JP2016500473A5 - - Google Patents
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- JP2016500473A5 JP2016500473A5 JP2015545190A JP2015545190A JP2016500473A5 JP 2016500473 A5 JP2016500473 A5 JP 2016500473A5 JP 2015545190 A JP2015545190 A JP 2015545190A JP 2015545190 A JP2015545190 A JP 2015545190A JP 2016500473 A5 JP2016500473 A5 JP 2016500473A5
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- electronic device
- device manufacturing
- drive assemblies
- manufacturing systems
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- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000004805 robotic Methods 0.000 description 1
Description
本出願はまた、2013年11月26日に出願され、あらゆる目的のために本書に組み込まれている、「モータモジュール、多軸モータ駆動アセンブリ、多軸ロボット装置、並びに、電子デバイス製造のシステム及び方法(MOTOR MODULES, MULTI−AXIS MOTOR DRIVE ASSEMBLIES, MULTI−AXIS ROBOT APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING SYSTEMS AND METHODS)」と題された、米国特許出願番号14/090,929(代理人整理番号21509/FEG/SYNX/PJT)に関する。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261732196P | 2012-11-30 | 2012-11-30 | |
US61/732,196 | 2012-11-30 | ||
PCT/US2013/072048 WO2014085479A1 (en) | 2012-11-30 | 2013-11-26 | Multi-axis robot apparatus with unequal length forearms, electronic device manufacturing systems, and methods for transporting substrates in electronic device manufacturing |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2016500473A JP2016500473A (ja) | 2016-01-12 |
JP2016500473A5 true JP2016500473A5 (ja) | 2017-01-12 |
JP6336467B2 JP6336467B2 (ja) | 2018-06-06 |
Family
ID=50824133
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015545192A Active JP6382213B2 (ja) | 2012-11-30 | 2013-11-26 | モータモジュール、多軸モータ駆動アセンブリ、多軸ロボット装置、並びに、電子デバイス製造のシステム及び方法 |
JP2015545190A Active JP6336467B2 (ja) | 2012-11-30 | 2013-11-26 | 不等長の前腕部を備えた多軸ロボット装置、電子デバイス製造システム、及び、電子デバイス製造において基板を搬送するための方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015545192A Active JP6382213B2 (ja) | 2012-11-30 | 2013-11-26 | モータモジュール、多軸モータ駆動アセンブリ、多軸ロボット装置、並びに、電子デバイス製造のシステム及び方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US9325228B2 (ja) |
JP (2) | JP6382213B2 (ja) |
KR (3) | KR102214398B1 (ja) |
CN (2) | CN104823272B (ja) |
TW (2) | TWI609557B (ja) |
WO (2) | WO2014085483A1 (ja) |
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-
2013
- 2013-11-26 KR KR1020207008382A patent/KR102214398B1/ko active IP Right Grant
- 2013-11-26 WO PCT/US2013/072053 patent/WO2014085483A1/en active Application Filing
- 2013-11-26 KR KR1020157016957A patent/KR102094390B1/ko active IP Right Grant
- 2013-11-26 JP JP2015545192A patent/JP6382213B2/ja active Active
- 2013-11-26 US US14/090,899 patent/US9325228B2/en active Active
- 2013-11-26 CN CN201380061937.3A patent/CN104823272B/zh active Active
- 2013-11-26 US US14/090,929 patent/US9742250B2/en active Active
- 2013-11-26 CN CN201380062097.2A patent/CN104812534B/zh not_active Expired - Fee Related
- 2013-11-26 KR KR1020157016956A patent/KR102163086B1/ko active IP Right Grant
- 2013-11-26 WO PCT/US2013/072048 patent/WO2014085479A1/en active Application Filing
- 2013-11-26 JP JP2015545190A patent/JP6336467B2/ja active Active
- 2013-11-28 TW TW102143468A patent/TWI609557B/zh not_active IP Right Cessation
- 2013-11-28 TW TW102143467A patent/TWI598195B/zh active
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