JP2016528557A5 - - Google Patents

Download PDF

Info

Publication number
JP2016528557A5
JP2016528557A5 JP2016533860A JP2016533860A JP2016528557A5 JP 2016528557 A5 JP2016528557 A5 JP 2016528557A5 JP 2016533860 A JP2016533860 A JP 2016533860A JP 2016533860 A JP2016533860 A JP 2016533860A JP 2016528557 A5 JP2016528557 A5 JP 2016528557A5
Authority
JP
Japan
Prior art keywords
detector array
pixels
individual
sample
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016533860A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016528557A (ja
JP6490690B2 (ja
Filing date
Publication date
Priority claimed from DE201310019347 external-priority patent/DE102013019347A1/de
Application filed filed Critical
Publication of JP2016528557A publication Critical patent/JP2016528557A/ja
Publication of JP2016528557A5 publication Critical patent/JP2016528557A5/ja
Application granted granted Critical
Publication of JP6490690B2 publication Critical patent/JP6490690B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2016533860A 2013-08-15 2014-07-18 高解像度スキャニング顕微鏡法 Active JP6490690B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102013013792 2013-08-15
DE102013013792.6 2013-08-15
DE102013019347.8 2013-11-15
DE201310019347 DE102013019347A1 (de) 2013-08-15 2013-11-15 Hochauflösende Scanning-Mikroskopie
PCT/EP2014/065500 WO2015022145A1 (de) 2013-08-15 2014-07-18 Hochauflösende scanning-mikroskopie

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2019035493A Division JP6669909B2 (ja) 2013-08-15 2019-02-28 高解像度スキャニング顕微鏡法

Publications (3)

Publication Number Publication Date
JP2016528557A JP2016528557A (ja) 2016-09-15
JP2016528557A5 true JP2016528557A5 (enExample) 2017-07-06
JP6490690B2 JP6490690B2 (ja) 2019-03-27

Family

ID=52430066

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2016533860A Active JP6490690B2 (ja) 2013-08-15 2014-07-18 高解像度スキャニング顕微鏡法
JP2019035493A Active JP6669909B2 (ja) 2013-08-15 2019-02-28 高解像度スキャニング顕微鏡法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2019035493A Active JP6669909B2 (ja) 2013-08-15 2019-02-28 高解像度スキャニング顕微鏡法

Country Status (6)

