JP2015530762A - 積層されたマルチチップ集積回路パッケージ - Google Patents
積層されたマルチチップ集積回路パッケージ Download PDFInfo
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- JP2015530762A JP2015530762A JP2015535885A JP2015535885A JP2015530762A JP 2015530762 A JP2015530762 A JP 2015530762A JP 2015535885 A JP2015535885 A JP 2015535885A JP 2015535885 A JP2015535885 A JP 2015535885A JP 2015530762 A JP2015530762 A JP 2015530762A
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Abstract
Description
反りによる不良から守るように構成される、マルチチップ集積回路(IC)パッケージが提供される。ICパッケージは、基板と、レベル1 ICダイと、複数のレベル2 ICダイとを含み得る。レベル1 ICダイは、基板に電気的に結合された面を有する。複数のレベル2 ICダイは、レベル1 ICダイの上に積層される。複数のレベル2 ICダイは各々、基板に電気的に結合されたアクティブ面を有し得る。複数のレベル2 ICダイは、複数のレベル2 ICダイのアクティブ面が実質的に同じ平面に配置されるように、並んで配置され得る。単一ダイの構成に対して、レベル2 ICダイが分離されており、これによって、ICパッケージの反りによる、割れ、剥離、および/または他の可能性のある不良を防ぐ。
図5は、本開示の一態様による、積層されたマルチチップICパッケージ500の概略的な側面断面図を示す。2レベルのICパッケージ500は、レベル1 ICダイ502(「下側ICダイ」とも本明細書では呼ばれる)および2つのレベル2 ICダイ504a、504bを含み、それらのすべてが、限定はされないがシリコンおよび/またはゲルマニウムのような半導体材料でできていてよい。ICダイ502、504a、504bは、限定はされないが、処理回路、メモリ回路、またはこれらの組合せのような、任意のタイプのICであってよい。一態様では、レベル1 ICダイ502は、実質的に処理回路であるICであり、レベル2ダイ504a、504bは、double data rate type three (DDR3)同期ダイナミックランダムアクセスメモリ(SDRAM)回路のようなメモリ回路である。当然、他の態様では、ダイ502、504a、504bは、他のタイプの処理回路および/またはメモリ回路であり得る。
図17は、一態様による、3レベルの積層されたマルチチップICパッケージ1700の概略的な下面図を示す。パッケージ1700を封入する成形コンパウンドのような、パッケージ1700の様々な部品が、わかりやすくするために省略されている。図17に示されるように、ICパッケージ1700は、レベル1 ICダイ1702、第1のレベル2 ICダイ1704a、第2のレベル2 ICダイ1704b、第1のレベル3 ICダイ1706a、第2のレベル3 ICダイ1706b、第3のレベル3 ICダイ1706c、および第4のレベル3 ICダイ1706dを含む。レベル1 ICダイ1702はレベル2 ICダイ1704a、1704bの下に配置され、レベル2 ICダイ1704a、1704bはレベル3 ICダイ1706a、1706b、1706c、1706dの下に配置される。レベル2 ICダイ1704a、1704bはまた、それらが図17に示されるX−Y平面の向きに平行な同じ平面において並ぶように、配置される。同様に、レベル3 ICダイ1706a、1706b、1706c、1706dはまた、それらがX−Y平面に平行な同じ平面において並ぶように、配置される。
図20および図21は、積層されたマルチチップICパッケージ900の概略的な上面図および下面図をそれぞれ示す。上で説明されたように、パッケージ900は、レベル1 ICダイ1002および4つのレベル2 ICダイ904a、904b、904c、904dを含む。図20はまた、レベル2 ICダイ904a、904b、904c、904dの間の間隔s1およびs2を示す、パッケージ900の拡大部分を示す。具体的には、間隔s1は、第1のレベル2 ICダイ904aと第2のレベル2 ICダイ904bとの間、および、第3のレベル2 ICダイ904cと第4のレベル2 ICダイ904dとの間に存在する。別の間隔s2は、第1のレベル2 ICダイ904aと第3のレベル2 ICダイ904cとの間、および、第2のレベル2 ICダイ904bと第4のレベル4 ICダイ904dとの間に存在する。
