JP2015517020A5 - - Google Patents

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Publication number
JP2015517020A5
JP2015517020A5 JP2014555733A JP2014555733A JP2015517020A5 JP 2015517020 A5 JP2015517020 A5 JP 2015517020A5 JP 2014555733 A JP2014555733 A JP 2014555733A JP 2014555733 A JP2014555733 A JP 2014555733A JP 2015517020 A5 JP2015517020 A5 JP 2015517020A5
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JP
Japan
Prior art keywords
mci
substrate
particle beam
charge
kinetic energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014555733A
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English (en)
Japanese (ja)
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JP2015517020A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2013/024269 external-priority patent/WO2013116595A1/en
Publication of JP2015517020A publication Critical patent/JP2015517020A/ja
Publication of JP2015517020A5 publication Critical patent/JP2015517020A5/ja
Pending legal-status Critical Current

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JP2014555733A 2012-02-03 2013-02-01 層を形成する方法 Pending JP2015517020A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261594547P 2012-02-03 2012-02-03
US61/594,547 2012-02-03
PCT/US2013/024269 WO2013116595A1 (en) 2012-02-03 2013-02-01 Methods of forming layers

Publications (2)

Publication Number Publication Date
JP2015517020A JP2015517020A (ja) 2015-06-18
JP2015517020A5 true JP2015517020A5 (enExample) 2015-11-05

Family

ID=47790495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014555733A Pending JP2015517020A (ja) 2012-02-03 2013-02-01 層を形成する方法

Country Status (8)

Country Link
US (1) US9275833B2 (enExample)
EP (1) EP2810298A1 (enExample)
JP (1) JP2015517020A (enExample)
KR (1) KR101701731B1 (enExample)
CN (1) CN104303265B (enExample)
MY (1) MY174290A (enExample)
TW (1) TWI516621B (enExample)
WO (1) WO2013116595A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130164454A1 (en) * 2011-04-07 2013-06-27 Seagate Technology Llc Methods of forming layers
WO2013116595A1 (en) 2012-02-03 2013-08-08 Seagate Technology Llc Methods of forming layers
US9280989B2 (en) 2013-06-21 2016-03-08 Seagate Technology Llc Magnetic devices including near field transducer

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