JP2016018993A - 半導体モジュールおよび半導体モジュールの製造方法 - Google Patents
半導体モジュールおよび半導体モジュールの製造方法 Download PDFInfo
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Abstract
【解決手段】半導体モジュール10は、台板12上の基板14と、台板12に取り付けられ、基板14を少なくとも部分的に囲い込むハウジング16と、一方の端部がハウジング16から突出し、他方の端部に端子足部36を有し、端子足部36が超音波溶接によって金属被覆部28の端子パッド38上に取り付けられる、少なくとも1つの端子34とを含む。端子34を囲い込む保護壁42は、ハウジング16の内部空間22を非保護領域46および保護領域44に分割する。保護壁42は、隙間48が基板14と保護壁42との間に形成される態様で形成され、隙間48は、端子パッド38に対する端子足部36の超音波溶接時に作り出される粒子が非保護領域46から保護領域44内へ入り込むことを防止するような態様で流体の流れ60を担持するように設計される。
【選択図】図3
Description
本発明は、半導体モジュール、および半導体モジュールの製造方法に関する。
ハウジングに加え、半導体モジュールは、半導体チップが取り付けられる金属化基板(たとえば、セラミックからなる)と、半導体モジュールもしくはそのチップをさらなる構成部品に電気的に接続することが可能な電気端子とを含み得る。通常は銅から製造されるこれらの端子は、たとえば、超音波溶接によって基板の金属層に接続され得る。
図1は、台板12と、基板14と、台板12の側部に取り付けられるハウジング16とを有する半導体モジュール10を示す。ハウジング16は、ハウジング16を台板12に取り付ける側壁18と、側壁18および台板12とともに内部空間22を形成する蓋板20とを含み、基板14および基板14に取り付けられる半導体チップ24が内部空間22内に取り付けられる。
10 半導体モジュール、12 台板、14 基板、16 ハウジング、18 側壁、20 蓋板、22 内部空間、24 半導体チップ、26 セラミック、28 金属被覆部、30 露出領域、32 結合線、34 端子、36 端子足部、38 端子パッド、40 出口開口、42 保護壁、44 保護領域、46 非保護領域、48 隙間、50 チャネル、52 入口開口、54 挿入物、56 ブロワー、58 ソノトロード、60 流体の流れ。
Claims (15)
- 半導体モジュール(10)であって、
台板(12)と、
少なくとも一方側に金属被覆部(28)を有し、少なくとも1つの半導体チップ(24)を担持する、前記台板(12)上の基板(14)と、
前記台板(12)に取り付けられ、前記基板(14)を少なくとも部分的に囲い込むハウジング(16)と、
一方の端部が前記ハウジング(16)から突出し、他方の端部に端子足部(36)を有し、前記端子足部(36)が超音波溶接によって前記金属被覆部(28)の端子パッド(38)上に取り付けられる、少なくとも1つの端子(34)とを備え、
前記ハウジング(16)は保護壁(42)を有し、前記保護壁(42)は、前記端子(34)を囲い込み、前記ハウジング(16)の内部空間(22)を非保護領域(46)および保護領域(44)に分割し、
前記保護壁(42)は、前記基板(14)と前記保護壁(42)との間に隙間(48)が形成される態様で形成され、隙間(48)は、前記端子パッド(38)に対する前記端子足部(36)の超音波溶接時において作り出される粒子が前記非保護領域(46)から前記保護領域(44)内へ入り込むことを防止する態様で流体の流れ(60)を担持するように設計される、半導体モジュール(10)。 - 前記ハウジング(16)は入口開口(52)を有し、前記入口開口(52)は、前記保護領域(44)内へ開き、この入口開口(52)を通って流体が前記保護領域(44)内に吹き込まれ得る、請求項1に記載の半導体モジュール(10)。
- 前記入口開口(52)はハウジング挿入物(54)によって閉じられる、請求項2に記載の半導体モジュール(10)。
- 前記ハウジング(16)は出口開口(40)を有し、前記開口(40)は、前記保護壁(42)によって形成されるチャネル(50)によって、前記非保護領域(46)内へ、および/または前記端子足部(36)へ導かれる、請求項1から3のいずれか1項に記載の半導体モジュール(10)。
- 前記出口開口(40)は、ハウジング挿入物(54)によって閉じられる、請求項4に記載の半導体モジュール(10)。
- 前記端子(34)は前記出口開口(40)から突出する、請求項4または5に記載の半導体モジュール(10)。
- 前記ハウジング(16)は、入口開口(52)から完全に離して前記保護領域(44)を囲い込む、請求項1から6のいずれか1項に記載の半導体モジュール(10)。
- 前記ハウジング(16)は、前記ハウジング(16)の側壁(18)によって前記台板(12)に対して固定される蓋板(20)を有し、
前記保護壁(42)は、前記蓋板(20)に接続され、前記ハウジング(16)の前記内部空間(22)内へ突出する、請求項1から7のいずれか1項に記載の半導体モジュール(10)。 - 出口開口(40)および/または入口開口(52)は、前記蓋板(20)に設けられる、請求項8に記載の半導体モジュール(10)。
- 半導体チップ(24)、および/または金属被覆部(28)のない前記基板(16)の露出領域(30)は、前記保護領域(44)内に配置される、請求項1から9のいずれか1項に記載の半導体モジュール(10)。
- 前記隙間(48)は、前記端子足部(36)の0.2倍から4倍の厚さを有する、または、
前記隙間(48)は、前記端子足部(36)の0.4倍から2倍の厚さを有する、請求項1から10のいずれか1項に記載の半導体モジュール(10)。 - 2つ以上の端子(34)が前記保護壁(42)によって囲まれる、請求項1から11のいずれか1項に記載の半導体モジュール(10)。
- 前記端子(34)は、前記 ハウジング(16)から突出する前記端部において離れる方向に角度付けされ、前記ハウジング(16)まわりに到達する、請求項1から12のいずれか1項に記載の半導体モジュール(10)。
- 請求項1から13のいずれか1項に記載の半導体モジュール(10)を製造する方法であって、
台板(12)と、前記台板(12)上の基板(14)と、前記台板(12)に取り付けられるハウジング(16)とを有する半導体モジュール(10)を設けるステップと、
前記ハウジング(16)の保護壁(42)によって囲まれる前記基板(14)の端子パッド(38)上に端子(34)の端子足部(36)を配置するステップとを備え、前記保護壁(42)は、前記ハウジング(16)の内部空間(22)を非保護領域(46)および保護領域(44)に分割し、方法はさらに、
前記端子足部(36)上にソノトロード(58)を配置し、前記端子足部(36)を前記基板(14)に対して超音波溶接するステップと、
超音波溶接時に作り出される粒子が前記非保護領域(46)から前記保護領域(44)内へ通過することを防止するように、前記保護壁(42)と前記基板(14)との間の隙間(48)おいて前記保護領域(44)から前記非保護領域(46)内への流体の流れ(60)を作り出すステップとを備える、方法。 - 前記流体の流れ(60)は、流体を前記保護領域(44)内へ吹き込むことによって作り出される、請求項14に記載の方法。
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