102 ICダイ
104 ICダイ
106 成形コンパウンド
108 積層基板
110 アクティブ面
112a はんだバンプ
112b 導電性ピラー
114 アクティブ面
116 はんだバンプ
402 はんだバンプ
403 角
404 はんだバンプ
405 境界
500 マルチチップICパッケージ
502 レベル1 ICダイ
504a レベル2 ICダイ
504b レベル2 ICダイ
506 アクティブ面の側
508 裏側の面
510a アクティブ面の側
510b アクティブ面の側
512a 裏側の面
512b 裏側の面
514 パッケージ基板
516a 導体
516b 導体
517 周縁突出領域
518a 導体
518b 導体
519 周縁突出領域
520 導体
521 端
522 アンダーフィル接着剤
523 端
524 接着剤
526 樹脂成形コンパウンド
802 側
804 側
806 側
808 側
810 周縁突出領域
812 周縁突出領域
814 周縁突出領域
900 ICパッケージ
904a レベル2 ICダイ
904b レベル2 ICダイ
904c レベル2 ICダイ
904d レベル2 ICダイ
910a アクティブ面
910b アクティブ面
910c アクティブ面
910d アクティブ面
912a 裏側の面
912b 裏側の面
912c 裏側の面
912d 裏側の面
924 接着剤
926 樹脂成形コンパウンド
1002 レベル1 ICダイ
1016a 導体
1016b 導体
1018a 導体
1018b 導体
1020a 導体
1020b 導体
1022a 導体
1022b 導体
1030 導体
1106 アクティブ面
1108 裏側の面
1114 基板
1117 周縁突出領域
1119 周縁突出領域
1122 アンダーフィル接着剤
1125 端
1127 端
1221 周縁突出領域
1229 周縁突出領域
1323 周縁突出領域
1331 端
1402 側
1404 側
1406 側
1408 側
1410 周縁突出領域
1412 周縁突出領域
1414 部分
1416 部分
1500 ICパッケージ
1504a レベル2 ICダイ
1504b レベル2 ICダイ
1504c レベル2 ICダイ
1504d レベル2 ICダイ
1512a 裏側の面
1512b 裏側の面
1512c 裏側の面
1512d 裏側の面
1524 接着剤
1526 成形コンパウンド
1602 レベル1 ICダイ
1700 マルチチップICパッケージ
1702 レベル1 ICダイ
1704a 第1のレベル2 ICダイ
1704b 第2のレベル2 ICダイ
1706a 第1のレベル3 ICダイ
1706b 第2のレベル3 ICダイ
1706c 第3のレベル3 ICダイ
1706d 第4のレベル3 ICダイ
1708 アクティブ面の側
1709 裏側の面
1710a アクティブ面
1710b アクティブ面
1711a 裏側の面
1711b 裏側の面
1712a アクティブ面
1712b アクティブ面
1712c アクティブ面
1712d アクティブ面
1714 パッケージ基板
1716 アンダーフィル接着剤
1718 接着剤
1720 接着剤
1722 樹脂成形コンパウンド
1730a 導体
1730b 導体
1732a 導体
1732b 導体
1734 導体
2102 第1の角
2104 第1の側
2106 第2の角
2108 第3の角
2110 第2の側
2500 ICパッケージ
2502 デバイス
2504 デバイス
2506 デバイス
Claims (30)
- 基板と、
前記基板に電気的に結合された面を有するレベル1 ICダイと、
前記レベル1 ICダイの上に積層された複数のレベル2 ICダイとを含み、前記複数のレベル2 ICダイが前記基板に電気的に結合されたアクティブ面を各々有し、前記複数のレベル2 ICダイの前記アクティブ面が実質的に同じ平面に配置されるように、前記複数のレベル2 ICダイが並んで配置される、マルチチップ集積回路(IC)パッケージ。 - 前記複数のレベル2 ICダイを前記基板に電気的に結合する複数の導体をさらに含み、前記複数の導体が、前記複数のレベル2 ICダイの各々の、少なくとも1つのアクティブ面の周縁突出領域に配置される、請求項1に記載のICパッケージ。
