JP2016507164A5 - - Google Patents
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- Publication number
- JP2016507164A5 JP2016507164A5 JP2015556898A JP2015556898A JP2016507164A5 JP 2016507164 A5 JP2016507164 A5 JP 2016507164A5 JP 2015556898 A JP2015556898 A JP 2015556898A JP 2015556898 A JP2015556898 A JP 2015556898A JP 2016507164 A5 JP2016507164 A5 JP 2016507164A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor die
- insertion member
- movable
- movable insertion
- tool portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 27
- 238000003780 insertion Methods 0.000 claims 26
- 230000037431 insertion Effects 0.000 claims 26
- 238000000034 method Methods 0.000 claims 17
- 239000000463 material Substances 0.000 claims 5
- 239000012530 fluid Substances 0.000 claims 4
- 239000007788 liquid Substances 0.000 claims 3
- 239000000853 adhesive Substances 0.000 claims 2
- 230000001070 adhesive effect Effects 0.000 claims 2
- 239000008393 encapsulating agent Substances 0.000 claims 2
- 239000012528 membrane Substances 0.000 claims 2
- 238000012806 monitoring device Methods 0.000 claims 2
- 238000012544 monitoring process Methods 0.000 claims 2
- 239000002210 silicon-based material Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000002985 plastic film Substances 0.000 claims 1
- 229920006255 plastic film Polymers 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2010252A NL2010252C2 (en) | 2013-02-06 | 2013-02-06 | Semiconductor product processing method, including a semiconductor product encapsulation method and a semiconductor product carrier-mounting method, and corresponding semiconductor product processing apparatus. |
| NL2010252 | 2013-02-06 | ||
| PCT/NL2014/050069 WO2014123413A1 (en) | 2013-02-06 | 2014-02-05 | Semiconductor die encapsulation or carrier-mounting method, and corresponding semiconductor die encapsulation or carrier-mounting apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016507164A JP2016507164A (ja) | 2016-03-07 |
| JP2016507164A5 true JP2016507164A5 (cg-RX-API-DMAC7.html) | 2017-01-26 |
| JP6420259B2 JP6420259B2 (ja) | 2018-11-07 |
Family
ID=47891868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015556898A Active JP6420259B2 (ja) | 2013-02-06 | 2014-02-05 | 半導体ダイ封入又は実装方法及び対応する半導体ダイ封入又は実装装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9536760B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2954550B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6420259B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR102205248B1 (cg-RX-API-DMAC7.html) |
| CN (1) | CN105247671B (cg-RX-API-DMAC7.html) |
| NL (1) | NL2010252C2 (cg-RX-API-DMAC7.html) |
| TW (1) | TWI642118B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2014123413A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9947561B2 (en) * | 2016-03-07 | 2018-04-17 | Asm Technology Singapore Pte Ltd | Semiconductor encapsulation system comprising a vacuum pump and a reservoir pump |
| JP6079925B1 (ja) * | 2016-03-30 | 2017-02-15 | 第一精工株式会社 | 樹脂封止装置及び樹脂封止装置の異常検知方法 |
| IT201700000191A1 (it) | 2017-01-02 | 2018-07-02 | Amx Automatrix S R L | Pressa e metodo di sinterizzazione di componenti elettronici su un substrato |
