JP2016128599A - ダイヤモンドライクカーボン層積層体およびその製造方法 - Google Patents

ダイヤモンドライクカーボン層積層体およびその製造方法 Download PDF

Info

Publication number
JP2016128599A
JP2016128599A JP2015003517A JP2015003517A JP2016128599A JP 2016128599 A JP2016128599 A JP 2016128599A JP 2015003517 A JP2015003517 A JP 2015003517A JP 2015003517 A JP2015003517 A JP 2015003517A JP 2016128599 A JP2016128599 A JP 2016128599A
Authority
JP
Japan
Prior art keywords
layer
carbon
diamond
substrate
dlc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015003517A
Other languages
English (en)
Japanese (ja)
Inventor
弘高 伊藤
Hirotaka Ito
弘高 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP2015003517A priority Critical patent/JP2016128599A/ja
Priority to PCT/JP2016/050115 priority patent/WO2016111288A1/fr
Publication of JP2016128599A publication Critical patent/JP2016128599A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D37/00—Tools as parts of machines covered by this subclass
    • B21D37/01—Selection of materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D37/00—Tools as parts of machines covered by this subclass
    • B21D37/20—Making tools by operations not covered by a single other subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/18—Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing
    • B23B27/20—Cutting tools of which the bits or tips or cutting inserts are of special material with cutting bits or tips or cutting inserts rigidly mounted, e.g. by brazing with diamond bits or cutting inserts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Mounting, Exchange, And Manufacturing Of Dies (AREA)
JP2015003517A 2015-01-09 2015-01-09 ダイヤモンドライクカーボン層積層体およびその製造方法 Pending JP2016128599A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015003517A JP2016128599A (ja) 2015-01-09 2015-01-09 ダイヤモンドライクカーボン層積層体およびその製造方法
PCT/JP2016/050115 WO2016111288A1 (fr) 2015-01-09 2016-01-05 Stratifié multicouche comprenant du carbone sous forme de diamant amorphe et son procédé de fabrication

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015003517A JP2016128599A (ja) 2015-01-09 2015-01-09 ダイヤモンドライクカーボン層積層体およびその製造方法

Publications (1)

Publication Number Publication Date
JP2016128599A true JP2016128599A (ja) 2016-07-14

Family

ID=56355975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015003517A Pending JP2016128599A (ja) 2015-01-09 2015-01-09 ダイヤモンドライクカーボン層積層体およびその製造方法

Country Status (2)

Country Link
JP (1) JP2016128599A (fr)
WO (1) WO2016111288A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018158355A (ja) * 2017-03-22 2018-10-11 新日鐵住金株式会社 チタン板のプレス用金型及びチタン板のプレス成形方法
JP2020200795A (ja) * 2019-06-11 2020-12-17 株式会社豊田中央研究所 ベーン式ポンプ

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107881469B (zh) * 2017-12-25 2023-11-14 深圳先进技术研究院 类金刚石复合涂层及其制备方法与用途以及涂层工具
CN113862613A (zh) * 2021-09-18 2021-12-31 美戈利(浙江)轨道交通研究院有限公司 非晶梯度结构超硬dlc刀具涂层及其制备方法和刀具

