JP2015520297A - 原子層堆積カートリッジを用いた粉末粒子コーティング - Google Patents
原子層堆積カートリッジを用いた粉末粒子コーティング Download PDFInfo
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4417—Methods specially adapted for coating powder
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/442—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using fluidised bed process
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45555—Atomic layer deposition [ALD] applied in non-semiconductor technology
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Abstract
Description
Claims (19)
- クイックカップリング法によって原子層堆積(ALD)カートリッジをALD反応器の受け器に受け入れることであって、前記ALDカートリッジはALD反応室として役立つように構成されることと、
逐次自己飽和表面反応によって前記ALDカートリッジ内の粒状材料の表面を処理することと、
を含む方法。 - 前記クイックカップリング法が、ロック部材が前記ALDカートリッジをその正しい位置にロックするまで前記ALDカートリッジはねじられるねじり方法、および前記ALDカートリッジをその正しい位置にロックするフォームロッキング方法から成る群から選択される請求項1に記載の方法。
- 前記粒状材料内での凝集物の形成を妨げるために、振動ガスを前記ALDカートリッジの中に供給することを含む請求項1または2に記載の方法。
- 振動不活性ガスを前記ALDカートリッジの中に供給するために、前駆体供給ラインから分離した流れチャネルを使用することを含む請求項1から3のいずれか一項に記載の方法。
- 反応残渣を少なくとも一つの出口導管を通して排出することを含み、前記少なくとも一つの出口導管は前記ALDカートリッジ本体内に配置される請求項1から4のいずれか一項に記載の方法。
- 前記ALDカートリッジ本体内に配置した装填チャネルを通して前記粒状材料を装填することを含む請求項1から5のいずれか一項に記載の方法。
- 各々の上部に配置した複数の仕切り内で粒状材料を処理することを含み、各仕切りはフィルター板によって隣接する仕切りから分離している請求項1から6のいずれか一項に記載の方法。
- クイックカップリング法によって原子層堆積(ALD)カートリッジをALD反応室の中に受け入れるように構成される受け器であって、前記ALDカートリッジはALD反応室として役立つように構成される受け器と、
逐次自己飽和表面反応によって前記ALDカートリッジ内で粒状材料の表面を処理するために、前駆体蒸気を前記ALDカートリッジの中に供給するように構成される供給ラインと、
を備えるALD反応器。 - 前記受け器が、ねじり方法によって前記ALDカートリッジを受け入れるように構成され、そこにおいて、ロック部材が前記ALDカートリッジをその正しい位置にロックするまで、前記ALDカートリッジはねじられる請求項8に記載のALD反応器。
- 前記受け器が、前記ALDカートリッジをその正しい位置にロックするフォームロッキング方法によって前記ALDカートリッジを受け入れるように構成される請求項8に記載のALD反応器。
- 前記ALDが、前記粒状材料内での凝集物の形成を妨げるために、振動ガスを前記ALDカートリッジの中に供給するように構成した流れチャネルに振動源を備える請求項8から10のいずれか一項に記載のALD反応器。
- 前記ALDカートリッジ本体内に配置した出口導管から反応残渣を受け入れるように構成したALD反応器本体内に出口導管を備える請求項8から11のいずれか一項に記載のALD反応器。
- 前記ALDカートリッジ本体内に配置した装填チャネルに粒状材料を送るように構成した前記ALD反応器本体内に装填チャネルを備える請求項8から12のいずれか一項に記載のALD反応器。
- 前記ALDカートリッジの入口フィルターの前にガス拡散空間を形成するように構成される請求項8から13のいずれか一項に記載のALD反応器。
- ALD反応室として役立つように構成されて、クイックカップリング法によって、ALD反応器のALD反応器本体に取り付けるように構成したクイックカップリング機構を備えた着脱可能な原子層堆積(ALD)カートリッジであって、前記クイックカップリング法によって前記ALD反応器本体に取り付けられるならば、逐次自己飽和表面反応によって該ALDカートリッジ内で粒状材料の表面を処理するように構成されるALDカートリッジ。
- 反応残渣を前記ALD反応器本体を通して排出するように構成した前記ALDカートリッジ本体内に出口導管を備える請求項15に記載の着脱可能なALDカートリッジ。
- 複数の粒状材料コーティング仕切りをその間に形成するために、各々の上部に複数のフィルター板を備える請求項15または16に記載の着脱可能なALDカートリッジ。
- ガス拡散空間を入口フィルターの下に備える請求項15から17のいずれか一項に記載の着脱可能なALDカートリッジ。
- 請求項8〜14のいずれか一項に記載のALD反応器および請求項15から17のいずれか一項に記載のALDカートリッジを備えた装置。
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PCT/FI2012/050462 WO2013171360A1 (en) | 2012-05-14 | 2012-05-14 | Powder particle coating using atomic layer deposition cartridge |
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US (1) | US20150125599A1 (ja) |
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KR (1) | KR20150013296A (ja) |
CN (1) | CN104284998A (ja) |
IN (1) | IN2014DN09214A (ja) |
RU (1) | RU2600042C2 (ja) |
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JP2020506142A (ja) * | 2017-01-23 | 2020-02-27 | ビーエーエスエフ ソシエタス・ヨーロピアBasf Se | カソード材料の製造方法、及び当該方法を行うことに適する反応器 |
JP6787621B1 (ja) * | 2019-05-24 | 2020-11-18 | 株式会社クリエイティブコーティングス | 粉体の成膜方法、粉体成膜用容器及びald装置 |
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Also Published As
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WO2013171360A1 (en) | 2013-11-21 |
TW201346057A (zh) | 2013-11-16 |
SG11201406817XA (en) | 2014-12-30 |
EP2850222A1 (en) | 2015-03-25 |
EP2850222A4 (en) | 2016-01-20 |
RU2600042C2 (ru) | 2016-10-20 |
US20150125599A1 (en) | 2015-05-07 |
RU2014147671A (ru) | 2016-07-10 |
CN104284998A (zh) | 2015-01-14 |
JP5963948B2 (ja) | 2016-08-03 |
KR20150013296A (ko) | 2015-02-04 |
IN2014DN09214A (ja) | 2015-07-10 |
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