JP2015519472A5 - - Google Patents
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- Publication number
- JP2015519472A5 JP2015519472A5 JP2015504579A JP2015504579A JP2015519472A5 JP 2015519472 A5 JP2015519472 A5 JP 2015519472A5 JP 2015504579 A JP2015504579 A JP 2015504579A JP 2015504579 A JP2015504579 A JP 2015504579A JP 2015519472 A5 JP2015519472 A5 JP 2015519472A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- chamber
- coating
- deposition chamber
- energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261621185P | 2012-04-06 | 2012-04-06 | |
| US61/621,185 | 2012-04-06 | ||
| PCT/US2013/030948 WO2013151703A1 (en) | 2012-04-06 | 2013-03-13 | Edge ring for a deposition chamber |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015519472A JP2015519472A (ja) | 2015-07-09 |
| JP2015519472A5 true JP2015519472A5 (enExample) | 2016-05-12 |
| JP6141405B2 JP6141405B2 (ja) | 2017-06-07 |
Family
ID=49291383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015504579A Active JP6141405B2 (ja) | 2012-04-06 | 2013-03-13 | 堆積チャンバ用のエッジリング |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9376752B2 (enExample) |
| JP (1) | JP6141405B2 (enExample) |
| KR (1) | KR102129844B1 (enExample) |
| CN (1) | CN104205295B (enExample) |
| DE (1) | DE112013001929B4 (enExample) |
| TW (1) | TWI568875B (enExample) |
| WO (1) | WO2013151703A1 (enExample) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9905443B2 (en) * | 2011-03-11 | 2018-02-27 | Applied Materials, Inc. | Reflective deposition rings and substrate processing chambers incorporating same |
| CN106463445B (zh) | 2014-05-21 | 2020-09-04 | 应用材料公司 | 热处理基座 |
| KR102401501B1 (ko) * | 2014-12-19 | 2022-05-23 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 프로세싱 챔버를 위한 에지 링 |
| US10658222B2 (en) * | 2015-01-16 | 2020-05-19 | Lam Research Corporation | Moveable edge coupling ring for edge process control during semiconductor wafer processing |
| USD810705S1 (en) * | 2016-04-01 | 2018-02-20 | Veeco Instruments Inc. | Self-centering wafer carrier for chemical vapor deposition |
| US9932668B2 (en) | 2015-10-26 | 2018-04-03 | Tango Systems Inc. | Physical vapor deposition system using backside gas cooling of workpieces |
| JP6688385B2 (ja) * | 2016-07-06 | 2020-04-28 | 株式会社アルバック | 成膜装置、プラテンリング |
| KR102641441B1 (ko) | 2016-09-28 | 2024-02-29 | 삼성전자주식회사 | 링 어셈블리 및 이를 포함하는 척 어셈블리 |
| USD839224S1 (en) | 2016-12-12 | 2019-01-29 | Ebara Corporation | Elastic membrane for semiconductor wafer polishing |
| KR102806341B1 (ko) | 2017-01-04 | 2025-05-12 | 삼성전자주식회사 | 포커스 링 및 이를 포함하는 플라즈마 처리 장치 |
| TWI756496B (zh) | 2017-11-27 | 2022-03-01 | 台灣積體電路製造股份有限公司 | 加熱台以及具有加熱台的設備 |
| JP7078745B2 (ja) * | 2018-10-30 | 2022-05-31 | 株式会社アルバック | 真空処理装置 |
| US12191127B2 (en) * | 2018-10-31 | 2025-01-07 | Taiwan Semiconductor Manufacturing Company Ltd. | Apparatus for physical vapor deposition and method for forming a layer |
| KR102406942B1 (ko) * | 2019-09-16 | 2022-06-10 | 에이피시스템 주식회사 | 엣지 링 및 이를 포함하는 열처리 장치 |
| US12692596B2 (en) | 2020-01-31 | 2026-07-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Cover ring and ground shield for physical vapor deposition chamber |
| US11380575B2 (en) * | 2020-07-27 | 2022-07-05 | Applied Materials, Inc. | Film thickness uniformity improvement using edge ring and bias electrode geometry |
| CN112501577B (zh) * | 2020-11-30 | 2022-07-15 | 宁波江丰电子材料股份有限公司 | 一种晶圆固定环及其制备方法与应用 |
| US11492699B2 (en) * | 2021-02-17 | 2022-11-08 | Applied Materials, Inc. | Substrate temperature non-uniformity reduction over target life using spacing compensation |
| USD1071886S1 (en) * | 2022-01-20 | 2025-04-22 | Applied Materials, Inc. | Substrate support for a substrate processing chamber |
| JP1741176S (ja) * | 2022-10-20 | 2023-04-06 | サセプタ用カバーベース | |