| JP6304517B1 (ja) * | 2017-02-14 | 2018-04-04 | 第一精工株式会社 | 樹脂封止方法及び樹脂封止装置 |
| US11227779B2 (en) | 2017-09-12 | 2022-01-18 | Asm Technology Singapore Pte Ltd | Apparatus and method for processing a semiconductor device |
| DE102017216545A1 (de) | 2017-09-19 | 2018-11-29 | Conti Temic Microelectronic Gmbh | Vorrichtung und Verfahren zur Herstellung einer Niedertemperatur-Drucksinterverbindung für eine elektronische Baugruppe |
| CN112106452A (zh) * | 2018-05-08 | 2020-12-18 | W.L.戈尔及同仁股份有限公司 | 可拉伸和不可拉伸基材上的柔性且耐久性印刷电路 |
| NL2021137B1 (en) * | 2018-06-15 | 2019-12-20 | Boschman Tech Bv | Sintering Process Product Carrier |
| IT201800006846A1 (it) * | 2018-07-02 | 2020-01-02 | Gruppo di pressatura per una pressa di sinterizzazione di componenti elettronici su un substrato | |
| IT201800007256A1 (it) * | 2018-07-17 | 2020-01-17 | Organo pressore, gruppo di pressatura e pressa di sinterizzazione di componenti elettronici su un substrato | |
| CN113039052B (zh) | 2018-11-16 | 2023-09-05 | 惠普发展公司,有限责任合伙企业 | 引线框架装配件及引线框架的两步模制成型方法 |
| JP6667879B1 (ja) * | 2018-12-19 | 2020-03-18 | アサヒ・エンジニアリング株式会社 | 電子部品の実装装置 |
| DE102018133434B4 (de) | 2018-12-21 | 2021-03-25 | Rogers Germany Gmbh | Verfahren zum Verkapseln mindestens eines Trägersubstrats |
| DE102018133420A1 (de) | 2018-12-21 | 2020-06-25 | Rogers Germany Gmbh | Verfahren zum Verkapseln mindestens eines Trägersubstrats, Elektronikmodul und Werkzeug zum Verkapseln eines Trägersubstrats |
| DE102018010352B4 (de) | 2018-12-21 | 2021-05-12 | Rogers Germany Gmbh | Verfahren zum Verkapseln mindestens eines Trägersubstrats, Elektronikmodul und Werkzeug zum Verkapseln eines Trägersubstrats |
| DE102018133456A1 (de) | 2018-12-21 | 2020-06-25 | Rogers Germany Gmbh | Verfahren zum Verkapseln mindestens eines Trägersubstrats, Elektronikmodul und Werkzeug zum Verkapseln eines Trägersubstrats |
| JP2020119983A (ja) * | 2019-01-23 | 2020-08-06 | トヨタ自動車株式会社 | 半導体素子接合装置、及び半導体素子接合方法 |
| JP6762578B2 (ja) * | 2019-02-09 | 2020-09-30 | アサヒ・エンジニアリング株式会社 | 電子部品実装装置 |
| NL2024038B1 (en) | 2019-10-17 | 2021-06-22 | Boschman Tech B V | Component Processing Apparatus, such as a Pressure Sintering Apparatus or a Component Encapsulation Apparatus |
| KR102196397B1 (ko) * | 2020-05-13 | 2020-12-30 | 제엠제코(주) | 메탈포스트, 이를 포함하는 반도체 패키지 및 반도체 패키지 제조방법 |
| DE102020114442A1 (de) | 2020-05-29 | 2021-12-02 | Danfoss Silicon Power Gmbh | Halbleiterbauelement |
| DE102020207343A1 (de) | 2020-06-15 | 2021-12-16 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung optischer und/oder optoelektronischer Systeme mit verbesserter Wärmeabfuhr und verbesserter thermischer und/oder mechanischer Stabilität, sowie mittels dieses Verfahrens erhaltene optische und/oder optoelektronische Systeme |
| US11676937B2 (en) * | 2021-05-04 | 2023-06-13 | Asmpt Singapore Pte. Ltd. | Flexible sinter tool for bonding semiconductor devices |
| US12072251B2 (en) * | 2022-03-01 | 2024-08-27 | Asmpt Singapore Pte. Ltd. | Force measurement device and method for bonding or encapsulation process and apparatus incorporating the device |
| CN116631917B (zh) * | 2023-07-19 | 2023-12-19 | 江苏快克芯装备科技有限公司 | 气压膜压接装置 |
