JP2016504759A - 熱処理により不活性な酸素析出核を活性化する高析出密度ウエハの製造 - Google Patents

熱処理により不活性な酸素析出核を活性化する高析出密度ウエハの製造 Download PDF

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JP2016504759A
JP2016504759A JP2015543112A JP2015543112A JP2016504759A JP 2016504759 A JP2016504759 A JP 2016504759A JP 2015543112 A JP2015543112 A JP 2015543112A JP 2015543112 A JP2015543112 A JP 2015543112A JP 2016504759 A JP2016504759 A JP 2016504759A
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wafer
oxygen precipitation
oxygen
heat treatment
precipitation nuclei
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JP2015543112A
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Japanese (ja)
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JP2016504759A5 (enExample
Inventor
ロバート・ジェイ・フォルスター
ウラジミール・ブイ・ボロンコフ
マルコ・コルナラ
ダニエラ・ガンバロ
マッシミリアーノ・オルモ
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SunEdison Semiconductor Ltd
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SunEdison Semiconductor Ltd
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/90—Thermal treatments, e.g. annealing or sintering
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/02—Heat treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/203—Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2015543112A 2012-11-19 2013-11-19 熱処理により不活性な酸素析出核を活性化する高析出密度ウエハの製造 Pending JP2016504759A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261728084P 2012-11-19 2012-11-19
US61/728,084 2012-11-19
PCT/US2013/070771 WO2014078847A1 (en) 2012-11-19 2013-11-19 Production of high precipitate density wafers by activation of inactive oxygen precipitate nuclei by heat treatment

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JP2018165923A Division JP6671436B2 (ja) 2012-11-19 2018-09-05 熱処理により不活性な酸素析出核を活性化する高析出密度ウエハの製造

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JP2016504759A true JP2016504759A (ja) 2016-02-12
JP2016504759A5 JP2016504759A5 (enExample) 2016-12-28

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JP2018165923A Active JP6671436B2 (ja) 2012-11-19 2018-09-05 熱処理により不活性な酸素析出核を活性化する高析出密度ウエハの製造

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US (1) US9129919B2 (enExample)
JP (2) JP2016504759A (enExample)
DE (1) DE112013005512B4 (enExample)
TW (1) TWI614808B (enExample)
WO (1) WO2014078847A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
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JP2019004173A (ja) * 2012-11-19 2019-01-10 サンエディソン・セミコンダクター・リミテッドＳｕｎＥｄｉｓｏｎ Ｓｅｍｉｃｏｎｄｕｃｔｏｒ Ｌｉｍｉｔｅｄ 熱処理により不活性な酸素析出核を活性化する高析出密度ウエハの製造
KR20200028439A (ko) * 2017-08-04 2020-03-16 실트로닉 아게 단결정질 실리콘의 반도체 웨이퍼 및 반도체 웨이퍼를 제조하는 방법
JPWO2020213230A1 (enExample) * 2019-04-16 2020-10-22

Families Citing this family (2)

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DE102014208815B4 (de) * 2014-05-09 2018-06-21 Siltronic Ag Verfahren zur Herstellung einer Halbleiterscheibe aus Silizium
DE102017219255A1 (de) * 2017-10-26 2019-05-02 Siltronic Ag Halbleiterscheibe aus einkristallinem Silizium

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US4437922A (en) * 1982-03-26 1984-03-20 International Business Machines Corporation Method for tailoring oxygen precipitate particle density and distribution silicon wafers
JP2001509319A (ja) * 1997-02-26 2001-07-10 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド 理想的な酸素析出シリコンウエハおよびそれのための酸素外方拡散の無い方法
JP2004006615A (ja) * 2002-04-26 2004-01-08 Sumitomo Mitsubishi Silicon Corp 高抵抗シリコンウエーハ及びその製造方法
JP2006261632A (ja) * 2005-02-18 2006-09-28 Sumco Corp シリコンウェーハの熱処理方法
JP2008135773A (ja) * 2002-02-07 2008-06-12 Siltronic Ag シリコンウェーハの熱処理方法及び該方法で処理したシリコンウェーハ