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06207273A (ja) * 1992-09-24 1994-07-26 General Electric Co <Ge> 超硬質被覆を有する耐摩耗性物品及び製造方法
JP2000256850A (ja) * 1999-03-04 2000-09-19 Riken Corp ダイヤモンドライクカーボン薄膜及びその製造方法
JP2002256415A (ja) * 2001-03-06 2002-09-11 Kobe Steel Ltd ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法
JP2004060668A (ja) * 2002-07-24 2004-02-26 Nsk Ltd 転動装置
JP2008506036A (ja) * 2004-07-09 2008-02-28 オー・ツェー・エリコン・バルザース・アクチェンゲゼルシャフト Ｍｅ−ＤＬＣ硬質材料コーティングを備えた銅含有導電性材料
JP2011068941A (ja) * 2009-09-25 2011-04-07 Ntn Corp 硬質膜の成膜方法および硬質膜
JP2015218347A (ja) * 2014-05-15 2015-12-07 株式会社デンソー 摺動部材、その製造方法、及び摺動部材を備えるインジェクタ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06207273A (ja) * 1992-09-24 1994-07-26 General Electric Co <Ge> 超硬質被覆を有する耐摩耗性物品及び製造方法
JP2000256850A (ja) * 1999-03-04 2000-09-19 Riken Corp ダイヤモンドライクカーボン薄膜及びその製造方法
JP2002256415A (ja) * 2001-03-06 2002-09-11 Kobe Steel Ltd ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法
JP2004060668A (ja) * 2002-07-24 2004-02-26 Nsk Ltd 転動装置
JP2008506036A (ja) * 2004-07-09 2008-02-28 オー・ツェー・エリコン・バルザース・アクチェンゲゼルシャフト Ｍｅ−ＤＬＣ硬質材料コーティングを備えた銅含有導電性材料
JP2011068941A (ja) * 2009-09-25 2011-04-07 Ntn Corp 硬質膜の成膜方法および硬質膜
JP2015218347A (ja) * 2014-05-15 2015-12-07 株式会社デンソー 摺動部材、その製造方法、及び摺動部材を備えるインジェクタ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018158355A (ja) * 2017-03-22 2018-10-11 新日鐵住金株式会社 チタン板のプレス用金型及びチタン板のプレス成形方法
JP2020200795A (ja) * 2019-06-11 2020-12-17 株式会社豊田中央研究所 ベーン式ポンプ
JP7383908B2 (ja) 2019-06-11 2023-11-21 株式会社豊田中央研究所 ベーン式オイルポンプおよびそのベーンの製造方法

Also Published As

Publication number Publication date
WO2016111288A1 (fr) 2016-07-14

Similar Documents

Publication Publication Date Title
JP4918656B2 (ja) 非晶質硬質炭素皮膜
JP3934136B2 (ja) 硬質皮膜被覆部材及びその被覆方法
KR100845372B1 (ko) 유사 다이아몬드 카본 경질 다층 필름 형성 본체 및 이를제조하는 방법
US11465214B2 (en) Coated cutting tool
JP4373897B2 (ja) 硬質皮膜被覆部材及びその被覆方法
JP4707541B2 (ja) 硬質皮膜被覆部材
JP2010106311A (ja) 硬質多層膜成形体およびその製造方法
JP2020531300A (ja) ＴｉＡｌＮナノレイヤー膜を備える耐摩耗性ＰＶＤ工具コーティング
JP6525310B2 (ja) 被覆工具
WO2018235750A1 (fr) Élément coulissant et film de revêtement
JP2004238736A (ja) 硬質皮膜及び硬質皮膜被覆工具
WO2016111288A1 (fr) Stratifié multicouche comprenant du carbone sous forme de diamant amorphe et son procédé de fabrication
KR20190142359A (ko) 피복 절삭 공구
JP2008024996A (ja) ダイヤモンドライクカーボン積層皮膜部材及びその製造方法
JP6163141B2 (ja) 硬質皮膜
JP4449187B2 (ja) 薄膜形成方法
JP6243796B2 (ja) ダイヤモンドライクカーボン膜の成膜方法
JP5226826B2 (ja) ダイヤモンドライクカーボン硬質多層膜成形体の製造方法
JP5592626B2 (ja) 硬質膜の成膜方法および硬質膜
JP5418917B2 (ja) 皮膜密着性に優れた表面被覆部品の製造方法
JP6844704B2 (ja) 被覆切削工具
JP5360603B2 (ja) 非晶質炭素被覆部材の製造方法
WO2015186790A1 (fr) Segment de piston
JP2010202978A (ja) 非晶質炭素被覆部材
JP2006169614A (ja) 金属複合ダイヤモンドライクカーボン（ｄｌｃ）皮膜、その形成方法、及び摺動部材

Legal Events

Date Code Title Description
RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20170222

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20170322

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170901

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180731

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20180910

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20190212