JP6487519B2 - リソグラフィ装置用の汚染トラップ - Google Patents
リソグラフィ装置用の汚染トラップ Download PDFInfo
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- JP6487519B2 JP6487519B2 JP2017216955A JP2017216955A JP6487519B2 JP 6487519 B2 JP6487519 B2 JP 6487519B2 JP 2017216955 A JP2017216955 A JP 2017216955A JP 2017216955 A JP2017216955 A JP 2017216955A JP 6487519 B2 JP6487519 B2 JP 6487519B2
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- 230000005855 radiation Effects 0.000 claims description 95
- 239000000758 substrate Substances 0.000 claims description 38
- 238000000059 patterning Methods 0.000 claims description 27
- 238000001816 cooling Methods 0.000 claims description 26
- 238000010438 heat treatment Methods 0.000 claims description 24
- 238000012546 transfer Methods 0.000 claims description 22
- 239000000446 fuel Substances 0.000 claims description 13
- 239000002245 particle Substances 0.000 claims description 11
- 238000005286 illumination Methods 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 6
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- 239000010410 layer Substances 0.000 description 24
- 230000003287 optical effect Effects 0.000 description 13
- 239000007789 gas Substances 0.000 description 12
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 11
- 229910052718 tin Inorganic materials 0.000 description 11
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- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
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- 239000000356 contaminant Substances 0.000 description 2
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- 150000002500 ions Chemical class 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
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- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/008—X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma
Description
[0001] 本願は、2012年4月23日に出願した米国仮出願第61/636,960号の優先権を主張し、その全体を本願に参考として組み込む。
- 放射ビームB(例えば、EUV放射)を調整するように構成された照明システム(イルミネータ)ILと、
- パターニングデバイス(例えば、マスクまたはレチクル)MAを支持するように構築され、かつパターニングデバイスを正確に位置決めするように構成された第1ポジショナPMに連結されたサポート構造(例えば、マスクテーブル)MTと、
- 基板(例えば、レジストコートウェーハ)Wを保持するように構築され、かつ基板を正確に位置決めするように構成された第2ポジショナPWに連結された基板テーブル(例えば、ウェーハテーブル)WTと、
- パターニングデバイスMAによって放射ビームBに付けられたパターンを基板Wのターゲット部分C(例えば、1つ以上のダイを含む)上に投影するように構成された投影システム(例えば、反射投影システム)PSと、を備える。
Claims (6)
- 極端紫外線を生成する放射源内のプラズマの形成と共に生成されるデブリ粒子を捕捉する汚染トラップ構成であって、
前記デブリ粒子を捕捉するとともに前記放射源の加熱力の少なくとも一部を吸収する複数の羽根と、
前記複数の羽根を加熱し、前記複数の羽根と熱伝達する加熱構成と、
前記プラズマの形成の結果として生成される熱を前記複数の羽根から離れるように運ぶ冷却構成と、
前記加熱構成と前記冷却構成との間のギャップと、を備え、
前記冷却構成は、前記加熱構成および前記ギャップを介して前記複数の羽根と熱伝達し、
前記放射源がオンの場合、前記冷却構成により前記複数の羽根が冷却される一方、前記放射源がオフの場合、前記複数の羽根が前記デブリ粒子を液相に保つ特定の温度に維持され、
前記汚染トラップ構成は、前記ギャップ内のガスの圧力を調整することにより、前記ガスの熱伝達係数を調整するように動作可能となる熱伝達調整構成をさらに備える、汚染トラップ構成。 - 前記複数の羽根は、実質的に円筒形の構造の中に取り付けられ、
前記加熱構成、前記ギャップ及び前記冷却構成は、前記実質的に円筒形の構造の外側周囲に同心状に配置される、請求項1に記載の汚染トラップ構成。 - 前記加熱構成は、導電性シリンダの壁の中に埋め込まれた加熱要素を備える、請求項2に記載の汚染トラップ構成。
- 前記冷却構成は、導電性シリンダの壁の中に埋め込まれた冷却要素を備える、請求項2又は3に記載の汚染トラップ構成。
- 燃料が放射ビームと接触してプラズマを形成する位置に配置されたプラズマ形成部位と、
請求項1〜4の何れか一項に記載の汚染トラップ構成と、
を備える、放射源。 - EUV放射ビームを生成する、請求項5に記載の放射源と、
前記放射ビームを調整する照明システムと、
放射ビームの断面にパターンを付与してパターン付き放射ビームを形成することができるパターニングデバイスを支持するサポートと、
基板を保持する基板テーブルと、
前記パターン付き放射ビームを前記基板のターゲット部分上に投影する投影システムと、
を備える、リソグラフィ装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261636960P | 2012-04-23 | 2012-04-23 | |
US61/636,960 | 2012-04-23 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015506170A Division JP6291477B2 (ja) | 2012-04-23 | 2013-04-05 | リソグラフィ装置用の汚染トラップ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018022196A JP2018022196A (ja) | 2018-02-08 |
JP6487519B2 true JP6487519B2 (ja) | 2019-03-20 |
Family
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015506170A Active JP6291477B2 (ja) | 2012-04-23 | 2013-04-05 | リソグラフィ装置用の汚染トラップ |