Country Link
US (2) US10317657B2 (enExample)
EP (1) EP3033645B1 (enExample)
JP (2) JP6490690B2 (enExample)
CN (1) CN105556370B (enExample)
DE (1) DE102013019347A1 (enExample)
WO (1) WO2015022145A1 (enExample)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012204128B4 (de) * 2012-03-15 2023-11-16 Carl Zeiss Microscopy Gmbh Hochauflösende Scanning-Mikroskopie
DE102013019348A1 (de) * 2013-08-15 2015-02-19 Carl Zeiss Microscopy Gmbh Hochauflösende Scanning-Mikroskopie
DE102013015933A1 (de) * 2013-09-19 2015-03-19 Carl Zeiss Microscopy Gmbh Hochauflösende Scanning-Mikroskopie
DE102013015932A1 (de) * 2013-09-19 2015-03-19 Carl Zeiss Microscopy Gmbh Hochauflösende Scanning-Mikroskopie
DE102014111167A1 (de) 2014-08-06 2016-02-11 Carl Zeiss Microscopy Gmbh Hochauflösende Scanning-Mikroskopie mit der Unterscheidung mindestens zweier Wellenlängenbereiche
DE102015002301B4 (de) 2015-02-24 2022-11-10 Johann Biener Geräte zur optischen Beobachtung von astronomischen Vorgängen und Bildern, mit Ersatz von Hohlspiegeln durch Pixel-Digitaltechnik
DE102015116435A1 (de) 2015-09-29 2017-03-30 Carl Zeiss Microscopy Gmbh Hochauflösende Scanning-Mikroskopie mit der Unterscheidung mindestens zweier Spektralbereiche
DE102016203671A1 (de) 2016-03-07 2017-09-07 Carl Zeiss Microscopy Gmbh Verfahren zum Bestimmen einer Höheninformationen einer Probe und Scanningmikroskop
JP6722883B2 (ja) * 2016-04-01 2020-07-15 国立大学法人浜松医科大学 画像取得装置および画像取得方法
DE102016110433B4 (de) * 2016-06-06 2022-01-27 Carl Zeiss Microscopy Gmbh Mikroskop und Mikroskopieverfahren
DE102017203414A1 (de) 2017-03-02 2018-09-06 Carl Zeiss Microscopy Gmbh Detektorbaugruppe und Mikroskop mit einer solchen Detektorbaugruppe
DE102017113683A1 (de) 2017-06-21 2018-12-27 Carl Zeiss Microscopy Gmbh Hochauflösende Scanning-Mikroskopie mit der Unterscheidung mindestens zweier Wellenlängenbereiche
DE102017119531A1 (de) * 2017-08-25 2019-02-28 Carl Zeiss Microscopy Gmbh Hochauflösende 2D-Mikroskopie mit verbesserter Schnittdicke
CN107783242B (zh) * 2017-10-24 2020-02-11 太原师范学院 自动对焦装置及采用该装置的块状物libs在线检测装置
US11131631B2 (en) * 2017-12-28 2021-09-28 University Of Notre Dame Du Lac Super-resolution fluorescence microscopy by stepwise optical saturation
WO2020069426A1 (en) * 2018-09-28 2020-04-02 Magic Leap, Inc. Projection system with collimating scanning mirror
DE102018128590A1 (de) * 2018-11-14 2020-05-14 Carl Zeiss Microscopy Gmbh Fluktuationsbasierte Fluoreszenzmikroskopie
US12352943B2 (en) 2018-12-21 2025-07-08 Abberior Instruments Gmbh Method and device for illuminating a sample in a microscope in points
LU101084B1 (de) * 2018-12-21 2020-06-22 Abberior Instruments Gmbh Verfahren und Vorrichtung zum punktförmigen Beleuchten einer Probe in einem Mikroskiop
DE102019100184A1 (de) * 2019-01-07 2020-07-09 Carl Zeiss Microscopy Gmbh Hochauflösende Scanning-Mikroskopie
DE102019102959B3 (de) 2019-02-06 2020-06-10 Leica Microsystems Cms Gmbh Verfahren zur Bilderzeugung mittels eines Mikroskops und entsprechendes Mikroskop
CN113874774B (zh) * 2019-04-09 2024-09-27 卡尔蔡司显微镜有限责任公司 具有可重构传感器阵列的光学显微镜
CN110596059B (zh) * 2019-09-05 2024-05-28 北京世纪桑尼科技有限公司 光学超分辨显微成像系统
US20230288687A1 (en) * 2020-07-28 2023-09-14 Carl Zeiss Microscopy Gmbh Method and light microscope with a plurality of arrays of photon-counting detector elements
US11841548B2 (en) * 2020-08-18 2023-12-12 Zygo Corporation Variable-zoom imaging apparatus
CN115753710B (zh) * 2022-11-11 2025-10-28 中国科学院苏州生物医学工程技术研究所 一种多焦点扫描与阵列式多通道探测成像方法、设备及介质
CN115840295B (zh) * 2023-02-23 2023-05-02 北京数字光芯集成电路设计有限公司 一种线阵MicroLED扫描AR设备
CN116704015B (zh) * 2023-08-07 2023-11-14 中国科学院合肥物质科学研究院 一种实现噪声光斑图像自适应窗口预处理质心方法及系统

