JP2017509797A5 - - Google Patents

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Publication number
JP2017509797A5
JP2017509797A5 JP2016559546A JP2016559546A JP2017509797A5 JP 2017509797 A5 JP2017509797 A5 JP 2017509797A5 JP 2016559546 A JP2016559546 A JP 2016559546A JP 2016559546 A JP2016559546 A JP 2016559546A JP 2017509797 A5 JP2017509797 A5 JP 2017509797A5
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JP
Japan
Prior art keywords
chamber
processing
processing system
vacuum
vacuum processing
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Application number
JP2016559546A
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English (en)
Japanese (ja)
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JP6375387B2 (ja
JP2017509797A (ja
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Priority claimed from PCT/EP2014/056605 external-priority patent/WO2015149849A1/en
Publication of JP2017509797A publication Critical patent/JP2017509797A/ja
Publication of JP2017509797A5 publication Critical patent/JP2017509797A5/ja
Application granted granted Critical
Publication of JP6375387B2 publication Critical patent/JP6375387B2/ja
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JP2016559546A 2014-04-02 2014-04-02 真空処理システム、及び処理システムを取り付けるための方法 Active JP6375387B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/056605 WO2015149849A1 (en) 2014-04-02 2014-04-02 Vacuum processing system and method for mounting a processing system

Publications (3)

Publication Number Publication Date
JP2017509797A JP2017509797A (ja) 2017-04-06
JP2017509797A5 true JP2017509797A5 (enExample) 2017-05-25
JP6375387B2 JP6375387B2 (ja) 2018-08-15

Family

ID=50440648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016559546A Active JP6375387B2 (ja) 2014-04-02 2014-04-02 真空処理システム、及び処理システムを取り付けるための方法

Country Status (7)

Country Link
US (1) US10648072B2 (enExample)
EP (1) EP3126541A1 (enExample)
JP (1) JP6375387B2 (enExample)
KR (1) KR102196407B1 (enExample)
CN (1) CN106164330B (enExample)
TW (1) TWI727921B (enExample)
WO (1) WO2015149849A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3414359A2 (en) * 2016-02-12 2018-12-19 Applied Materials, Inc. Vacuum processing system and methods therefor
US10304716B1 (en) * 2017-12-20 2019-05-28 Powertech Technology Inc. Package structure and manufacturing method thereof
WO2019188976A1 (ja) * 2018-03-30 2019-10-03 Ｊｆｅスチール株式会社 方向性電磁鋼板の製造方法および連続成膜装置
EP3921453A4 (en) * 2019-03-05 2022-11-30 Xefco Pty Ltd ENHANCED VAPOR SEPARATION SYSTEM, PROCESS AND HUMIDITY REGULATOR
EP4088826A4 (en) * 2020-01-06 2023-07-05 Nihon Spindle Manufacturing Co., Ltd. Coating device, partition member, and coating method
WO2021185444A1 (en) * 2020-03-18 2021-09-23 Applied Materials, Inc. Vacuum processing system for a flexible substrate, method of depositing a layer stack on a flexible substrate, and layer system
KR102896631B1 (ko) * 2020-06-04 2025-12-04 엘리베이티드 머티어리얼스 저머니 게엠베하 진공 챔버에서 기판을 코팅하기 위한 기상 증착 장치 및 방법
JP2023538038A (ja) * 2020-08-21 2023-09-06 アプライド マテリアルズ インコーポレイテッド フレキシブル基板を処理するための処理システム並びにフレキシブル基板の特性及びフレキシブル基板上の１つ又は複数のコーティングの特性のうちの少なくとも１つを測定する方法
KR102800920B1 (ko) * 2021-04-21 2025-05-12 엘리베이티드 머티어리얼스 저머니 게엠베하 재료 증착 장치, 기판 상에 재료를 증착하는 방법, 및 재료 증착 시스템
WO2023172915A1 (en) * 2022-03-08 2023-09-14 10X Genomics, Inc. In situ code design methods for minimizing optical crowding

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0466999A1 (en) * 1990-07-18 1992-01-22 Engineering Films-Establishment Process and apparatus for the surfacing of tape substrates of reels
JP3332700B2 (ja) * 1995-12-22 2002-10-07 キヤノン株式会社 堆積膜形成方法及び堆積膜形成装置
CA2492597A1 (en) * 2002-07-17 2004-01-22 Hitco Carbon Composites, Inc. Continuous chemical vapor deposition process and process furnace
JP4591080B2 (ja) * 2004-12-27 2010-12-01 富士電機システムズ株式会社 薄膜形成装置
US7799182B2 (en) 2006-12-01 2010-09-21 Applied Materials, Inc. Electroplating on roll-to-roll flexible solar cell substrates
EP1988186A1 (en) * 2007-04-24 2008-11-05 Galileo Vacuum Systems S.p.A. Multichamber vacuum deposition system
KR20100126717A (ko) * 2008-03-04 2010-12-02 솔렉슨트 코포레이션 태양 전지의 제조 방법
US8117987B2 (en) * 2009-09-18 2012-02-21 Applied Materials, Inc. Hot wire chemical vapor deposition (CVD) inline coating tool
US9303316B1 (en) * 2010-01-15 2016-04-05 Apollo Precision Kunming Yuanhong Limited Continuous web apparatus and method using an air to vacuum seal and accumulator
JP2012136724A (ja) 2010-12-24 2012-07-19 Kobe Steel Ltd 巻取り式連続成膜装置
JP2013196848A (ja) * 2012-03-16 2013-09-30 Nitto Denko Corp 有機ｅｌ素子の製造方法及び製造装置

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