- 前記複数の導体が、はんだバンプ、はんだボール、ピラー、ピン、スタッドバンプ、および/またはスタッドバンプの積層の少なくとも1つである、請求項2に記載のICパッケージ。
- 前記複数のレベル2 ICダイが、2つのレベル2 ICダイを含む、請求項1に記載のICパッケージ。
- 前記2つのレベル2 ICダイが、互いに異なる長さおよび/または幅の少なくとも1つを有する、請求項4に記載のICパッケージ。
- 前記2つのレベル2 ICダイのサイズが実質的に同一である、請求項4に記載のICパッケージ。
- 前記2つのレベル2 ICダイの各々が、前記2つのレベル2 ICダイの各々を前記基板に電気的に結合する複数の導体を含む、アクティブ面の周縁突出領域を有する3つの側を含む、請求項4に記載のICパッケージ。
- 前記2つのレベル2 ICダイの各々が、その一部分が前記レベル1 ICダイの裏側の面のすぐ上に配置され前記複数の導体を欠いている、少なくとも1つの側を含む、請求項7に記載のICパッケージ。
- 前記複数のレベル2 ICダイが、4つのレベル2 ICダイを含む、請求項1に記載のICパッケージ。
- 前記4つのレベル2 ICダイの各々が、前記4つのレベル2 ICダイの各々を前記基板に電気的に結合する複数の導体を含む、アクティブ面の周縁突出領域を有する2つの側を含む、請求項9に記載のICパッケージ。
- 前記4つのレベル2 ICダイの各々が、その各々の一部分が前記レベル1 ICダイの裏側の面のすぐ上に配置され前記複数の導体を欠いている、少なくとも2つの側を含む、請求項10に記載のICパッケージ。
- 前記レベル2 ICダイの上に積層された複数のレベル3 ICダイをさらに含み、前記複数のレベル3 ICダイが前記基板に電気的に結合されたアクティブ面を各々有し、前記複数のレベル3 ICダイの前記アクティブ面が別の実質的に同じ平面に配置されるように、前記複数のレベル3 ICダイが並んで配置される、請求項1に記載のICパッケージ。
- 前記レベル1 ICダイおよび前記複数のレベル2 ICダイが、前記基板の中の電気的な相互接続および/またはシリコン貫通ビアの少なくとも1つによって、互いに電気的に結合される、請求項1に記載のICパッケージ。
- 前記複数の2レベルICダイの2つのレベル2 ICダイの間の少なくとも1つの間隔により、前記2つのレベル2 ICダイが、前記基板の反りに応答して、互いに対して湾曲または回転し、前記基板に電気的に結合されたままであることが可能になる、請求項1に記載のICパッケージ。
- 前記複数のレベル2 ICダイの2つのレベル2 ICダイの間の少なくとも1つの間隔が、第1のレベル2 ICダイの第1の角または第1の側を、凹状の基板の反りに応答して前記第1のレベル2 ICダイの第2の角の下へ動かし、さらに、前記第1のレベル2 ICダイの前記第1の角または前記第1の側を、凸状の基板の反りに応答して前記第1のレベル2 ICダイの前記第2の角の上へ動かす、請求項1に記載のICパッケージ。
- 音楽プレーヤ、ビデオプレーヤ、娯楽ユニット、ナビゲーションデバイス、通信デバイス、携帯電話、スマートフォン、携帯情報端末、固定位置端末、タブレットコンピュータ、および/またはラップトップコンピュータのうちの少なくとも1つに組み込まれる、請求項1に記載のICパッケージ。
- マルチチップ集積回路(IC)パッケージを製造するための方法であって、
基板を提供するステップと、
レベル1 ICダイの面を前記基板に電気的に結合するステップと、
複数のレベル2 ICダイを前記レベル1 ICダイの上に積層するステップであって、前記複数のレベル2 ICダイが、前記基板に電気的に結合されたアクティブ面を各々有する、ステップと、
前記複数のレベル2 ICダイを、前記複数のレベル2 ICダイの前記アクティブ面が実質的に同じ平面に配置されるように、並べて配置するステップとを含む、方法。 - 前記複数のレベル2 ICダイを、複数の導体を有する前記基板に電気的に結合するステップをさらに含み、前記複数の導体が、前記複数のレベル2 ICダイの各々の、少なくとも1つのアクティブ面の周縁突出領域に配置される、請求項17に記載の方法。