Family Cites Families (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59214818A (ja) * 1983-05-21 1984-12-04 Fuji Photo Film Co Ltd 撮像装置
JPS62218823A (ja) * 1986-03-20 1987-09-26 Fujitsu Ltd 赤外線撮像装置
JP2918995B2 (ja) 1990-06-07 1999-07-12 オリンパス光学工業株式会社 共焦点光学系
US5532873A (en) * 1993-09-08 1996-07-02 Dixon; Arthur E. Scanning beam laser microscope with wide range of magnification
US7071477B2 (en) * 1994-07-15 2006-07-04 Baer Stephen C Superresolution in microlithography and fluorescence microscopy
US7098871B1 (en) * 1998-08-05 2006-08-29 Microvision, Inc. Optical scanning system with correction
DE19908883A1 (de) 1999-03-02 2000-09-07 Rainer Heintzmann Verfahren zur Erhöhung der Auflösung optischer Abbildung
JP4505663B2 (ja) * 1999-09-14 2010-07-21 株式会社ニコン 走査型共焦点顕微鏡
DE19951482C2 (de) 1999-10-26 2003-01-09 Zeiss Carl Jena Gmbh Fluoreszenzmikroskop
US6711283B1 (en) * 2000-05-03 2004-03-23 Aperio Technologies, Inc. Fully automatic rapid microscope slide scanner
US6844150B2 (en) * 2000-08-24 2005-01-18 The Regents Of The University Of California Ultrahigh resolution multicolor colocalization of single fluorescent probes
JP4845279B2 (ja) * 2001-02-09 2011-12-28 オリンパス株式会社 生体機能測定方法
DE60227394D1 (de) * 2001-10-09 2008-08-14 Univ Ruprecht Karls Heidelberg Fernfeld lichtmikroskopische methode und vorrichtung zur bestimmung von mindestens einem objekt kleiner als die benutzte wellenlänge
JP2003283906A (ja) * 2002-03-20 2003-10-03 Nippon Telegr & Teleph Corp <Ntt> 高解像度撮像装置
US7636158B1 (en) * 2004-09-24 2009-12-22 Romuald Pawluczyk Optimal coupling of high performance line imaging spectrometer to imaging system
EP3203235A1 (en) 2005-05-23 2017-08-09 Harald F. Hess Optical microscopy with phototransformable optical labels
US20070057211A1 (en) * 2005-05-25 2007-03-15 Karsten Bahlman Multifocal imaging systems and method
US7298476B2 (en) * 2005-10-14 2007-11-20 Laser Microtech, L.L.C. Method and system for far-field microscopy to exceeding diffraction-limit resolution
US8537203B2 (en) * 2005-11-23 2013-09-17 University Of Washington Scanning beam with variable sequential framing using interrupted scanning resonance
DE102006021317B3 (de) 2006-05-06 2007-10-11 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren und Fluoreszenzlichtmikroskop zum räumlich hochauflösenden Abbilden einer Struktur einer Probe
JP2008107557A (ja) * 2006-10-25 2008-05-08 Nikon Corp 顕微鏡装置および顕微鏡画像の解像方法
CN101210969A (zh) * 2006-12-31 2008-07-02 中国科学院西安光学精密机械研究所 凝视型高分辨率三维成像探测器
FR2922308B1 (fr) * 2007-10-11 2012-03-16 Mauna Kea Technologies Dispositif d'imagerie modulaire, module pour ce dispositif et procede mis en oeuvre par ce dispositif
DE102007055530A1 (de) * 2007-11-21 2009-05-28 Carl Zeiss Ag Laserstrahlbearbeitung
WO2009137935A1 (en) * 2008-05-16 2009-11-19 Biomedical Photometrics Inc. Imaging system with dynamic range maximization
RU2011122642A (ru) * 2008-11-04 2012-12-20 Уилльям Марш Райз Юниверсити Спектрометры с функцией картирования изображений
US20100177190A1 (en) * 2008-12-16 2010-07-15 Ann-Shyn Chiang Microscopy system with revolvable stage
JP5455001B2 (ja) * 2008-12-26 2014-03-26 キヤノン株式会社 光断層撮像装置および光断層撮像装置の制御方法
CA2749622A1 (en) * 2009-01-15 2010-07-22 Physical Sciences, Inc. Adaptive optics line scanning ophthalmoscope
DE102009037366A1 (de) * 2009-08-13 2011-02-17 Carl Zeiss Microlmaging Gmbh Mikroskop, insbesondere zur Messung von Totalreflexions-Fluoreszenz, und Betriebsverfahren für ein solches
EP2317362B1 (de) 2009-10-28 2020-01-15 Carl Zeiss Microscopy GmbH Mikroskopisches Verfahren und Mikroskop mit gesteigerter Auflösung
DE102009055216A1 (de) * 2009-12-22 2011-06-30 Carl Zeiss Microlmaging GmbH, 07745 Lumineszenzmikroskopie
US20130126756A1 (en) * 2010-01-22 2013-05-23 Cornell University Fluorescence imaging apparatus and method
TWI414817B (zh) * 2010-07-23 2013-11-11 Univ Nat Taipei Technology 線型彩色共焦顯微系統
DE102010060121C5 (de) * 2010-10-22 2023-09-28 Leica Microsystems Cms Gmbh SPIM-Mikroskop mit sequenziellem Lightsheet
EP2656133B1 (en) * 2010-12-24 2018-04-11 Huron Technologies International Inc. Pathology slide scanner
US20120166128A1 (en) * 2010-12-28 2012-06-28 Ikhlef Abdelaziz Method and apparatus for detector calibration
US8941720B2 (en) * 2011-02-02 2015-01-27 National Tsing Hua University Method of enhancing 3D image information density
WO2012126718A1 (en) * 2011-03-21 2012-09-27 Asml Netherlands B.V. Method and apparatus for determining structure parameters of microstructures
TWI434022B (zh) * 2011-11-29 2014-04-11 Univ Nat Taipei Technology 彩色共焦顯微系統及其訊號處理方法
US9804376B2 (en) * 2012-03-02 2017-10-31 Huron Technologies International Inc. Scanner with increased dynamic range
DE102012204128B4 (de) 2012-03-15 2023-11-16 Carl Zeiss Microscopy Gmbh Hochauflösende Scanning-Mikroskopie
WO2013138911A1 (en) * 2012-03-23 2013-09-26 Huron Technologies International Inc. Slide scanner with dynamic focus and specimen tilt and method of operation
DE102012205032A1 (de) * 2012-03-28 2013-10-02 Carl Zeiss Microscopy Gmbh Hochauflösende Fluoreszenzmikroskopie
WO2013144898A2 (en) * 2012-03-29 2013-10-03 Ecole Polytechnique Federale De Lausanne (Epfl) Methods and apparatus for imaging with multimode optical fibers
US9575304B2 (en) * 2012-06-25 2017-02-21 Huron Technologies International Inc. Pathology slide scanners for fluorescence and brightfield imaging and method of operation
CN104769481B (zh) * 2012-10-12 2018-12-18 统雷有限公司 紧凑、低色散以及低像差自适应光学扫描系统
US10652444B2 (en) * 2012-10-30 2020-05-12 California Institute Of Technology Multiplexed Fourier ptychography imaging systems and methods

