JP2017162886A - 画素ユニット、及び撮像素子 - Google Patents
画素ユニット、及び撮像素子 Download PDFInfo
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- JP2017162886A JP2017162886A JP2016043816A JP2016043816A JP2017162886A JP 2017162886 A JP2017162886 A JP 2017162886A JP 2016043816 A JP2016043816 A JP 2016043816A JP 2016043816 A JP2016043816 A JP 2016043816A JP 2017162886 A JP2017162886 A JP 2017162886A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 23
- 238000009792 diffusion process Methods 0.000 claims abstract description 118
- 238000012546 transfer Methods 0.000 claims abstract description 75
- 238000006243 chemical reaction Methods 0.000 claims abstract description 26
- 239000012535 impurity Substances 0.000 claims description 14
- 230000007423 decrease Effects 0.000 claims description 7
- 238000012545 processing Methods 0.000 description 17
- 239000004065 semiconductor Substances 0.000 description 14
- 230000003321 amplification Effects 0.000 description 12
- 238000003199 nucleic acid amplification method Methods 0.000 description 12
- 230000005684 electric field Effects 0.000 description 8
- 238000002955 isolation Methods 0.000 description 7
- 230000006870 function Effects 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 206010027146 Melanoderma Diseases 0.000 description 1
- 206010047571 Visual impairment Diseases 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
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- 230000015572 biosynthetic process Effects 0.000 description 1
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- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
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- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/14612—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor
- H01L27/14614—Pixel-elements with integrated switching, control, storage or amplification elements involving a transistor having a special gate structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
- H01L27/1461—Pixel-elements with integrated switching, control, storage or amplification elements characterised by the photosensitive area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14636—Interconnect structures
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
Description
3 フォトダイオード
5 トランジスタ
51 ゲート
52 第1のゲート領域
53 第2のゲート領域
GW1 第1のゲート幅
GW2 第2のゲート幅
LD ゲート長方向
WD ゲート幅方向
54 延長部
7 拡散領域
7a 高濃度領域
7b 低濃度領域(半導体基板)
11 トランジスタ
13 トランジスタ
17 画素群
19 垂直信号線
23 固体撮像素子
Claims (10)
- 光電変換素子と、
前記光電変換素子に接続する転送ゲートを備える転送トランジスタと、
前記転送ゲートに接続するフローティングディフュージョン領域とを備える画素ユニットであって、
前記転送ゲートは、
ゲート幅方向に第1のゲート幅を有し、前記フローティングディフュージョン領域に接続して前記フローティングディフュージョン領域から離れるゲート長方向に延びる第1のゲート領域と、
前記ゲート幅方向に前記第1のゲート幅より小さい第2のゲート幅を有し、前記第1のゲート領域から連続して前記ゲート長方向に延びる第2のゲート領域とを含み、
前記第2のゲート領域は、前記第1のゲート領域から離れる方向に前記第1のゲート幅から前記第2のゲート幅になるように徐々に小さくなることを特徴とする画素ユニット。 - 前記第2のゲート領域は、テーパ状に形成されている請求項1に記載の画素ユニット。
- 前記転送ゲートの平面形状は、四角形の前記フローティングディフュージョン領域から離れた側の2つの角部を切り欠いた形状である請求項1または2に記載の画素ユニット。
- 前記光電変換素子、前記転送ゲート、及び前記フローティングディフュージョン領域が、直線上に配置されている請求項1乃至3のいずれか1項に記載の画素ユニット。
- 前記フローティングディフュージョン領域は、拡散する不純物濃度が異なる第1の拡散領域及び第2の拡散領域を含んで構成されており、
前記第1の拡散領域は、前記第2の拡散領域よりも不純物濃度が高く、
前記第2の拡散領域は、前記第1の拡散領域を挟むように前記第1の拡散領域に隣接する請求項1乃至4のいずれか1項に記載の画素ユニット。 - 前記フローティングディフュージョン領域に接続されて前記フローティングディフュージョン領域に蓄積された電荷をリセットするリセットトランジスタをさらに備える請求項1乃至5のいずれか1項に記載の画素ユニット。
- 前記フローティングディフュージョン領域に接続して前記フローティングディフュージョン領域で変換した電圧を増幅する増幅トランジスタをさらに備える請求項1乃至6のいずれか1項に記載の画素ユニット。
- 前記転送ゲートは、前記転送トランジスタから前記フローティングディフュージョン領域に向かって延びる延長部をさらに備える請求項1乃至7のいずれか1項に記載の画素ユニット。
- 前記1乃至8のいずれか1項に記載の画素ユニットが複数配置された撮像素子であって、
前記画素ユニットのうち、一部の画素ユニットが第1の方向に並んで配置された画素ユニット列を構成し、
前記画素ユニット列がさらに第1の方向と直交する第2の方向に複数並んで配置された撮像素子。 - 前記画素ユニット列を構成する前記一部の画素ユニットは、前記画素ユニットの電気信号を読み出す1つの信号線に接続されている請求項9に記載の撮像素子。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016043816A JP6842240B2 (ja) | 2016-03-07 | 2016-03-07 | 画素ユニット、及び撮像素子 |
US15/437,850 US10186537B2 (en) | 2016-03-07 | 2017-02-21 | Pixel unit and imaging device |
US16/217,307 US20190115380A1 (en) | 2016-03-07 | 2018-12-12 | Pixel unit and imaging device |
JP2019184311A JP6897740B2 (ja) | 2016-03-07 | 2019-10-07 | 画素ユニット、及び撮像素子 |
Applications Claiming Priority (1)
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JP2016043816A JP6842240B2 (ja) | 2016-03-07 | 2016-03-07 | 画素ユニット、及び撮像素子 |
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JP2019184311A Division JP6897740B2 (ja) | 2016-03-07 | 2019-10-07 | 画素ユニット、及び撮像素子 |
