JP2016510949A - 導電性の直接金属接合を行う方法 - Google Patents
導電性の直接金属接合を行う方法 Download PDFInfo
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Abstract
Description
(a)1つの面が第1の金属層に覆われた第1の基板と、1つの面が第2の金属層に覆われた第2の基板とを準備する
(b)第1の金属層と第2の金属層とを直接接触させて、第1の金属層及び第2の金属層の間に金属材料の橋部を有する接合界面部を形成する。金属材料の橋部は、互いに流動的に接続された空隙によって分離される
(d)接合界面部を少なくとも部分的に酸化性流体に浸漬し、空隙の外縁となる部分の第1の金属層及び第2の金属層を酸化させて、当該酸化によって空隙を少なくとも部分的に満たす金属酸化物を生成し、当該金属酸化物により、第1の金属層及び第2の金属層における空隙の外縁となる部分間にコンタクト領域を形成する。
半導体材料からなる第1の基板と、
第1の金属層と、
第1の金属層に直接接合により接合されて導電性の接合界面部を構成する第2の金属層と、
半導体材料からなる第2の基板と
を備える構造を提案する。ここで、接合界面部は、
第1の金属層及び第2の金属層の間に位置し、金属材料からなり且つ空隙によって互いに分離された橋部と、
空隙の外縁となる部分の第1の金属層及び第2の金属層を酸化することにより形成され、空隙の少なくとも一部を充填し、且つ、空隙の外縁となる部分の第1の金属層及び第2の金属層を接続させる金属酸化物と
を備える。
Claims (18)
- 半導体材料からなる2つの基板(1、3)の間に導電性直接金属接合を行う方法であって、以下の各ステップ、つまり
(a)一面が第1の金属層(2)に覆われた第1の基板(1)と、一面が第2の金属層(4)に覆われた第2の基板(3)とを準備する
(b)前記第1の金属層(2)と前記第2の金属層(4)とを直接接触させて、前記第1の金属層(2)と前記第2の金属層(4)との間に、金属材料橋部(5)を有する接合界面部(6)を形成し、前記金属材料橋部(5)は、互いに流動的に接続された空隙によって分離されているようにする
(d)前記接合界面部(6)を少なくとも部分的に酸化性流体(8)に浸漬し、前記空隙の外縁となる部分の前記第1の金属層及び前記第2の金属層を酸化させて、当該酸化により前記空隙を少なくとも部分的に充填する金属酸化物を生成し、当該金属酸化物によって、前記第1の金属層(2)及び前記第2の金属層(4)における前記空隙の外縁となる部分の間にコンタクト領域(9)を形成する
を有する方法。 - 請求項1の方法において、
前記第1の基板(1)及び前記第2の基板(3)を準備する前記ステップ(a)の前に、CVD(化学的気相成長)法によって、前記第1の基板(1)の表面及び前記第2の基板(3)の表面に、それぞれ、第1の金属層(2)及び第2の金属層(4)を堆積するステップを備えることを特徴とする方法。 - 請求項1又は2の方法において、
前記浸漬のステップ(d)は、約30分から数時間の期間に亘って行うことにより、前記空隙内に前記酸化性流体(8)を浸透させて前記金属酸化物を成長させることを特徴とする方法。 - 請求項1から3のいずれか1つの方法において、
前記ステップ(b)と前記ステップ(d)との間に、熱履歴を適用して接合をアニールするステップ(c)を備えることを特徴とする方法。 - 請求項4の方法において、
前記ステップ(c)に基づく熱履歴の適用は、更に、前記接合界面部(6)の任意の側に圧力を加えるステップ(c1)を更に備えることを特徴とする方法。 - 請求項1から5のいずれか1つの方法において、
前記接触のステップ(b)の前に、前記第1の金属層(2)の表面及び前記第2の金属層(4)の表面を、特に、RMSで0.7mm以下の粗さが得られるまで平坦化するステップを備えることを特徴とする方法。 - 請求項1から6のいずれか1つの方法において、
前記浸漬のステップ(d)において、前記酸化性流体(8)を、特に10℃と100℃との間の温度に加熱することを特徴とする方法。 - 請求項1から7のいずれか1つの方法において、
前記ステップ(d)の後に、接合を強化するための熱処理を行うステップ(e)を備えることを特徴とする方法。 - 請求項1から8のいずれか1つの方法において、
前記酸化性流体(8)は、液体の水(H2O)、過酸化水素(H2O2)又は気体のHNO3であっても良い酸化性気体又は酸化性気体を含むことを特徴とする方法。 - 請求項1から9のいずれか1つの方法において、
前記第1の金属層(2)の金属、及び、前記第2の金属層(4)の金属は、銅、モリブデン、タングステン及びこれらの合金から選ばれていることを特徴とする方法。 - 請求項1から10のいずれか1つの方法において、
前記第1の金属層(2)の金属は、前記第2の金属層(4)の金属と同一であることを特徴とする方法。 - 請求項4から11のいずれか1つの方法において、
前記ステップ(c)による熱履歴の適用は、30℃と400℃との間の温度、望ましくは250℃以下の温度、更に望ましくは50℃と200℃との間の温度において、数十分から数時間の間の期間、行われることを特徴とする方法。 - 請求項1から12のいずれか1つの方法において、
前記第1の金属層(2)は前記第1の基板(1)の表面を完全に覆うと共に、前記第2の金属層(4)は前記第2の基板(3)の表面を完全に覆うことを特徴とする方法。 - 請求項1から12のいずれか1つの方法において、