JP2017216955A Active JP6487519B2 (ja) | 2012-04-23 | 2017-11-10 | リソグラフィ装置用の汚染トラップ |
Family Applications Before (1)
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JP2015506170A Active JP6291477B2 (ja) | 2012-04-23 | 2013-04-05 | リソグラフィ装置用の汚染トラップ |
Country Status (3)
Country | Link |
---|---|
US (1) | US9494879B2 (ja) |
JP (2) | JP6291477B2 (ja) |
WO (1) | WO2013160083A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6182601B2 (ja) * | 2012-06-22 | 2017-08-16 | エーエスエムエル ネザーランズ ビー.ブイ. | 放射源及びリソグラフィ装置 |
NL2012954A (en) * | 2013-06-28 | 2015-01-05 | Asml Netherlands Bv | Radiation source for an euv optical lithographic apparatus, and lithographic apparatus comprising such a power source. |
US20160331636A1 (en) * | 2014-01-13 | 2016-11-17 | Haemonetics Corporation | A Container for Blood Component Cooling and Freezing |
DE102015216528A1 (de) * | 2015-08-28 | 2017-03-02 | Carl Zeiss Smt Gmbh | Beleuchtungssystem für EUV-Projektionsbelichtungsanlage, EUV-Projektionsbelichtungsanlage mit Beleuchtungssystem und Verfahren zum Betreiben einer EUV-Projektionsbelichtungsanlage |
JP7269889B2 (ja) * | 2017-06-23 | 2023-05-09 | エーエスエムエル ネザーランズ ビー.ブイ. | 放射源モジュール及びリソグラフィ装置 |
WO2020212019A1 (en) * | 2019-04-17 | 2020-10-22 | Asml Netherlands B.V. | Contamination trap |
US20230008480A1 (en) * | 2019-12-23 | 2023-01-12 | Cymer, Llc | Packed-bed filter for metal fluoride dust trapping in laser discharge chambers |
JP7327357B2 (ja) * | 2020-11-11 | 2023-08-16 | ウシオ電機株式会社 | ホイルトラップカバー装置およびデブリ低減装置 |
WO2024033020A1 (en) * | 2022-08-12 | 2024-02-15 | Asml Netherlands B.V. | Debris handling apparatus and method for an extreme ultraviolet light source |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7164144B2 (en) * | 2004-03-10 | 2007-01-16 | Cymer Inc. | EUV light source |
JP4917014B2 (ja) * | 2004-03-10 | 2012-04-18 | サイマー インコーポレイテッド | Euv光源 |
US7485881B2 (en) * | 2004-12-29 | 2009-02-03 | Asml Netherlands B.V. | Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system |
US7868304B2 (en) * | 2005-02-07 | 2011-01-11 | Asml Netherlands B.V. | Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby |
US7372058B2 (en) * | 2005-09-27 | 2008-05-13 | Asml Netherlands B.V. | Ex-situ removal of deposition on an optical element |
US20070115443A1 (en) * | 2005-11-23 | 2007-05-24 | Asml Netherlands B.V. | Radiation system and lithographic apparatus |
US7468521B2 (en) * | 2005-12-28 | 2008-12-23 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7629593B2 (en) * | 2007-06-28 | 2009-12-08 | Asml Netherlands B.V. | Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method |
CN102144191B (zh) * | 2008-09-11 | 2013-11-27 | Asml荷兰有限公司 | 辐射源和光刻设备 |
JP5705592B2 (ja) * | 2010-03-18 | 2015-04-22 | ギガフォトン株式会社 | 極端紫外光生成装置 |
JP5726546B2 (ja) * | 2010-03-29 | 2015-06-03 | ギガフォトン株式会社 | チャンバ装置 |
JP5785419B2 (ja) * | 2010-04-07 | 2015-09-30 | エーエスエムエル ネザーランズ ビー.ブイ. | 光学要素を冷却する方法、リソグラフィ装置、およびデバイスを製造する方法 |
JP6021422B2 (ja) * | 2011-06-20 | 2016-11-09 | ギガフォトン株式会社 | チャンバ装置 |
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2013
- 2013-04-05 US US14/395,981 patent/US9494879B2/en active Active
- 2013-04-05 WO PCT/EP2013/057169 patent/WO2013160083A1/en active Application Filing
- 2013-04-05 JP JP2015506170A patent/JP6291477B2/ja active Active
-
2017
- 2017-11-10 JP JP2017216955A patent/JP6487519B2/ja active Active
Also Published As
Publication number | Publication date |
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JP6291477B2 (ja) | 2018-03-14 |
US20150138519A1 (en) | 2015-05-21 |
WO2013160083A1 (en) | 2013-10-31 |
JP2018022196A (ja) | 2018-02-08 |
US9494879B2 (en) | 2016-11-15 |
JP2015515141A (ja) | 2015-05-21 |
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