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JP2617798B2 (ja) 1989-09-22 1997-06-04 三菱電機株式会社 積層型半導体装置およびその製造方法
US5024723A (en) 1990-05-07 1991-06-18 Goesele Ulrich M Method of producing a thin silicon on insulator layer by wafer bonding and chemical thinning
FR2681472B1 (fr) 1991-09-18 1993-10-29 Commissariat Energie Atomique Procede de fabrication de films minces de materiau semiconducteur.
JPH07106512A (ja) 1993-10-04 1995-04-21 Sharp Corp 分子イオン注入を用いたｓｉｍｏｘ処理方法
US5593494A (en) * 1995-03-14 1997-01-14 Memc Electronic Materials, Inc. Precision controlled precipitation of oxygen in silicon
EP0948037B1 (en) * 1996-07-29 2006-11-02 Sumco Corporation Method for manufacturing a silicon epitaxial wafer
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US6336968B1 (en) 1998-09-02 2002-01-08 Memc Electronic Materials, Inc. Non-oxygen precipitating czochralski silicon wafers
JP3811582B2 (ja) * 1999-03-18 2006-08-23 信越半導体株式会社 シリコン基板の熱処理方法およびその基板を用いたエピタキシャルウェーハの製造方法
JP4605876B2 (ja) * 2000-09-20 2011-01-05 信越半導体株式会社 シリコンウエーハおよびシリコンエピタキシャルウエーハの製造方法
WO2002086960A1 (en) 2001-04-20 2002-10-31 Memc Electronic Materials, Inc. Method for the preparation of a silicon wafer having stabilized oxygen precipitates
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JP2016504759A (ja) * 2012-11-19 2016-02-12 サンエディソン・セミコンダクター・リミテッドＳｕｎＥｄｉｓｏｎ Ｓｅｍｉｃｏｎｄｕｃｔｏｒ Ｌｉｍｉｔｅｄ 熱処理により不活性な酸素析出核を活性化する高析出密度ウエハの製造

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US4437922A (en) * 1982-03-26 1984-03-20 International Business Machines Corporation Method for tailoring oxygen precipitate particle density and distribution silicon wafers
JP2001509319A (ja) * 1997-02-26 2001-07-10 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド 理想的な酸素析出シリコンウエハおよびそれのための酸素外方拡散の無い方法
JP2008135773A (ja) * 2002-02-07 2008-06-12 Siltronic Ag シリコンウェーハの熱処理方法及び該方法で処理したシリコンウェーハ
JP2004006615A (ja) * 2002-04-26 2004-01-08 Sumitomo Mitsubishi Silicon Corp 高抵抗シリコンウエーハ及びその製造方法
JP2006261632A (ja) * 2005-02-18 2006-09-28 Sumco Corp シリコンウェーハの熱処理方法

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019004173A (ja) * 2012-11-19 2019-01-10 サンエディソン・セミコンダクター・リミテッドＳｕｎＥｄｉｓｏｎ Ｓｅｍｉｃｏｎｄｕｃｔｏｒ Ｌｉｍｉｔｅｄ 熱処理により不活性な酸素析出核を活性化する高析出密度ウエハの製造
KR20200028439A (ko) * 2017-08-04 2020-03-16 실트로닉 아게 단결정질 실리콘의 반도체 웨이퍼 및 반도체 웨이퍼를 제조하는 방법
JP2020529958A (ja) * 2017-08-04 2020-10-15 ジルトロニック アクチエンゲゼルシャフトＳｉｌｔｒｏｎｉｃ ＡＧ 単結晶シリコンの半導体ウェハおよび半導体ウェハの製造方法
KR102318313B1 (ko) * 2017-08-04 2021-10-29 실트로닉 아게 단결정질 실리콘의 반도체 웨이퍼 및 반도체 웨이퍼를 제조하는 방법
JP7098717B2 (ja) 2017-08-04 2022-07-11 ジルトロニック アクチエンゲゼルシャフト 単結晶シリコンの半導体ウェハおよび半導体ウェハの製造方法
JPWO2020213230A1 (enExample) * 2019-04-16 2020-10-22
KR20210151814A (ko) * 2019-04-16 2021-12-14 신에쯔 한도타이 가부시키가이샤 실리콘 단결정 웨이퍼의 제조방법 및 실리콘 단결정 웨이퍼
JP7388434B2 (ja) 2019-04-16 2023-11-29 信越半導体株式会社 シリコン単結晶ウェーハの製造方法及びシリコン単結晶ウェーハ
US11959191B2 (en) 2019-04-16 2024-04-16 Shin-Etsu Handotai Co., Ltd. Method for manufacturing silicon single crystal wafer and silicon single crystal wafer
KR102741720B1 (ko) * 2019-04-16 2024-12-11 신에쯔 한도타이 가부시키가이샤 실리콘 단결정 웨이퍼의 제조방법 및 실리콘 단결정 웨이퍼

Also Published As

Publication number Publication date
DE112013005512T5 (de) 2015-07-30
DE112013005512B4 (de) 2019-03-28
JP2019004173A (ja) 2019-01-10
US9129919B2 (en) 2015-09-08
WO2014078847A1 (en) 2014-05-22
TWI614808B (zh) 2018-02-11
JP6671436B2 (ja) 2020-03-25
US20140141537A1 (en) 2014-05-22
TW201426877A (zh) 2014-07-01

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