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Publication Number | Publication Date |
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JP2017162886A true JP2017162886A (ja) | 2017-09-14 |
JP2017162886A5 JP2017162886A5 (ja) | 2018-09-27 |
JP6842240B2 JP6842240B2 (ja) | 2021-03-17 |
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JP (1) | JP6842240B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10728480B2 (en) | 2017-08-24 | 2020-07-28 | Ricoh Company, Ltd. | Solid-state image sensor and image capturing device with setting of gate voltages of transfer and reset transistors |
WO2023238860A1 (ja) * | 2022-06-06 | 2023-12-14 | 凸版印刷株式会社 | 距離画像撮像素子および距離画像撮像装置 |
US11978749B2 (en) | 2020-03-19 | 2024-05-07 | Ricoh Company, Ltd. | Solid-state image sensor, image scanning device, and image forming apparatus |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6769349B2 (ja) | 2017-03-03 | 2020-10-14 | 株式会社リコー | 固体撮像素子及び撮像装置 |
JP7013973B2 (ja) | 2018-03-19 | 2022-02-01 | 株式会社リコー | 固体撮像素子及び撮像装置 |
KR20210120536A (ko) * | 2020-03-27 | 2021-10-07 | 에스케이하이닉스 주식회사 | 이미지 센싱 장치 |
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JP2003188367A (ja) * | 2001-12-14 | 2003-07-04 | Toshiba Corp | 固体撮像装置 |
JP2003258231A (ja) * | 2002-03-05 | 2003-09-12 | Sony Corp | 固体撮像素子 |
JP2005101442A (ja) * | 2003-09-26 | 2005-04-14 | Fujitsu Ltd | 固体撮像装置とその製造方法 |
JP2009135319A (ja) * | 2007-11-30 | 2009-06-18 | Sony Corp | 固体撮像装置及びカメラ |
JP2011049446A (ja) * | 2009-08-28 | 2011-03-10 | Sony Corp | 固体撮像装置とその製造方法、及び電子機器 |
JP2012234988A (ja) * | 2011-05-02 | 2012-11-29 | Canon Inc | 半導体装置の製造方法およびcmosイメージセンサーの製造方法 |
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JP3730442B2 (ja) | 1999-05-14 | 2006-01-05 | 株式会社東芝 | 固体撮像装置 |
CN101796822A (zh) | 2007-09-05 | 2010-08-04 | 国立大学法人东北大学 | 固体摄像元件 |
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JP2012039299A (ja) | 2010-08-05 | 2012-02-23 | Toshiba Corp | 固体撮像装置 |
JP2013225774A (ja) | 2012-04-20 | 2013-10-31 | Brookman Technology Inc | 固体撮像装置 |
JP2014199898A (ja) * | 2013-03-11 | 2014-10-23 | ソニー株式会社 | 固体撮像素子および製造方法、並びに、電子機器 |
JP2015106908A (ja) | 2013-12-03 | 2015-06-08 | 株式会社リコー | カラム読出し回路および固体撮像装置 |
JP2015130533A (ja) | 2015-03-31 | 2015-07-16 | ソニー株式会社 | 固体撮像装置及びカメラ |
-
2016
- 2016-03-07 JP JP2016043816A patent/JP6842240B2/ja active Active
-
2017
- 2017-02-21 US US15/437,850 patent/US10186537B2/en active Active
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2018
- 2018-12-12 US US16/217,307 patent/US20190115380A1/en not_active Abandoned
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JP2003188367A (ja) * | 2001-12-14 | 2003-07-04 | Toshiba Corp | 固体撮像装置 |
JP2003258231A (ja) * | 2002-03-05 | 2003-09-12 | Sony Corp | 固体撮像素子 |
JP2005101442A (ja) * | 2003-09-26 | 2005-04-14 | Fujitsu Ltd | 固体撮像装置とその製造方法 |
JP2009135319A (ja) * | 2007-11-30 | 2009-06-18 | Sony Corp | 固体撮像装置及びカメラ |
JP2011049446A (ja) * | 2009-08-28 | 2011-03-10 | Sony Corp | 固体撮像装置とその製造方法、及び電子機器 |
US20130020466A1 (en) * | 2011-01-02 | 2013-01-24 | Pixim, Inc. | Conversion Gain Modulation Using Charge Sharing Pixel |
US8471315B1 (en) * | 2011-01-31 | 2013-06-25 | Aptina Imaging Corporation | CMOS image sensor having global shutter pixels built using a buried channel transfer gate with a surface channel dark current drain |
JP2012234988A (ja) * | 2011-05-02 | 2012-11-29 | Canon Inc | 半導体装置の製造方法およびcmosイメージセンサーの製造方法 |
JP2015230952A (ja) * | 2014-06-04 | 2015-12-21 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP2016018898A (ja) * | 2014-07-08 | 2016-02-01 | キヤノン株式会社 | 光電変換装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10728480B2 (en) | 2017-08-24 | 2020-07-28 | Ricoh Company, Ltd. | Solid-state image sensor and image capturing device with setting of gate voltages of transfer and reset transistors |
US11978749B2 (en) | 2020-03-19 | 2024-05-07 | Ricoh Company, Ltd. | Solid-state image sensor, image scanning device, and image forming apparatus |
WO2023238860A1 (ja) * | 2022-06-06 | 2023-12-14 | 凸版印刷株式会社 | 距離画像撮像素子および距離画像撮像装置 |
Also Published As
Publication number | Publication date |
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JP6842240B2 (ja) | 2021-03-17 |
US10186537B2 (en) | 2019-01-22 |
US20170256575A1 (en) | 2017-09-07 |
US20190115380A1 (en) | 2019-04-18 |
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