 Hitachi Electronics Eng Co Ltd ウエハ測定装置
JPH0749209A (ja) * 1993-08-05 1995-02-21 Hitachi Electron Eng Co Ltd ラインセンサの位置合せ方法
US5965910A (en) 1997-04-29 1999-10-12 Ohmeda Inc. Large cell charge coupled device for spectroscopy
US6201601B1 (en) 1997-09-19 2001-03-13 Kla-Tencor Corporation Sample inspection system
ATE272224T1 (de) 1997-11-17 2004-08-15 Max Planck Gesellschaft Konfokales spektroskopiesystem und -verfahren
KR20020084786A (ko) 2001-05-04 2002-11-11 이재웅 선형 선 스캐닝을 이용하는 공초점 영상 형성 장치 및 방법
US7435941B2 (en) 2003-03-14 2008-10-14 Inphase Technologies, Inc. Methods for measuring optical characteristics by differential diffractive scanning
JP2005055196A (ja) 2003-08-05 2005-03-03 Olympus Corp 基板検査方法及びその装置
WO2005104111A1 (ja) 2004-04-21 2005-11-03 Matsushita Electric Industrial Co., Ltd. 共焦点光学系開口位置検出装置、共焦点光学系開口位置制御装置、光ヘッド装置、光情報処理装置および共焦点光学系開口位置検出方法
DE102004034970A1 (de) * 2004-07-16 2006-02-02 Carl Zeiss Jena Gmbh Lichtrastermikroskop und Verwendung
EP2093600A4 (en) 2006-12-22 2011-06-08 Nikon Corp CONFOCAL MICROSCOPE WITH LASER SCAN
JP5489392B2 (ja) * 2007-05-09 2014-05-14 オリンパス株式会社 光学系評価装置、光学系評価方法および光学系評価プログラム
US7525649B1 (en) 2007-10-19 2009-04-28 Kla-Tencor Technologies Corporation Surface inspection system using laser line illumination with two dimensional imaging
JP2010019630A (ja) * 2008-07-09 2010-01-28 Tokyo Institute Of Technology 顕微分光装置
TWI490444B (zh) * 2009-01-23 2015-07-01 Univ Nat Taipei Technology 線型多波長共焦顯微方法與系統
WO2010126790A1 (en) * 2009-04-27 2010-11-04 The Arizona Board Of Regents On Behalf Of The University Of Arizona A novel multi-point scan architecture
KR101704591B1 (ko) * 2012-02-21 2017-02-08 에이에스엠엘 네델란즈 비.브이. 검사 장치 및 방법

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