前記第1の金属層(2)及び前記第2の金属層(4)は、それぞれ、間に第1の絶縁材料(13)が伸びた複数の第1の金属パッド(12)、及び、間に第2の絶縁材料(13’)が伸びた複数の第2の金属パッド(12’)を備え、前記第1の金属パッド(12)の高さ及び前記第2の金属パッド(12’)の高さは、前記第1の絶縁材料(13)の厚さ及び前記第2の絶縁材料(12’)の厚さ以下であることを特徴とする方法。 - 垂直の導電性を示す構造(100)であって、次の順の積層、つまり
半導体材料からなる第1の基板(1)と、
第1の金属層(2)と、
前記第1の金属層(2)に直接接合により接合されて導電性の接合界面部(6)を構成する第2の金属層(4)と、
半導体材料からなる第2の基板とを備え、
前記接合界面部(6)は、
前記第1の金属層(2)と前記第2の金属層(4)との間にあり、空隙によって分割された複数の金属材料橋部(5)と、
前記空隙の外縁となる部分の前記第1の金属層(2)及び前記第2の金属層(4)を酸化することにより生成され、前記空隙の少なくとも一部を充填し、前記空隙の外縁となる部分の前記第1の金属層(2)及び前記第2の金属層(4)の間にコンタクト領域(9)を形成する金属酸化物と、
を備えることを特徴とする構造。 - 請求項15の構造(100)において、
少なくとも50%の前記空隙は、前記金属酸化物によって充填され、40nm以下の寸法を有することを特徴とする構造。 - 請求項15又は16の構造(100)において、
前記第1の金属層(2)は前記第1の基板(1)の表面を完全に覆っており、且つ、前記第2の金属層(4)は前記第2の基板(3)の表面を完全に覆っていることを特徴とする構造。 - 請求項15又は16の構造(100)において、
前記構造(100)は、第1の絶縁材料(13)及び第2の絶縁材料(13’)を備え、
前記第1の金属層(2)及び前記第2の金属層(4)は、それぞれ、間に第1の絶縁材料(13)が伸びた複数の第1の金属パッド(12)、及び、間に第2の絶縁材料(13’)が伸びた複数の第2の金属パッド(12’)を備え、
前記第1の金属パッド(12)の高さ及び前記第2の金属パッド(12’)の高さは、それぞれ、前記第1の絶縁材料(13)の厚さ及び前記第2の絶縁材料(13’)の厚さ以下であることを特徴とする構造。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1351976A FR3003087B1 (fr) | 2013-03-05 | 2013-03-05 | Procede de realisation d’un collage direct metallique conducteur |
FR13/51976 | 2013-03-05 | ||
PCT/FR2014/050504 WO2014135802A1 (fr) | 2013-03-05 | 2014-03-05 | Procédé de réalisation d'un collage direct métallique conducteur |
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CN105261623A (zh) * | 2014-07-16 | 2016-01-20 | 中芯国际集成电路制造(上海)有限公司 | 芯片、其制备方法、及包括其的图像传感器 |
FR3039707A1 (fr) * | 2015-10-28 | 2017-02-03 | Commissariat Energie Atomique | Procede de fabrication de dispositifs hybrides |
FR3043252B1 (fr) * | 2015-10-28 | 2019-07-19 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de fabrication d’un substrat composite |
US11244916B2 (en) * | 2018-04-11 | 2022-02-08 | Invensas Bonding Technologies, Inc. | Low temperature bonded structures |
FR3112240B1 (fr) * | 2020-07-06 | 2022-06-03 | Soitec Silicon On Insulator | Structure semi-conductrice comprenant une interface de collage electriquement conductrice, et procede de fabrication associe |
WO2023215598A1 (en) * | 2022-05-05 | 2023-11-09 | Adeia Semiconductor Bonding Technologies Inc. | Low temperature direct bonding |
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US20050003650A1 (en) * | 2003-07-02 | 2005-01-06 | Shriram Ramanathan | Three-dimensional stacked substrate arrangements |