Similar Documents

Publication Publication Date Title
JP2016528557A5 (enExample)
JP2016532154A5 (enExample)
US10816648B2 (en) Methods and systems for LIDAR optics alignment
US20140240489A1 (en) Optical inspection systems and methods for detecting surface discontinuity defects
JP2015060230A5 (enExample)
JP2015060229A5 (enExample)
JP2015515018A (ja) 高分解能走査顕微鏡
JP7599463B2 (ja) ウエハ検査システム及び装置
WO2019086550A3 (en) Confocal scanning imaging systems with micro optical element arrays and methods of specimen imaging
JP2017522066A5 (enExample)
KR101523336B1 (ko) 웨이퍼 영상 검사 장치
JP5084327B2 (ja) 偏心検査装置及び偏心調整装置
WO2014138443A1 (en) System and method for reviewing a curved sample edge
WO2019118582A3 (en) Multi-z confocal imaging system
JP2013243522A5 (enExample)
US20120162754A1 (en) Pinhole for a Confocal Laser Scanning Microscope
KR101754108B1 (ko) 카메라 렌즈에 의한 비네팅을 측정하는 시스템
US20240053594A1 (en) Method and Device for Microscopy
KR101652356B1 (ko) 광학적 웨이퍼 검사 장치
JP2014122957A5 (enExample)
EP2767093A2 (en) Blur-calibration system for electro-optical sensors and method using a moving multi-focal multi-target constellation
JP2016162833A5 (ja) 撮像装置および画像処理装置
JP2015175982A5 (ja) 画像処理装置、撮像装置およびプログラム
JP5635342B2 (ja) 撮像装置
JP2015108582A (ja) ３次元計測方法と装置