| JP1741172S (ja) * | 2022-10-20 | 2023-04-06 | サセプタカバー | |
| JP1745925S (ja) * | 2022-10-20 | 2023-06-08 | サセプタカバー | |
| JP1745873S (ja) * | 2022-10-20 | 2023-06-08 | サセプタ | |
| JP1741174S (ja) * | 2022-10-20 | 2023-04-06 | サセプタ | |
| JP1746407S (ja) * | 2023-01-11 | 2023-06-15 | サセプタ | |
| JP1746408S (ja) * | 2023-01-11 | 2023-06-15 | サセプタ | |
| JP1746405S (ja) * | 2023-01-11 | 2023-06-15 | サセプタカバー | |
| JP1746403S (ja) * | 2023-01-11 | 2023-06-15 | サセプタ | |
| JP1746406S (ja) * | 2023-01-11 | 2023-06-15 | サセプタユニット | |
| JP1746410S (ja) * | 2023-01-11 | 2023-06-15 | サセプタ |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6395363B1 (en) * | 1996-11-05 | 2002-05-28 | Applied Materials, Inc. | Sloped substrate support |
| JP4003899B2 (ja) * | 1997-11-10 | 2007-11-07 | コバレントマテリアル株式会社 | 回転式気相薄膜成長装置 |
| US6482301B1 (en) | 1998-06-04 | 2002-11-19 | Seagate Technology, Inc. | Target shields for improved magnetic properties of a recording medium |
| US6344105B1 (en) | 1999-06-30 | 2002-02-05 | Lam Research Corporation | Techniques for improving etch rate uniformity |
| KR100315088B1 (ko) * | 1999-09-29 | 2001-11-24 | 윤종용 | 포커스 링을 갖는 반도체 웨이퍼 제조 장치 |
| JP4470274B2 (ja) * | 2000-04-26 | 2010-06-02 | 東京エレクトロン株式会社 | 熱処理装置 |
| JP2002134429A (ja) * | 2000-10-12 | 2002-05-10 | Applied Materials Inc | 基板処理装置用のベアリングカバー、基板処理装置および熱処理方法 |
| US6634882B2 (en) | 2000-12-22 | 2003-10-21 | Asm America, Inc. | Susceptor pocket profile to improve process performance |
| US20030015421A1 (en) | 2001-07-20 | 2003-01-23 | Applied Materials, Inc. | Collimated sputtering of cobalt |
| US6620736B2 (en) * | 2001-07-24 | 2003-09-16 | Tokyo Electron Limited | Electrostatic control of deposition of, and etching by, ionized materials in semiconductor processing |
| US20050196971A1 (en) * | 2004-03-05 | 2005-09-08 | Applied Materials, Inc. | Hardware development to reduce bevel deposition |
| US7670436B2 (en) * | 2004-11-03 | 2010-03-02 | Applied Materials, Inc. | Support ring assembly |
| US7670446B2 (en) | 2004-11-30 | 2010-03-02 | The United States Of America As Represented By The Secretary Of The Navy | Wet processing and loading of percussion primers based on metastable nanoenergetic composites |
| KR100733269B1 (ko) | 2005-08-18 | 2007-06-28 | 피에스케이 주식회사 | 반도체 식각 장비의 척 조립체 |
| KR20070025092A (ko) | 2005-08-31 | 2007-03-08 | 삼성전자주식회사 | 웨이퍼 리프트 유닛의 리프트핑거 |
| US7520969B2 (en) * | 2006-03-07 | 2009-04-21 | Applied Materials, Inc. | Notched deposition ring |
| US20090050272A1 (en) * | 2007-08-24 | 2009-02-26 | Applied Materials, Inc. | Deposition ring and cover ring to extend process components life and performance for process chambers |
| JP5548841B2 (ja) | 2008-01-16 | 2014-07-16 | チャーム エンジニアリング シーオー エルティーディー | 基板処理装置 |
| KR101571558B1 (ko) * | 2008-04-16 | 2015-11-24 | 어플라이드 머티어리얼스, 인코포레이티드 | 웨이퍼 프로세싱 증착 차폐 컴포넌트들 |
| US20090308739A1 (en) | 2008-06-17 | 2009-12-17 | Applied Materials, Inc. | Wafer processing deposition shielding components |
| JP4709945B2 (ja) * | 2009-04-13 | 2011-06-29 | パナソニック株式会社 | プラズマ処理装置及びプラズマ処理方法 |
| USD665491S1 (en) | 2012-01-25 | 2012-08-14 | Applied Materials, Inc. | Deposition chamber cover ring |
| USD665071S1 (en) | 2012-01-25 | 2012-08-07 | Applied Materials, Inc. | Deposition chamber liner |
-
2013
- 2013-03-07 US US13/789,222 patent/US9376752B2/en active Active
- 2013-03-13 WO PCT/US2013/030948 patent/WO2013151703A1/en not_active Ceased
- 2013-03-13 JP JP2015504579A patent/JP6141405B2/ja active Active
- 2013-03-13 KR KR1020147029637A patent/KR102129844B1/ko active Active
- 2013-03-13 CN CN201380017145.6A patent/CN104205295B/zh active Active
- 2013-03-13 DE DE112013001929.9T patent/DE112013001929B4/de active Active
- 2013-04-02 TW TW102111924A patent/TWI568875B/zh active
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