JP2016100537A - 薄膜トランジスタ、薄膜トランジスタの製造方法及びレーザアニール装置 - Google Patents
薄膜トランジスタ、薄膜トランジスタの製造方法及びレーザアニール装置 Download PDFInfo
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- 239000010409 thin film Substances 0.000 title claims abstract description 135
- 238000005224 laser annealing Methods 0.000 title claims abstract description 64
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 239000000758 substrate Substances 0.000 claims abstract description 70
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 68
- 229920005591 polysilicon Polymers 0.000 claims abstract description 68
- 239000004065 semiconductor Substances 0.000 claims abstract description 42
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 33
- 239000013078 crystal Substances 0.000 claims description 47
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 239000011159 matrix material Substances 0.000 claims description 3
- 238000007493 shaping process Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 8
- 230000008569 process Effects 0.000 abstract description 7
- 239000002245 particle Substances 0.000 abstract 2
- 230000032258 transport Effects 0.000 description 58
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- 230000008859 change Effects 0.000 description 5
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
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- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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Abstract
Description
本発明によるTFTの製造方法は、基板5上にゲート電極1、ソース電極3、ドレイン電極4及び半導体層2を積層して備えたTFTの製造方法であって、基板5上に成膜されたアモルファスシリコン薄膜7の少なくともゲート電極1に対応した領域に紫外線のレーザ光Lを照射してポリシリコン薄膜8とし、半導体層2を形成するレーザアニール工程を含んでいる。
先ず、図2(a)及び図3(a)に示すように、アモルファスシリコン薄膜7上のレーザ光Lの照射形状が上記チャンネル領域10と同じ形状となるように整形された紫外線のレーザ光Lを、ゲート電極1に対応した領域内でソース電極3側端部領域のアモルファスシリコン薄膜7に1ショット照射(1回目の照射)する。これにより、アモルファスシリコン薄膜7のレーザ光Lの照射された部分が瞬間加熱されて溶融し、シリコン分子の結合状態がアモルファス(非結晶)状態から、ポリ(多結晶)状態に変えられてポリシリコン薄膜8となる。
本発明によるレーザアニール装置は、搬送手段13と、レーザ照射光学系14と、アライメント手段15と、撮像手段16と、制御手段17と、を備えて構成されている。
先ず、搬送手段13が制御手段17によって制御されてTFT基板18を図5の矢印A方向に一定速度で搬送を開始する。
2…半導体層
3…ソース電極
4…ドレイン電極
5…基板
7…アモルファスシリコン薄膜
8…ポリシリコン薄膜
10…チャンネル領域
11…ソース領域
12…ドレイン領域
2…半導体層
3…ソース電極
4…ドレイン電極
5…基板
7…アモルファスシリコン薄膜
8…ポリシリコン薄膜
10…チャンネル領域
11…ソース領域
12…ドレイン領域
14…レーザ照射光学系
21…シャドウマスク
29…マイクロレンズ(集光レンズ)
Claims (8)
- 基板上にゲート電極、ソース電極、ドレイン電極及び半導体層を積層して備えた薄膜トランジスタであって、
前記半導体層は、少なくとも前記ゲート電極に対応した領域のアモルファスシリコン薄膜がレーザアニールして形成されたポリシリコン薄膜であり、前記ソース電極及び前記ドレイン電極に夫々対応した領域の前記ポリシリコン薄膜の結晶粒径が前記ソース電極と前記ドレイン電極とに挟まれたチャンネル領域の前記ポリシリコン薄膜の結晶粒径に比べて小さいことを特徴とする薄膜トランジスタ。 - 基板上にゲート電極、ソース電極、ドレイン電極及び半導体層を積層して備えた薄膜トランジスタの製造方法であって、
前記基板上に被着されたアモルファスシリコン薄膜の少なくとも前記ゲート電極に対応した領域にレーザ光を照射してポリシリコン薄膜とし、前記半導体層を形成するレーザアニール工程を含み、
前記レーザアニール工程は、前記ソース電極及び前記ドレイン電極に夫々対応した領域の前記ポリシリコン薄膜の結晶粒径が前記ソース電極と前記ドレイン電極とに挟まれたチャンネル領域の前記ポリシリコン薄膜の結晶粒径に比べて小さくなるように、前記ソース電極及び前記ドレイン電極に夫々対応した領域にレーザ光を前記チャンネル領域よりも少ない照射量で照射して実施されることを特徴とする薄膜トランジスタの製造方法。 - 前記レーザアニール工程は、照射形状が前記チャンネル領域と同じ形状となるように整形されたレーザ光の照射位置を照射領域が一部重なった状態で前記ゲート電極に対応した領域内の前記ソース電極側又は前記ドレイン電極側の一方端から他方端に向かってステップ移動させて実施されることを特徴とする請求項2記載の薄膜トランジスタの製造方法。
- 前記レーザ光の照射位置のステップ移動量は、前記レーザアニールが前記レーザ光のnショット(nは3以上の整数)で実施される場合に、前記チャンネル領域の前記ソース電極及び前記ドレイン電極の対向方向の幅の1/nに等しいことを特徴とする請求項3記載の薄膜トランジスタの製造方法。
- 基板上にゲート電極、ソース電極、ドレイン電極及び半導体層を積層して備えた薄膜トランジスタの、少なくとも前記ゲート電極に対応した領域のアモルファスシリコン薄膜をレーザアニールしてポリシリコン薄膜とし、前記半導体層を形成するレーザアニール装置であって、
前記ソース電極及び前記ドレイン電極に夫々対応した領域の前記ポリシリコン薄膜の結晶粒径が、前記ソース電極と前記ドレイン電極とに挟まれたチャンネル領域の前記ポリシリコン薄膜の結晶粒径に比べて小さくなるように、前記ソース電極及び前記ドレイン電極に夫々対応した領域のレーザアニールを前記チャンネル領域のレーザアニールよりも少ないレーザ光の照射量で実施すべくレーザ光の照射量を制御する制御手段を備えたことを特徴とするレーザアニール装置。 - 前記制御手段は、照射形状が前記チャンネル領域と同じ形状となるように整形されたレーザ光の照射位置を照射領域が一部重なった状態で前記ゲート電極に対応した領域内の前記ソース電極側又は前記ドレイン電極側の一方端から他方端に向かってステップ移動するようにステップ移動量を制御することを特徴とする請求項5記載のレーザアニール装置。
- 前記レーザ光の照射形状を前記チャンネル領域の形状に合わせて整形するための開口を有するシャドウマスクと、前記開口を前記アモルファスシリコン薄膜上に縮小して合焦させる集光レンズとをさらに備えたことを特徴とする請求項5又は6記載のレーザアニール装置。
- 前記基板上には、複数の前記薄膜トランジスタが一定の配列ピッチでマトリクス状に配置して備えられ、
前記シャドウマスクは、複数の前記薄膜トランジスタに対応させて複数の前記開口を設けたものであり、
前記制御手段は、前記レーザアニールが、複数の前記開口のうち前記ソース電極及び前記ドレイン電極の対向方向に対応して並んだ複数の前記開口を通過した複数の前記レーザ光の多重照射により実施されるように、同方向への前記基板の移動速度及び前記レーザ光の照射タイミングを制御することを特徴とする請求項7記載のレーザアニール装置。
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