JP2016522431A - 放射コレクタ、放射源およびリソグラフィ装置 - Google Patents
放射コレクタ、放射源およびリソグラフィ装置 Download PDFInfo
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Abstract
Description
Claims (31)
- 複数の反射面を備える放射コレクタであって、
前記複数の反射面のそれぞれが複数の楕円の一つの一部と一致しており、
前記複数の楕円は、共通の第1焦点および第2焦点を有し、
前記複数の反射面のそれぞれは、前記複数の楕円の異なる一つと一致しており、
前記複数の反射面は、前記第1焦点から生じる放射を受け、前記第2焦点に放射を反射するよう構成される、放射コレクタ。 - 前記反射面は、前記放射コレクタの光軸の周囲に配置される、請求項1に記載の放射コレクタ。
- 前記反射面は、光軸の周囲に円周方向に延在している、請求項1または2に記載の放射コレクタ。
- 前記複数の反射面は、放射コレクタを赤外線放射に対して回折格子として機能させる長さを有する、請求項1から3のいずれかに記載の放射コレクタ。
- 前記反射面はそれぞれ、0.1mmから5mmの範囲の長さを有する、請求項4に記載の放射コレクタ。
- 前記複数の反射面は、一つ以上の中間面により結合される、請求項1から5のいずれかに記載の放射コレクタ。
- 前記中間面はそれぞれ、略cosθ(n+1/4)λIRの長さを有し、nは整数であり、λIRは放射コレクタが回折格子として機能する赤外線放射の波長であり、θは前記放射コレクタの反射面への赤外線放射の入射角である、請求項6に記載の放射コレクタ。
- 前記中間面はそれぞれ、0.1mmから1mmの範囲の長さを有する、請求項6または7に記載の放射コレクタ。
- 各中間面は、前記第1焦点から対応する中間面への方向に対して実質的に平行に配置される、請求項6から8のいずれかに記載の放射コレクタ。
- 前記中間面は、前記反射面の後ろでアンダーカットされている、請求項6から9のいずれかに記載の放射コレクタ。
- 一つ以上の孔が前記一つ以上の中間面のうち少なくとも一つに設けられている、請求項6から10のいずれかに記載の放射コレクタ。
- 前記複数の反射面は、10を超える反射面を備える、請求項1から11のいずれかに記載の放射コレクタ。
- 前記複数の反射面の内側反射面は、前記複数の楕円の内側楕円と一致している、請求項1から12のいずれかに記載の放射コレクタ。
- 前記複数の反射面のそれぞれの光軸からの距離は、各反射面が一致している楕円のサイズとともに増大する、請求項2から13のいずれかに記載の放射コレクタ。
- 前記放射コレクタは、汚染物質トラップを配置可能な光軸に沿った有効長さが前記放射コレクタと前記第1および第2焦点の中間に設けられるように構成される、請求項2から14のいずれかに記載の放射コレクタ。
- 前記汚染物質トラップは、回転フォイルトラップである、請求項15に記載の放射コレクタ。
- 冷却システムおよびリフレクタを備える装置であって、前記冷却システムは前記リフレクタを冷却するよう構成され、前記冷却システムは、
放射コレクタと熱的接触した状態にある多孔質構造であって、液相状態のクーラントを受けるよう構成された多孔質構造と、
気相状態の前記多孔質構造からのクーラントを受け、クーラントを凝縮してそれによりクーラントを液相に位相変化させ、凝縮された液相状態のクーラントを前記多孔質構造中への入口に対して出力するよう構成されたコンデンサと、を備える装置。 - 前記多孔質構造は、それを通って毛細管構造が延びる材料から成る、請求項17に記載の装置。
- 前記多孔質構造は金属から成る、請求項18に記載の装置。
- 前記金属は銅から成る、請求項19に記載の装置。
- 前記冷却システムは、クーラントが毛細管現象により多孔質構造を通って分布するよう構成される、請求項18から20のいずれかに記載の装置。
- 前記クーラントはメタノールから成る、請求項17から21のいずれかに記載の装置。
- 前記多孔質構造を前記リフレクタからシールするよう構成された非多孔質シートをさらに備える、請求項17から22のいずれかに記載の装置。
- 前記非多孔質シートは、銅の非多孔質シートから成る、請求項23に記載の装置。
- 前記冷却システムは、リソグラフィ装置の一部を形成するリフレクタを冷却するよう構成される、請求項17から24のいずれかに記載の装置。
- 前記冷却システムは、リソグラフィ装置用の放射源の放射コレクタを冷却するよう構成される、請求項17から25のいずれかに記載の装置。
- 前記リフレクタは基板を備え、前記冷却システムは前記基板に接触するよう構成される、請求項17から26のいずれかに記載の装置。
- 前記基板はAlSi−40から成る、請求項27に記載の装置。
- 多孔質層から最も遠い基板の面は、平滑面を提供するよう構成された平滑化層が設けられている、請求項17から28のいずれかに記載の装置。
- 前記平滑化層は、リン酸ニッケルから成る、請求項29に記載の装置。
- リフレクタは、請求項1から16のいずれかに記載の放射コレクタを備える、請求項17から30のいずれかに記載の装置。
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US201361812961P | 2013-04-17 | 2013-04-17 | |
US61/812,961 | 2013-04-17 | ||
PCT/EP2014/055870 WO2014170093A2 (en) | 2013-04-17 | 2014-03-24 | Radiation collector, radiation source and lithographic apparatus |
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JP2016522431A true JP2016522431A (ja) | 2016-07-28 |
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US (1) | US20160041374A1 (ja) |
JP (1) | JP2016522431A (ja) |
KR (1) | KR20150143802A (ja) |
CN (1) | CN105122140B (ja) |
NL (1) | NL2012499A (ja) |
WO (1) | WO2014170093A2 (ja) |
Cited By (1)
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JP2018536199A (ja) * | 2015-11-19 | 2018-12-06 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置のためのeuvソースチャンバーおよびガス流れ様式、多層ミラー、およびリソグラフィ装置 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102014117453A1 (de) | 2014-11-27 | 2016-06-02 | Carl Zeiss Smt Gmbh | Kollektorspiegel für Mikrolithografie |
US9541840B2 (en) * | 2014-12-18 | 2017-01-10 | Asml Netherlands B.V. | Faceted EUV optical element |
CN104570178B (zh) * | 2014-12-30 | 2017-02-22 | 东莞市沃德普自动化科技有限公司 | 一种应用于检测设备中反光镜的成型方法 |
CN104570177B (zh) * | 2014-12-30 | 2017-01-18 | 东莞市沃德普自动化科技有限公司 | 一种光线聚焦反光镜 |
JP2018527612A (ja) * | 2015-08-25 | 2018-09-20 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置のための抑制フィルタ、放射コレクタ及び放射源、並びに抑制フィルタの少なくとも2つの反射面レベル間の分離距離を決定する方法 |
US10824083B2 (en) * | 2017-09-28 | 2020-11-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | Light source, EUV lithography system, and method for generating EUV radiation |
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Also Published As
Publication number | Publication date |
---|---|
US20160041374A1 (en) | 2016-02-11 |
NL2012499A (en) | 2014-10-20 |
KR20150143802A (ko) | 2015-12-23 |
WO2014170093A2 (en) | 2014-10-23 |
CN105122140A (zh) | 2015-12-02 |
CN105122140B (zh) | 2018-06-01 |
WO2014170093A3 (en) | 2015-01-22 |
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