JP2012124473A (ja) * | 2010-11-15 | 2012-06-28 | Ngk Insulators Ltd | 複合基板及び複合基板の製造方法 |
JP2012531312A (ja) * | 2009-07-03 | 2012-12-10 | コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ | 単純化した銅−銅接着方法 |
US20130009321A1 (en) * | 2011-07-05 | 2013-01-10 | Sony Corporation | Semiconductor device, fabrication method for a semiconductor device and electronic apparatus |
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US7064055B2 (en) * | 2002-12-31 | 2006-06-20 | Massachusetts Institute Of Technology | Method of forming a multi-layer semiconductor structure having a seamless bonding interface |
US6962835B2 (en) * | 2003-02-07 | 2005-11-08 | Ziptronix, Inc. | Method for room temperature metal direct bonding |
KR100821413B1 (ko) * | 2004-03-23 | 2008-04-11 | 가시오게산키 가부시키가이샤 | 적층구조 및 그 제조방법 |
JP4471003B2 (ja) * | 2008-01-23 | 2010-06-02 | セイコーエプソン株式会社 | 接合体の形成方法 |
US8304324B2 (en) * | 2008-05-16 | 2012-11-06 | Corporation For National Research Initiatives | Low-temperature wafer bonding of semiconductors to metals |
CN102292835B (zh) * | 2009-01-23 | 2015-03-25 | 日亚化学工业株式会社 | 半导体装置及其制造方法 |
FR2964112B1 (fr) * | 2010-08-31 | 2013-07-19 | Commissariat Energie Atomique | Traitement avant collage d'une surface mixte cu-oxyde, par un plasma contenant de l'azote et de l'hydrogene |
KR101709959B1 (ko) * | 2010-11-17 | 2017-02-27 | 삼성전자주식회사 | 범프 구조물, 이를 갖는 반도체 패키지 및 반도체 패키지의 제조 방법 |
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US20050003650A1 (en) * | 2003-07-02 | 2005-01-06 | Shriram Ramanathan | Three-dimensional stacked substrate arrangements |
JP2012531312A (ja) * | 2009-07-03 | 2012-12-10 | コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ | 単純化した銅−銅接着方法 |
JP2012124473A (ja) * | 2010-11-15 | 2012-06-28 | Ngk Insulators Ltd | 複合基板及び複合基板の製造方法 |
US20130009321A1 (en) * | 2011-07-05 | 2013-01-10 | Sony Corporation | Semiconductor device, fabrication method for a semiconductor device and electronic apparatus |
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EP2965346B1 (fr) | 2020-03-04 |
FR3003087A1 (fr) | 2014-09-12 |
FR3003087B1 (fr) | 2015-04-10 |
JP6410739B2 (ja) | 2018-10-24 |
WO2014135802A1 (fr) | 2014-09-12 |
US9472530B2 (en) | 2016-10-18 |
EP2965346A1 (fr) | 2016-01-13 |
US20150380383A1 (en) | 2015-12-31 |
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