JP2017163021A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2017163021A JP2017163021A JP2016046903A JP2016046903A JP2017163021A JP 2017163021 A JP2017163021 A JP 2017163021A JP 2016046903 A JP2016046903 A JP 2016046903A JP 2016046903 A JP2016046903 A JP 2016046903A JP 2017163021 A JP2017163021 A JP 2017163021A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 347
- 239000012535 impurity Substances 0.000 claims abstract description 56
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims abstract description 45
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 39
- 229910052751 metal Inorganic materials 0.000 claims abstract description 20
- 239000002184 metal Substances 0.000 claims abstract description 20
- 229910052763 palladium Inorganic materials 0.000 claims abstract description 16
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 14
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 12
- 150000004767 nitrides Chemical class 0.000 claims abstract description 11
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 7
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 5
- 239000011777 magnesium Substances 0.000 claims description 23
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 11
- 229910052749 magnesium Inorganic materials 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052738 indium Inorganic materials 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims description 3
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- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
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- 238000011156 evaluation Methods 0.000 description 17
- 238000012360 testing method Methods 0.000 description 16
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- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
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- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
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- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
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- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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Abstract
Description
A−1.半導体装置の構成
図1は、第1実施形態における半導体装置100の構成を模式的に示す断面図である。半導体装置100は、窒化ガリウム(GaN)を用いて形成されたGaN系の半導体装置である。本実施形態では、半導体装置100は、縦型トレンチMOSFET(Metal-Oxide-Semiconductor Field-Effect Transistor)である。本実施形態では、半導体装置100は、電力制御に用いられ、パワーデバイスとも呼ばれる。
図2は、第1実施形態における半導体装置100の製造方法を示す工程図である。まず、製造者は、基板110を用意する。本実施形態では、基板110は、窒化ガリウム(GaN)から主に形成されており、ケイ素(Si)をドナー元素として含有するn型半導体である。
<イオン注入の態様>
・1回目
加速電圧:50keV
ドーズ量:1×1015cm−2
・2回目
加速電圧:100keV
ドーズ量:1×1015cm−2
<熱処理の条件>
雰囲気ガス:窒素
加熱温度:1150℃
加熱時間:4分
第1実施形態によれば、第1電極141と第2電極144とが同じ金属から主に形成されているため、第1電極141と第2電極144とを同じ工程により形成することができる。このため、製造時の煩雑さを軽減できる。
図8は、第1評価試験に用いた半導体素子300の構成を模式的に示す断面図である。図8には、図1と同様に、XYZ軸が図示されている。半導体素子300は、基板310と、バッファ層311と、半導体層312と、p型半導体領域320と、n型半導体領域330と、電極341,344とを備える。半導体素子300は、伝送線路モデル(Transfer Length Model:TLM)に基づく方法により接触抵抗を測定するために用いる素子である。
