JP2017157719A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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Abstract
Description
第1実施形態に係る半導体装置について説明する。以下では半導体装置として、NAND型フラッシュメモリを例に挙げて説明する。
1.1.1 半導体装置の構成について
まず、半導体装置の構成について、図1を用いて説明する。
次に、半導体装置の断面構造について、素子領域5よりも外側の領域における断面構造について、図2を用いて説明する。図2は、図1におけるI−I線に沿った断面図である。また、図2の例は、3層の配線層が設けられる場合を示している。
次に、クラック検知部8の具体例について、図3を用いて説明する。図3の例は、入出力回路をクラック検知回路として用い、電圧発生回路とクラック検知回路(入出力回路)とを接続する配線が、クラック検知配線GMONIとしてガードリング4の上に配置されている場合を示している。
クラック検知回路に接続されたクラック検知配線GMONIを含む。
次に、本実施形態のクラック検知回路を用いたクラック検知テストの具体例について、図4を用いて説明する。図4の例は出荷製品の選別テストの検査項目の1つとしてクラック検知テストを用いる場合を示している。なお、以下では、クラック検知以外のテスト項目についての説明は省略する。
本実施形態に係る効果について説明する。
次に第2実施形態について説明する。第1実施形態と異なる点は、クラック検知配線を電極パッド下にも配置した点である。以下、第1実施形態と異なる点についてのみ説明する。
まず、半導体装置の構成について、図5を用いて説明する。
次に、半導体装置の断面構造について、特に電極パッド9における断面構造について、図6を用いて説明する。図6は、図5におけるII−II線に沿った断面図である。
次に、クラック検知部8の具体例について、図7を用いて説明する。第1実施形態の図3と異なる点は、クラック検知回路100に接続されたクラック検知配線PMONIが追加されている点である。
本実施形態に係る構成では、上記第1実施形態と同様の効果を得ることができる。
上記実施形態に係る半導体装置は、半導体素子を有する素子領域(5@図1)を含む半導体基板と、素子領域の外周に設けられた第1配線(17@図2)、及び第1配線と素子領域の外周に設けられた第1ウェル領域とを電気的に接続する第1プラグ(19-2@図2)を含み、接地電圧(VSS)が印加されたガードリング(4@図1,2)と、第1配線の上方に第1絶縁層を介して配置され、第1配線と電気的に接続されていない第2配線(18@図2、GMONI@図3)と、第2配線に接続された第1回路(100@図3)とを備える。第1回路は、第2配線の断線、あるいは第2配線と第1配線との短絡に応じて、ガードリングにおけるクラック及び剥離の1つを検知する。
Claims (7)
- 半導体素子を有する素子領域を含む半導体基板と、
前記素子領域の外周に設けられた第1配線、及び前記第1配線と前記素子領域の前記外周に設けられた第1ウェル領域とを電気的に接続する第1プラグを含み、接地電圧が印加されたガードリングと、
前記第1配線の上方に第1絶縁層を介して配置され、前記第1配線と電気的に接続されていない第2配線と、
前記第2配線に接続された第1回路と
を備え、前記第1回路は、前記第2配線の断線、あるいは前記第2配線と前記第1配線との短絡に応じて、前記ガードリングにおけるクラック及び剥離の1つを検知する
ことを特徴とする半導体装置。 - 前記第1回路に接続された第3配線と、
前記第3配線の上方に第2絶縁層を介して配置され、前記第3配線と電気的に接続されていない電極パッドと、
を更に備え、
前記第1回路は、前記第3配線の断線、あるいは前記第3配線と前記電極パッドとの短絡に応じて、前記電極パッドにおけるクラック及び剥離の1つを検知する
ことを特徴とする請求項1記載の半導体装置。 - 前記ガードリングの外周に配置された第4配線と、前記第4配線と前記ガードリングの前記外周に設けられた第2ウェル領域とを電気的に接続する第2プラグとを含むクラックストッパを更に備える
ことを特徴とする請求項1また2記載の半導体装置。 - 前記第2配線に流れる電流を計測する電流計を更に備える
ことを特徴とする請求項1乃至3のいずれか一項記載の半導体装置。 - 前記第1回路において前記ガードリングにおける前記クラック及び前記剥離の前記1つを検知する際、前記第2配線には、前記接地電圧と異なる電圧が印加される
ことを特徴とする請求項1乃至4のいずれか一項記載の半導体装置。 - 前記第1回路において前記電極パッドにおける前記クラック及び前記剥離の前記1つを検知する際、前記第3配線には、前記接地電圧と異なる電圧が印加される
ことを特徴とする請求項2記載の半導体装置。 - 前記第1回路は、入出力回路、ロジック回路、電圧発生回路、及び制御回路の1つである
