JP2017504725A - 低圧ツール交換を可能にする原子層堆積処理チャンバ - Google Patents
低圧ツール交換を可能にする原子層堆積処理チャンバ Download PDFInfo
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- 238000012545 processing Methods 0.000 title claims abstract description 229
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- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 6
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- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 57
- 239000007789 gas Substances 0.000 description 40
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- 239000000463 material Substances 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 238000000576 coating method Methods 0.000 description 6
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
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- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
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- 230000008021 deposition Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
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- 229910052757 nitrogen Inorganic materials 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
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- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
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- 238000006243 chemical reaction Methods 0.000 description 1
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
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Abstract
Description
本開示の実施形態は、概して、大面積基板を処理するための装置に関する。より具体的には、本開示の実施形態は、デバイス製造用原子層堆積(ALD)システム及び同システムのシャワーヘッドのためのインサイチュー洗浄方法に関する。
有機発光ダイオード(OLED)は、情報を表示するための、テレビスクリーン、コンピュータモニター、携帯電話、他のハンドヘルドデバイス等の製造に使用される。典型的なOLEDは、個別に通電することができる画素を有するマトリックスディスプレイパネルを形成するように基板上にすべてが堆積された2つの電極の間に位置する有機材料の層を含むことができる。OLEDは、一般的に、2つのガラスパネルの間に配置され、ガラスパネルの縁部は、その中にOLEDをカプセル化するためにシールされる。
Claims (15)
- 原子層堆積用の処理チャンバであって、
チャンバ内に配置されたガス分配プレートと、
ガス分配プレートと対向してチャンバ内に配置された基板支持体と、
ガス分配プレートに結合された少なくとも1つのガス分配プレートアクチュエータであって、アクチュエータは、基板支持体に対してガス分配プレートを移動可能であるガス分配プレートアクチュエータとを含む処理チャンバ。 - ガス分配プレートは、中央穴を含み、チャンバは、
ガス分配プレート内の中心穴を通して第1ガスを送出するためにチャンバに結合された第1ガス源と、
中央穴とは別の場所を通してチャンバに第2ガスを送出するためにチャンバに結合された第2ガス源とを含む、請求項1記載の処理チャンバ。 - ガス分配プレートと基板支持体との間に配置されたマスクを含む、請求項1記載の処理チャンバ。
- ガス分配プレートに結合されたRF電源を含む、請求項1記載の処理チャンバ。
- 薄膜カプセル化を実行するための処理システムであって、
第1処理ツールの通過を可能にするように構成されたスリットバルブ開口部を有する第1処理チャンバと、
第1処理チャンバのスリットバルブ開口部を開閉するように動作可能な第1スリットバルブであって、第1スリットバルブは、閉じたときに、気密シールを作るように動作可能である第1スリットバルブと、
第2処理ツールの通過を可能にするように構成されたスリットバルブ開口部を有する第2処理チャンバと、
第2処理チャンバのスリットバルブ開口部を開閉するように動作可能な第2スリットバルブであって、第2スリットバルブは、閉じたときに、気密シールを作るように動作可能である第2スリットバルブと、
原子層堆積(ALD)処理チャンバであって、ALD処理チャンバ内の圧力は1トール以下に維持され、ALD処理チャンバは、ALD処理ツールの通過を可能にするように構成されたスリットバルブ開口部を有するALD処理チャンバと、