・A:接触抵抗が、2.0×10−4Ω・cm2以下の場合
・B:接触抵抗が、2.0×10−4Ω・cm2より大きく、2.0×10−3Ω・cm2以下の場合
・C:接触抵抗が、2.0×10−3Ω・cm2より大きく接触抵抗が評価できなかった場合
試験者は、第1評価試験の実施例2と実施例7のサンプルを用いて、接触抵抗と熱処理の有無及び熱処理温度との関係を評価した。
試験者は、第1評価試験の電極として用いたパラジウム(Pd)やニッケル(Ni)の変わりに、電極としてその他の金属を用いた場合に、p型半導体領域320に対するオーミック特性が得られるかどうかの評価を行った。
図13は、第2実施形態における半導体装置100Aの構成を模式的に示す断面図である。半導体装置100Aは、第1実施形態における半導体装置100と比較して、第1電極141及び第2電極144が同一の電極141Aで形成されている点が異なるが、それ以外は同じである。つまり、半導体装置100Aは、第1実施形態における第1電極141及び第2電極144の機能を有し、第1実施形態における第1電極141及び第2電極144が連続してつながっている電極141Aを備える。このような形態とすることにより、半導体装置100Aの微細化が可能となる。第1実施形態では、第1電極141と第2電極144とを接触させないために、フォトレジストによるパターニングの限界寸法を考慮する必要があるが、第2実施形態では、第1実施形態に比べて、そのようなことを考慮しなくてよい。
図14は、第3実施形態における半導体装置100Bの構成を模式的に示す断面図である。半導体装置100Bは、第1実施形態における半導体装置100と比較して、p型半導体領域114と第2電極144との間に、p型半導体領域118を備える点が異なるが、それ以外は同じである。本実施形態において、p型半導体領域118は、p型不純物であるマグネシウム(Mg)濃度がp型半導体領域114よりも高い層である。本実施形態において、p型半導体領域のp型不純物濃度は、第2電極144と接触する面から離れるほど低くなる。このような形態とすることにより、p型半導体領域118と第2電極144との接触抵抗を低くすることができる。なお、第3実施形態の半導体装置100Bにおいて、第1電極141と第2電極144とは異なる電極として形成されているが、第1電極141と第2電極144とは同一の電極により形成されていてもよい。
本発明は、上述の実施形態や実施例に限られるものではなく、その趣旨を逸脱しない範囲において種々の構成で実現することができる。例えば、発明の概要の欄に記載した各形態中の技術的特徴に対応する実施形態、実施例、変形例中の技術的特徴は、上述の課題の一部または全部を解決するために、あるいは、上述の効果の一部または全部を達成するために、適宜、差し替えや、組み合わせを行うことが可能である。また、その技術的特徴が本明細書中に必須なものとして説明されていなければ、適宜、削除することが可能である。
100A…半導体装置
100B…半導体装置
110…基板
112…半導体層
114…p型半導体領域(半導体層)
114C…p型半導体領域
114D…p型半導体領域
116…n型半導体領域(半導体層)
116A…イオン注入領域
118…p型半導体領域
121…コンタクトホール
122…トレンチ
124…コンタクトホール
128…トレンチ
130…絶縁膜
141…第1電極
141A…電極
142…ゲート電極
143…ドレイン電極
144…第2電極
210…膜
220…マスク
240…キャップ膜
300…半導体素子
310…基板
311…バッファ層
312…半導体層
320…p型半導体領域
330…n型半導体領域
341…電極
344…電極
Claims (11)
- 半導体装置であって、
ガリウムを含む窒化物半導体から形成されたn型半導体領域と、
前記n型半導体領域と接し、前記窒化物半導体から形成されたp型半導体領域と、
前記n型半導体領域とオーミック接触する第1電極と、
前記p型半導体領域とオーミック接触する第2電極と、を備え、
前記第1電極と、前記第2電極とは、同じ金属から主に形成されており、
前記同じ金属は、パラジウム、ニッケル、白金からなる群より選ばれる少なくとも一つの金属であり、
前記n型半導体領域のp型不純物濃度と、前記p型半導体領域のp型不純物濃度は、実質的に同じであり、
前記n型半導体領域において、n型不純物濃度とp型不純物濃度の差は、1.0×1019cm−3以上である、半導体装置。 - 請求項1に記載の半導体装置であって、
前記第1電極と前記第2電極とは同一の電極である、半導体装置。 - 請求項1又は請求項2に記載の半導体装置であって、
前記n型半導体領域において、n型不純物濃度とp型不純物濃度の差は、1.0×1021cm−3以下である、半導体装置。 - 請求項1から請求項3のいずれか1項に記載の半導体装置であって、
前記窒化物半導体は、アルミニウムとインジウムとの少なくとも一方を含む、半導体装置。 - 請求項1から請求項4のいずれか1項に記載の半導体装置であって、
前記p型半導体領域のp型不純物濃度は、1.0×1018cm−3以上である、半導体装置。 - 請求項1から請求項5のいずれか1項に記載の半導体装置であって、
前記n型半導体領域において、n型不純物濃度とp型不純物濃度の差は、5.0×1019cm−3以上である、半導体装置。 - 請求項1から請求項6のいずれか1項に記載の半導体装置であって、
前記n型半導体領域において、n型不純物濃度とp型不純物濃度の差は、1.0×1020cm−3以上である、半導体装置。 - 請求項1から請求項7のいずれか1項に記載の半導体装置であって、
前記p型半導体領域に含まれるp型不純物は、マグネシウムと亜鉛との少なくとも一方を含む、半導体装置。 - 請求項1から請求項8のいずれか1項に記載の半導体装置であって、
前記n型半導体領域に含まれるn型不純物は、ケイ素とゲルマニウムとの少なくとも一方を含む、半導体装置。 - 請求項1から請求項9のいずれか1項に記載の半導体装置であって、
前記p型半導体領域のp型不純物濃度は、前記第2電極と接触する面から離れるほど低くなる、半導体装置。 - 請求項1から請求項10のいずれか1項に記載の半導体装置であって、
前記n型半導体領域と前記第1電極とが接触する面と、前記p型半導体領域と前記第2電極とが接する面とは、異なる平面上にある、半導体装置。
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