JP2016500473A5 - - Google Patents

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JP2016500473A5
JP2016500473A5 JP2015545190A JP2015545190A JP2016500473A5 JP 2016500473 A5 JP2016500473 A5 JP 2016500473A5 JP 2015545190 A JP2015545190 A JP 2015545190A JP 2015545190 A JP2015545190 A JP 2015545190A JP 2016500473 A5 JP2016500473 A5 JP 2016500473A5
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axis
electronic device
device manufacturing
drive assemblies
manufacturing systems
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JP2015545190A 2012-11-30 2013-11-26 不等長の前腕部を備えた多軸ロボット装置、電子デバイス製造システム、及び、電子デバイス製造において基板を搬送するための方法 Active JP6336467B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261732196P 2012-11-30 2012-11-30
US61/732,196 2012-11-30
PCT/US2013/072048 WO2014085479A1 (en) 2012-11-30 2013-11-26 Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing

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JP2016500473A JP2016500473A (ja) 2016-01-12
JP2016500473A5 true JP2016500473A5 (enExample) 2017-01-12
JP6336467B2 JP6336467B2 (ja) 2018-06-06

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JP2015545190A Active JP6336467B2 (ja) 2012-11-30 2013-11-26 不等長の前腕部を備えた多軸ロボット装置、電子デバイス製造システム、及び、電子デバイス製造において基板を搬送するための方法
JP2015545192A Active JP6382213B2 (ja) 2012-11-30 2013-11-26 モータモジュール、多軸モータ駆動アセンブリ、多軸ロボット装置、並びに、電子デバイス製造のシステム及び方法

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JP2015545192A Active JP6382213B2 (ja) 2012-11-30 2013-11-26 モータモジュール、多軸モータ駆動アセンブリ、多軸ロボット装置、並びに、電子デバイス製造のシステム及び方法

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US (2) US9742250B2 (enExample)
JP (2) JP6336467B2 (enExample)
KR (3) KR102094390B1 (enExample)
CN (2) CN104812534B (enExample)
TW (2) TWI609557B (enExample)
WO (2) WO2014085483A1 (enExample)

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