ALD処理チャンバのスリットバルブ開口部を開閉するように動作可能な第3スリットバルブであって、第3スリットバルブは、閉じたときに、気密シールを作るように動作可能である第3スリットバルブと、
第1処理ツール、第2処理ツール、及びALD処理ツールの通過を可能にするように構成された搬送スリットバルブ開口部と、第1処理ツール、第2処理ツール、及びALD処理ツールの通過を可能にするように構成された装填出入口とを有するマスクチャンバと、
マスクチャンバの搬送スリットバルブ開口部を開閉するように動作可能な第4スリットバルブであって、第4スリットバルブは、閉じたときに、気密シールを作るように動作可能である第4スリットバルブと、
搬送スリットバルブ開口部及び装填スリットバルブ開口部を有するロードロックチャンバと、
ロードロックチャンバの搬送スリットバルブ開口部を開閉するように動作可能な第5スリットバルブであって、第5スリットバルブは、閉じたときに、気密シールを作るように動作可能である第5スリットバルブと、
ロードロックチャンバの装填スリットバルブ開口部を開閉するように動作可能な第6スリットバルブであって、第6スリットバルブは、閉じたときに、気密シールを作るように動作可能である第6スリットバルブと、
マスクチャンバの装填出入口を開閉するように動作可能なドアであって、ドアは、閉じたときに、気密シールを作るように動作可能であるドアと、
処理ツールの通過を可能にするように構成され、第1処理チャンバのスリットバルブ開口部とアライメントされた第1スリットバルブ開口部と、処理ツールの通過を可能にするように構成され、第2処理チャンバのスリットバルブ開口部とアライメントされた第2スリットバルブ開口部と、ALD処理ツールの通過を可能にするように構成され、ALD処理チャンバのスリットバルブ開口部とアライメントされた第3スリットバルブ開口部と、ロードロックチャンバの搬送スリットバルブ開口部とアライメントされた第4スリットバルブ開口部と、ALD処理ツール及び非ALD処理ツールの通過を可能にするように構成され、マスクチャンバの搬送スリットバルブ開口部とアライメントされた第5スリットバルブ開口部とを有する搬送チャンバとを含む処理システム。 - ALD処理ツールは、第1ガス分配プレート及び第2ガス分配プレートを含む、請求項5記載の処理システム。
- ALDチャンバから搬送チャンバへ第3スリットバルブ開口部を介して第1ガス分配プレートを移動させ、搬送チャンバからALDチャンバへ第3スリットバルブ開口部を介して第2ガス分配プレートを移動させるように動作可能なロボットツールを含む、請求項6記載の処理システム。
- ALDチャンバ内の処理位置から第1ガス分配プレートを除去し、ALDチャンバ内の処理位置に第2ガス分配プレートを移動させるように動作可能な少なくとも1つのガス分配プレートアクチュエータを含む、請求項7記載の処理システム。
- ALD処理ツールは、第1マスク及び第2マスクを含む、請求項5記載の処理システム。
- ALDチャンバから搬送チャンバへ第3スリットバルブ開口部を介して第1マスクを移動させ、搬送チャンバからALDチャンバへ第3スリットバルブ開口部を介して第2マスクを移動させるように動作可能なロボットツールを含む、請求項9記載の処理システム。
- 第1処理チャンバは、プラズマ強化化学蒸着(PE−CVD)チャンバを含む、請求項5記載の処理システム。
- 第1処理ツールは、ガス分配プレートを含む、請求項11記載の処理システム。
- 第1処理チャンバから搬送チャンバへ第1スリットバルブ開口部を介して、及び搬送チャンバからALD処理チャンバへ第3スリットバルブ開口部を介して基板及びマスクを移動させるように動作可能なロボットツールを含む、請求項5記載の処理システム。
- ロボットツールは、ALD処理チャンバから搬送チャンバへ第3スリットバルブ開口部を介して、及び搬送チャンバから第2処理チャンバへ第2スリットバルブ開口部を介して基板及びマスクを移動させるように動作可能である、請求項13記載の処理システム。
- ロボットツールは、搬送チャンバからロードロックチャンバへ第4スリットバルブ開口部を介して基板を移動させ、搬送チャンバからマスクチャンバへ第5スリットバルブ開口部を介してマスクを移動させるように動作可能である、請求項14記載の処理システム。
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CN105934837A (zh) | 2016-09-07 |
US10184179B2 (en) | 2019-01-22 |
TW201539617A (zh) | 2015-10-16 |
TWI641066B (zh) | 2018-11-11 |
US20160362788A1 (en) | 2016-12-15 |
WO2015112470A1 (en) | 2015-07-30 |
CN106415876A (zh) | 2017-02-15 |
CN106415876B (zh) | 2018-06-26 |
KR102330725B1 (ko) | 2021-11-23 |
TW201542861A (zh) | 2015-11-16 |
KR20160111962A (ko) | 2016-09-27 |
JP2017505987A (ja) | 2017-02-23 |
WO2015112467A1 (en) | 2015-07-30 |
KR20160111963A (ko) | 2016-09-27 |
JP6495301B2 (ja) | 2019-04-03 |
TWI670389B (zh) | 2019-09-01 |
CN105934837B (zh) | 2018-12-28 |
KR102458230B1 (ko) | 2022-10-21 |
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