ことを特徴とする請求項1乃至6のいずれか一項記載の半導体装置。
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JP2016040287A JP6444914B2 (ja) | 2016-03-02 | 2016-03-02 | 半導体装置 |
US15/448,015 US9847301B2 (en) | 2016-03-02 | 2017-03-02 | Semiconductor device |
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JP2016040287A JP6444914B2 (ja) | 2016-03-02 | 2016-03-02 | 半導体装置 |
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JP2017157719A true JP2017157719A (ja) | 2017-09-07 |
JP6444914B2 JP6444914B2 (ja) | 2018-12-26 |
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Cited By (5)
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KR20190102759A (ko) * | 2018-02-27 | 2019-09-04 | 삼성전자주식회사 | 크랙 검출용 칩 및 이를 이용한 크랙 검출 방법 |
JP2020092146A (ja) * | 2018-12-04 | 2020-06-11 | ソニーセミコンダクタソリューションズ株式会社 | 半導体装置、及び電子機器 |
JP2021110682A (ja) * | 2020-01-14 | 2021-08-02 | ローム株式会社 | 半導体装置 |
KR20220030868A (ko) * | 2020-09-03 | 2022-03-11 | 윈본드 일렉트로닉스 코포레이션 | 집적 회로, 크랙 상태 검출기 및 크랙 상태 검출 방법 |
CN114252754A (zh) * | 2020-09-25 | 2022-03-29 | 华邦电子股份有限公司 | 集成电路、破裂状态检测器以及其破裂状态检测方法 |
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KR102391459B1 (ko) * | 2017-06-01 | 2022-04-27 | 삼성디스플레이 주식회사 | 표시 장치 |
US10998274B2 (en) * | 2017-11-30 | 2021-05-04 | Mediatek Inc. | Seal ring structure, semiconductor die, and method for detecting cracks on semiconductor die |
KR102475495B1 (ko) * | 2018-01-29 | 2022-12-07 | 삼성전자주식회사 | 반도체 장치 |
JP6862384B2 (ja) * | 2018-03-21 | 2021-04-21 | 株式会社東芝 | 半導体装置、半導体装置の製造方法、インバータ回路、駆動装置、車両、及び、昇降機 |
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KR20200097045A (ko) | 2019-02-07 | 2020-08-18 | 삼성전자주식회사 | 반도체 장치 |
KR20220128718A (ko) * | 2021-03-15 | 2022-09-22 | 에스케이하이닉스 주식회사 | 크랙 검출 링 및 크랙 검출 구조를 가진 반도체 소자 |
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CN114252754A (zh) * | 2020-09-25 | 2022-03-29 | 华邦电子股份有限公司 | 集成电路、破裂状态检测器以及其破裂状态检测方法 |
CN114252754B (zh) * | 2020-09-25 | 2024-02-27 | 华邦电子股份有限公司 | 集成电路、破裂状态检测器以及其破裂状态检测方法 |
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US9847301B2 (en) | 2017-12-19 |
US20170256504A1 (en) | 2017-09-07 |
JP6444914B2 (ja) | 2018-12-26 |
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