JP2017224816A5 - - Google Patents

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JP2017224816A5
JP2017224816A5 JP2017113915A JP2017113915A JP2017224816A5 JP 2017224816 A5 JP2017224816 A5 JP 2017224816A5 JP 2017113915 A JP2017113915 A JP 2017113915A JP 2017113915 A JP2017113915 A JP 2017113915A JP 2017224816 A5 JP2017224816 A5 JP 2017224816A5
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curtain gas
gas
adjusted
chamber
curtain
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JP2017224816A (ja
JP7171165B2 (ja
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JP2017113915A 2016-06-17 2017-06-09 膜プロフィール調整のためのシャワーヘッドカーテンガス方法及びシャワーヘッドガスカーテンシステム Active JP7171165B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/186,275 US9738977B1 (en) 2016-06-17 2016-06-17 Showerhead curtain gas method and system for film profile modulation
US15/186,275 2016-06-17

Publications (3)

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JP2017224816A JP2017224816A (ja) 2017-12-21
JP2017224816A5 true JP2017224816A5 (OSRAM) 2020-07-27
JP7171165B2 JP7171165B2 (ja) 2022-11-15

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JP2017113915A Active JP7171165B2 (ja) 2016-06-17 2017-06-09 膜プロフィール調整のためのシャワーヘッドカーテンガス方法及びシャワーヘッドガスカーテンシステム

Country Status (6)

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US (2) US9738977B1 (OSRAM)
JP (1) JP7171165B2 (OSRAM)
KR (5) KR102333807B1 (OSRAM)
CN (4) CN115584490A (OSRAM)
SG (2) SG10202012689YA (OSRAM)
TW (1) TWI743135B (OSRAM)

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