- 前記複数のレベル2 ICダイが、2つのレベル2 ICダイを含む、請求項17に記載の方法。
- 前記2つのレベル2 ICダイの各々が、前記2つのレベル2 ICダイの各々を前記基板に電気的に結合する複数の導体を含む、アクティブ面の周縁突出領域を有する3つの側を含む、請求項19に記載の方法。
- 前記2つのレベル2 ICダイの各々が、その一部分が前記レベル1 ICダイの裏側の面のすぐ上に配置され前記複数の導体を欠いている、少なくとも1つの側を含む、請求項20に記載の方法。
- 前記複数のレベル2 ICダイが、4つのレベル2 ICダイを含む、請求項17に記載の方法。
- 前記4つのレベル2 ICダイの各々が、前記4つのレベル2 ICダイの各々を前記基板に電気的に結合する複数の導体を含む、アクティブ面の周縁突出領域を有する2つの側を含む、請求項22に記載の方法。
- 前記4つのレベル2 ICダイの各々が、その各々の一部分が前記レベル1 ICダイの裏側の面のすぐ上に配置され前記複数の導体を欠いている、少なくとも2つの側を含む、請求項23に記載の方法。
- 複数のレベル3 ICダイを前記レベル2 ICダイの上に積層するステップであって、前記複数のレベル3 ICダイが、前記基板に電気的に結合されたアクティブ面を各々有する、ステップと、
前記複数のレベル3 ICダイを、前記複数のレベル3 ICダイの前記アクティブ面が実質的に別の同じ平面に配置されるように、並べて配置するステップとをさらに含む、請求項17に記載の方法。 - 前記複数のレベル2 ICダイの2つのレベル2 ICダイが、前記基板の反りに応答して、互いに対して湾曲または回転し、前記基板に電気的に結合されたままであることを可能にする、前記2つのレベル2 ICダイの間の少なくとも1つの間隔を設けるステップをさらに含む、請求項17に記載の方法。
- 第1のレベル2 ICダイの第1の角または第1の側を、凹状の基板の反りに応答して前記第1のレベル2 ICダイの第2の角の下へ動かし、さらに、前記第1のレベル2 ICダイの前記第1の角または前記第1の側を、凸状の基板の反りに応答して前記第1のレベル2 ICダイの前記第2の角の上へ動かす、前記複数のレベル2 ICダイの2つのレベル2 ICダイの間の少なくとも1つの間隔を設けるステップをさらに含む、請求項17に記載の方法。
- 基板と、
レベル1 ICダイの面を前記基板に電気的に結合するための手段と、
複数のレベル2 ICダイを前記レベル1 ICダイの上に積層するための手段であって、前記複数のレベル2 ICダイが、前記基板に電気的に結合されたアクティブ面を各々有する、手段と、
前記複数のレベル2 ICダイを、前記複数のレベル2 ICダイの前記アクティブ面が実質的に同じ平面に配置されるように、並べて配置するための手段とを含む、マルチチップ集積回路(IC)パッケージ。 - 前記複数のレベル2 ICダイを、複数の導体を有する前記基板に電気的に結合するための手段をさらに含み、前記複数の導体が、前記複数のレベル2 ICダイの各々の、少なくとも1つのアクティブ面の周縁突出領域に配置される、請求項28に記載のマルチチップ集積回路パッケージ。
- 複数のレベル3 ICダイを前記レベル2 ICダイの上に積層するための手段であって、前記複数のレベル3 ICダイが、前記基板に電気的に結合されたアクティブ面を各々有する、手段と、
前記複数のレベル3 ICダイを、前記複数のレベル3 ICダイの前記アクティブ面が実質的に別の同じ平面に配置されるように、並べて配置するための手段とをさらに含む、請求項28に記載のマルチチップ集積回路(IC)パッケージ。
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US13/647,375 US8963339B2 (en) | 2012-10-08 | 2012-10-08 | Stacked multi-chip integrated circuit package |
PCT/US2013/063811 WO2014058836A1 (en) | 2012-10-08 | 2013-10-08 | Stacked multi-chip integrated circuit package |
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Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |