JP2017509797A5 - - Google Patents

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Publication number
JP2017509797A5
JP2017509797A5 JP2016559546A JP2016559546A JP2017509797A5 JP 2017509797 A5 JP2017509797 A5 JP 2017509797A5 JP 2016559546 A JP2016559546 A JP 2016559546A JP 2016559546 A JP2016559546 A JP 2016559546A JP 2017509797 A5 JP2017509797 A5 JP 2017509797A5
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JP
Japan
Prior art keywords
chamber
processing
processing system
vacuum
vacuum processing
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Application number
JP2016559546A
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English (en)
Japanese (ja)
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JP2017509797A (ja
JP6375387B2 (ja
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Priority claimed from PCT/EP2014/056605 external-priority patent/WO2015149849A1/en
Publication of JP2017509797A publication Critical patent/JP2017509797A/ja
Publication of JP2017509797A5 publication Critical patent/JP2017509797A5/ja
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Publication of JP6375387B2 publication Critical patent/JP6375387B2/ja
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JP2016559546A 2014-04-02 2014-04-02 真空処理システム、及び処理システムを取り付けるための方法 Active JP6375387B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/056605 WO2015149849A1 (en) 2014-04-02 2014-04-02 Vacuum processing system and method for mounting a processing system

Publications (3)

Publication Number Publication Date
JP2017509797A JP2017509797A (ja) 2017-04-06
JP2017509797A5 true JP2017509797A5 (enExample) 2017-05-25
JP6375387B2 JP6375387B2 (ja) 2018-08-15

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ID=50440648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016559546A Active JP6375387B2 (ja) 2014-04-02 2014-04-02 真空処理システム、及び処理システムを取り付けるための方法

Country Status (7)

Country Link
US (1) US10648072B2 (enExample)
EP (1) EP3126541A1 (enExample)
JP (1) JP6375387B2 (enExample)
KR (1) KR102196407B1 (enExample)
CN (1) CN106164330B (enExample)
TW (1) TWI727921B (enExample)
WO (1) WO2015149849A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016128560A2 (en) * 2016-02-12 2016-08-18 Applied Materials, Inc. Vacuum processing system and methods therefor
US10304716B1 (en) * 2017-12-20 2019-05-28 Powertech Technology Inc. Package structure and manufacturing method thereof
WO2019188976A1 (ja) * 2018-03-30 2019-10-03 Ｊｆｅスチール株式会社 方向性電磁鋼板の製造方法および連続成膜装置
CN113544306A (zh) * 2019-03-05 2021-10-22 施福克私人有限公司 改进的气相沉积系统、方法和湿度控制装置
JP7554777B2 (ja) * 2020-01-06 2024-09-20 日本スピンドル製造株式会社 塗工装置、仕切部材及び塗工方法
WO2021185444A1 (en) * 2020-03-18 2021-09-23 Applied Materials, Inc. Vacuum processing system for a flexible substrate, method of depositing a layer stack on a flexible substrate, and layer system
CN115667574A (zh) * 2020-06-04 2023-01-31 应用材料公司 气相沉积设备和在真空腔室中涂覆基板的方法
US20230137506A1 (en) * 2020-08-21 2023-05-04 Applied Materials, Inc. Processing system for processing a flexible substrate and method of measuring at least one of a property of a flexible substrate and a property of one or more coatings on the flexible substrate
JP7663714B2 (ja) * 2021-04-21 2025-04-16 アプライド マテリアルズ インコーポレイテッド 材料堆積装置、基板上に材料を堆積する方法、および材料堆積システム
CN118974836A (zh) * 2022-03-08 2024-11-15 10X基因组学有限公司 将光学拥挤最小化的原位代码设计方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0466999A1 (en) 1990-07-18 1992-01-22 Engineering Films-Establishment Process and apparatus for the surfacing of tape substrates of reels
JP3332700B2 (ja) * 1995-12-22 2002-10-07 キヤノン株式会社 堆積膜形成方法及び堆積膜形成装置
CA2492597A1 (en) * 2002-07-17 2004-01-22 Hitco Carbon Composites, Inc. Continuous chemical vapor deposition process and process furnace
JP4591080B2 (ja) 2004-12-27 2010-12-01 富士電機システムズ株式会社 薄膜形成装置
US7799182B2 (en) * 2006-12-01 2010-09-21 Applied Materials, Inc. Electroplating on roll-to-roll flexible solar cell substrates
EP1988186A1 (en) * 2007-04-24 2008-11-05 Galileo Vacuum Systems S.p.A. Multichamber vacuum deposition system
AU2009220188A1 (en) * 2008-03-04 2009-09-11 Solexant Corp. Process for making solar cells
US8117987B2 (en) * 2009-09-18 2012-02-21 Applied Materials, Inc. Hot wire chemical vapor deposition (CVD) inline coating tool
US9303316B1 (en) * 2010-01-15 2016-04-05 Apollo Precision Kunming Yuanhong Limited Continuous web apparatus and method using an air to vacuum seal and accumulator
JP2012136724A (ja) 2010-12-24 2012-07-19 Kobe Steel Ltd 巻取り式連続成膜装置
JP2013196848A (ja) 2012-03-16 2013-09-30 Nitto Denko Corp 有機ｅｌ素子の製造方法及び製造装置

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