| AT527921B1 (de) | 2024-04-25 | 2025-08-15 | Smt Maschinen Und Vertriebs Gmbh & Co Kg | Zylinderplatte einer Vorrichtung zum Verbinden eines Bauelements mit einem Substrat |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL193526C (nl) | 1991-02-26 | 2000-01-04 | Boschman Tech Bv | Inrichting voor het omhullen van elektronische onderdelen met een kunststof. |
| JP3026550B2 (ja) * | 1996-05-07 | 2000-03-27 | 富士通株式会社 | 半導体装置の製造方法 |
| SG64937A1 (en) * | 1996-06-21 | 2000-08-22 | Advanced Systems Automation | Wedge device for linear force amplification in a press |
| JPH11121479A (ja) * | 1997-10-17 | 1999-04-30 | Fujitsu Ltd | 半導体部品の実装方法および実装装置 |
| TW341171U (en) * | 1998-01-16 | 1998-09-21 | Li-Li Chen | A platform radial dissipation forming mold |
| EP1238775B1 (en) * | 1999-12-16 | 2006-03-08 | Dai-Ichi Seiko Co. Ltd. | Resin sealing mold |
| JP2002110744A (ja) * | 2000-09-26 | 2002-04-12 | Matsushita Electric Ind Co Ltd | 半導体実装装置、および半導体実装方法 |
| EP1220309A1 (en) * | 2000-12-28 | 2002-07-03 | STMicroelectronics S.r.l. | Manufacturing method of an electronic device package |
| JP2003133706A (ja) * | 2001-10-22 | 2003-05-09 | Matsushita Electric Ind Co Ltd | 圧着装置および圧着方法 |
| JP4017480B2 (ja) * | 2002-09-24 | 2007-12-05 | Towa株式会社 | 樹脂封止金型 |
| JP2005026608A (ja) * | 2003-07-02 | 2005-01-27 | Tokyo Electron Ltd | 接合方法および接合装置 |
| JP2006156796A (ja) * | 2004-11-30 | 2006-06-15 | Towa Corp | 半導体チップの樹脂封止成形方法、及び、装置 |
| US7520052B2 (en) * | 2005-06-27 | 2009-04-21 | Texas Instruments Incorporated | Method of manufacturing a semiconductor device |
| EP1939926B1 (en) * | 2005-10-12 | 2012-03-21 | Murata Manufacturing Co. Ltd. | Bonding apparatus |
| JP2007317738A (ja) * | 2006-05-23 | 2007-12-06 | Matsushita Electric Ind Co Ltd | 部品圧着実装機の加重測定方法と装置、それらを用いた部品圧着実装機 |
| US7948034B2 (en) * | 2006-06-22 | 2011-05-24 | Suss Microtec Lithography, Gmbh | Apparatus and method for semiconductor bonding |
| JP2008192725A (ja) * | 2007-02-02 | 2008-08-21 | Spansion Llc | 半導体装置及びその製造方法並びに半導体装置の製造装置 |
| JP5070896B2 (ja) * | 2007-03-19 | 2012-11-14 | 富士通セミコンダクター株式会社 | 電子部品の樹脂封止方法、樹脂封止用金型及び半導体装置の製造方法 |
| CN100576478C (zh) * | 2007-09-29 | 2009-12-30 | 南茂科技股份有限公司 | 晶粒重新配置的封装方法 |
| WO2009119096A1 (ja) * | 2008-03-27 | 2009-10-01 | 株式会社ニコン | 接合装置および接合方法 |
| US8125061B2 (en) * | 2009-09-03 | 2012-02-28 | Advanced Semiconductor Engineering, Inc. | Semiconductor package and method of manufacturing the same |
| JP5906528B2 (ja) * | 2011-07-29 | 2016-04-20 | アピックヤマダ株式会社 | モールド金型及びこれを用いた樹脂モールド装置 |
| JP5777660B2 (ja) * | 2013-05-17 | 2015-09-09 | アサヒ・エンジニアリング株式会社 | 樹脂成形装置及び半導体装置の製造方法 |
-
2013
- 2013-02-06 NL NL2010252A patent/NL2010252C2/en not_active IP Right Cessation
-
2014
- 2014-02-05 US US14/766,161 patent/US9536760B2/en active Active
- 2014-02-05 CN CN201480015287.3A patent/CN105247671B/zh active Active
- 2014-02-05 JP JP2015556898A patent/JP6420259B2/ja active Active
- 2014-02-05 EP EP14703936.6A patent/EP2954550B1/en active Active
- 2014-02-05 KR KR1020157024180A patent/KR102205248B1/ko active Active
- 2014-02-05 WO PCT/NL2014/050069 patent/WO2014123413A1/en not_active Ceased
- 2014-02-06 TW TW103103948A patent/TWI642118B/zh active
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