JP2017509794A5 - - Google Patents
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- Publication number
- JP2017509794A5 JP2017509794A5 JP2016557604A JP2016557604A JP2017509794A5 JP 2017509794 A5 JP2017509794 A5 JP 2017509794A5 JP 2016557604 A JP2016557604 A JP 2016557604A JP 2016557604 A JP2016557604 A JP 2016557604A JP 2017509794 A5 JP2017509794 A5 JP 2017509794A5
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- source array
- array according
- distribution
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000001704 evaporation Methods 0.000 claims description 67
- 230000008020 evaporation Effects 0.000 claims description 63
- 238000000151 deposition Methods 0.000 claims description 46
- 230000008021 deposition Effects 0.000 claims description 44
- 239000000758 substrate Substances 0.000 claims description 41
- 238000001816 cooling Methods 0.000 claims description 25
- 239000011368 organic material Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000012423 maintenance Methods 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000012809 cooling fluid Substances 0.000 claims 1
- 230000002441 reversible effect Effects 0.000 claims 1
- 238000012546 transfer Methods 0.000 description 33
- 238000004519 manufacturing process Methods 0.000 description 13
- 238000005538 encapsulation Methods 0.000 description 11
- 239000010409 thin film Substances 0.000 description 9
- 238000012545 processing Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 239000012080 ambient air Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2014/055744 WO2015139777A1 (en) | 2014-03-21 | 2014-03-21 | Evaporation source for organic material |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019137536A Division JP2019214791A (ja) | 2019-07-26 | 2019-07-26 | 有機材料用の蒸発源 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017509794A JP2017509794A (ja) | 2017-04-06 |
| JP2017509794A5 true JP2017509794A5 (enExample) | 2017-05-25 |
| JP6704348B2 JP6704348B2 (ja) | 2020-06-03 |
Family
ID=50382443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016557604A Active JP6704348B2 (ja) | 2014-03-21 | 2014-03-21 | 有機材料用の蒸発源 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20170081755A1 (enExample) |
| EP (1) | EP3119920A1 (enExample) |
| JP (1) | JP6704348B2 (enExample) |
| KR (1) | KR101997808B1 (enExample) |
| CN (1) | CN106133184B (enExample) |
| TW (1) | TWI640646B (enExample) |
| WO (1) | WO2015139777A1 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102082192B1 (ko) * | 2014-11-07 | 2020-02-27 | 어플라이드 머티어리얼스, 인코포레이티드 | 증발된 재료를 증착하기 위한 장치, 분배 파이프, 진공 증착 챔버, 및 증발된 재료를 증착하기 위한 방법 |
| WO2017121491A1 (en) * | 2016-01-15 | 2017-07-20 | Applied Materials, Inc. | Evaporation source, apparatus and method for depositing organic material |
| CN107592889A (zh) * | 2016-05-10 | 2018-01-16 | 应用材料公司 | 用于沉积已蒸发材料的蒸发源与用于沉积已蒸发材料的方法 |
| CN106595759B (zh) * | 2016-12-07 | 2019-02-01 | 上海宇航系统工程研究所 | 一种低温推进剂贮存技术地面试验系统 |
| JP2019503431A (ja) * | 2016-12-12 | 2019-02-07 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 基板上に材料を堆積する装置、基板上に１つ以上の層を堆積するシステム、及び真空堆積システムをモニタする方法 |
| CN106637091B (zh) * | 2017-02-24 | 2019-08-30 | 旭科新能源股份有限公司 | 用于薄膜太阳能电池制造的高温蒸发炉 |
| JP6602465B2 (ja) * | 2017-02-24 | 2019-11-06 | アプライド マテリアルズ インコーポレイテッド | 基板キャリア及びマスクキャリアの位置決め装置、基板キャリア及びマスクキャリアの搬送システム、並びにそのための方法 |
| JP6549314B2 (ja) * | 2017-03-17 | 2019-07-24 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 堆積システム、堆積装置、及び堆積システムを操作する方法 |
| CN109154063A (zh) * | 2017-04-28 | 2019-01-04 | 应用材料公司 | 真空系统和用于在基板上沉积多个材料的方法 |
| JP2019534938A (ja) * | 2017-09-26 | 2019-12-05 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 材料堆積装置、真空堆積システム、及び真空堆積を行う方法 |
| CN111344433A (zh) * | 2017-11-16 | 2020-06-26 | 应用材料公司 | 冷却沉积源的方法、用于冷却沉积源的腔室和沉积系统 |
| CN110621803B (zh) * | 2018-04-18 | 2022-07-12 | 应用材料公司 | 用于沉积已蒸发材料于基板上的蒸发源、沉积设备、用于测量已蒸发材料的蒸汽压力的方法、及用于确定已蒸发材料的蒸发率的方法 |
| KR20200138391A (ko) * | 2018-06-15 | 2020-12-09 | 어플라이드 머티어리얼스, 인코포레이티드 | 증착 영역을 냉각시키기 위한 냉각 시스템, 증착 영역에서 재료를 증착하기 위한 어레인지먼트, 및 증착 영역에서 기판 상에 증착하는 방법 |
| WO2020030252A1 (en) * | 2018-08-07 | 2020-02-13 | Applied Materials, Inc. | Material deposition apparatus, vacuum deposition system and method of processing a large area substrate |
| US10566168B1 (en) * | 2018-08-10 | 2020-02-18 | John Bennett | Low voltage electron transparent pellicle |
| CN108842134B (zh) * | 2018-08-29 | 2024-01-16 | 郑州华晶新能源科技有限公司 | 一种油屏蔽挥发装置 |
| KR20200040537A (ko) * | 2018-10-10 | 2020-04-20 | 엘지디스플레이 주식회사 | 측향식 진공증착용 소스, 소스 어셈블리 및 이를 이용한 측향식 진공증착 장치 |
| WO2020126041A1 (en) * | 2018-12-21 | 2020-06-25 | Applied Materials, Inc. | Vapor deposition apparatus and method for coating a substrate in a vacuum chamber |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100477546B1 (ko) * | 2002-07-24 | 2005-03-18 | 주식회사 소로나 | 유기물질 증착방법 및 이를 적용한 장치 |
| JP2005002450A (ja) * | 2003-06-13 | 2005-01-06 | Pioneer Electronic Corp | 蒸着方法、蒸着ヘッド、及び有機エレクトロルミネッセンス表示パネルの製造装置 |
| EP1505167B1 (en) * | 2003-08-04 | 2014-09-17 | LG Display Co., Ltd. | Evaporation source |
| JP4557170B2 (ja) * | 2004-11-26 | 2010-10-06 | 三星モバイルディスプレイ株式會社 | 蒸発源 |
| EP1752555A1 (de) * | 2005-07-28 | 2007-02-14 | Applied Materials GmbH & Co. KG | Verdampfervorrichtung |
| PL1752554T3 (pl) * | 2005-07-28 | 2008-03-31 | Applied Mat Gmbh & Co Kg | Urządzenie do naparowywania |
| JP5183310B2 (ja) * | 2008-06-12 | 2013-04-17 | 日立造船株式会社 | 蒸着装置 |
| KR20090130559A (ko) * | 2008-06-16 | 2009-12-24 | 삼성모바일디스플레이주식회사 | 이송 장치 및 이를 구비하는 유기물 증착 장치 |
| EP2204467B1 (en) * | 2008-12-23 | 2014-05-07 | Applied Materials, Inc. | Method and apparatus for depositing mixed layers |
| DE102010041376A1 (de) * | 2009-09-25 | 2011-04-07 | Von Ardenne Anlagentechnik Gmbh | Verdampfereinrichtung für eine Beschichtungsanlage und Verfahren zur Koverdampfung von mindestens zwei Substanzen |
| KR101708420B1 (ko) * | 2010-09-15 | 2017-02-21 | 삼성디스플레이 주식회사 | 기판 증착 시스템 및 이를 이용한 증착 방법 |
| EP2508645B1 (en) * | 2011-04-06 | 2015-02-25 | Applied Materials, Inc. | Evaporation system with measurement unit |
| KR101288307B1 (ko) * | 2011-05-31 | 2013-07-22 | 주성엔지니어링(주) | 증발 증착 장치 및 증발 증착 방법 |
| JP2013211137A (ja) * | 2012-03-30 | 2013-10-10 | Samsung Display Co Ltd | 真空蒸着方法及びその装置 |
| EP3102715A1 (en) * | 2014-02-04 | 2016-12-14 | Applied Materials, Inc. | Evaporation source for organic material, apparatus having an evaporation source for organic material, system having an evaporation deposition apparatus with an evaporation source for organic materials, and method for operating an evaporation source for organic material |
-
2014
- 2014-03-21 EP EP14712648.6A patent/EP3119920A1/en not_active Withdrawn
- 2014-03-21 CN CN201480077386.4A patent/CN106133184B/zh active Active
- 2014-03-21 KR KR1020167029510A patent/KR101997808B1/ko active Active
- 2014-03-21 JP JP2016557604A patent/JP6704348B2/ja active Active
- 2014-03-21 US US15/126,568 patent/US20170081755A1/en not_active Abandoned
- 2014-03-21 WO PCT/EP2014/055744 patent/WO2015139777A1/en not_active Ceased
-
2015
- 2015-03-20 TW TW104108945A patent/TWI640646B/zh active
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