ATE296482T1 - Hochtetraedrische amorphe kohlenstofffilme sowie verfahren und ionenstrahlquelle zur herstellung derselben - Google Patents
Hochtetraedrische amorphe kohlenstofffilme sowie verfahren und ionenstrahlquelle zur herstellung derselbenInfo
- Publication number
- ATE296482T1 ATE296482T1 AT97927892T AT97927892T ATE296482T1 AT E296482 T1 ATE296482 T1 AT E296482T1 AT 97927892 T AT97927892 T AT 97927892T AT 97927892 T AT97927892 T AT 97927892T AT E296482 T1 ATE296482 T1 AT E296482T1
- Authority
- AT
- Austria
- Prior art keywords
- carbon
- diamond
- ion beam
- amorphous carbon
- producing
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/72—Protective coatings, e.g. anti-static or antifriction
- G11B5/727—Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8408—Processes or apparatus specially adapted for manufacturing record carriers protecting the magnetic layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
- H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/28—Other inorganic materials
- C03C2217/282—Carbides, silicides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/151—Deposition methods from the vapour phase by vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Combustion & Propulsion (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Organic Chemistry (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
- Carbon And Carbon Compounds (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Photoreceptors In Electrophotography (AREA)
- Thin Magnetic Films (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1879396P | 1996-05-31 | 1996-05-31 | |
US1874696P | 1996-05-31 | 1996-05-31 | |
US76133896A | 1996-12-10 | 1996-12-10 | |
US08/761,336 US5858477A (en) | 1996-12-10 | 1996-12-10 | Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon |
PCT/US1997/009393 WO1997045855A1 (en) | 1996-05-31 | 1997-05-29 | Highly tetrahedral amorphous carbon films and methods for their production |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE296482T1 true ATE296482T1 (de) | 2005-06-15 |
Family
ID=27486777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT97927892T ATE296482T1 (de) | 1996-05-31 | 1997-05-29 | Hochtetraedrische amorphe kohlenstofffilme sowie verfahren und ionenstrahlquelle zur herstellung derselben |
Country Status (6)
Country | Link |
---|---|
EP (2) | EP0909445A1 (de) |
JP (6) | JP2000512053A (de) |
AT (1) | ATE296482T1 (de) |
AU (2) | AU3224297A (de) |
DE (1) | DE69733350T2 (de) |
WO (2) | WO1997045834A1 (de) |
Families Citing this family (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AUPO613797A0 (en) * | 1997-04-09 | 1997-05-08 | University Of Sydney, The | Digital information storage |
US6086730A (en) * | 1999-04-22 | 2000-07-11 | Komag, Incorporated | Method of sputtering a carbon protective film on a magnetic disk with high sp3 content |
US6338901B1 (en) * | 1999-05-03 | 2002-01-15 | Guardian Industries Corporation | Hydrophobic coating including DLC on substrate |
US6303225B1 (en) * | 2000-05-24 | 2001-10-16 | Guardian Industries Corporation | Hydrophilic coating including DLC on substrate |
US6261693B1 (en) * | 1999-05-03 | 2001-07-17 | Guardian Industries Corporation | Highly tetrahedral amorphous carbon coating on glass |
US6565719B1 (en) * | 2000-06-27 | 2003-05-20 | Komag, Inc. | Magnetic disk comprising a first carbon overcoat having a high SP3 content and a second carbon overcoat having a low SP3 content |
US6602371B2 (en) | 2001-02-27 | 2003-08-05 | Guardian Industries Corp. | Method of making a curved vehicle windshield |
US6872909B2 (en) * | 2003-04-16 | 2005-03-29 | Applied Science And Technology, Inc. | Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel |
JP2006036611A (ja) * | 2004-07-29 | 2006-02-09 | Sumitomo Electric Ind Ltd | 水素含有炭素膜 |
DE102004041235A1 (de) * | 2004-08-26 | 2006-03-02 | Ina-Schaeffler Kg | Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben |
GB2417490A (en) * | 2004-08-27 | 2006-03-01 | Nanofilm Technologies Int | Tetrahedral amorphous carbon coating with pre-determined resistivity |
US8038850B2 (en) * | 2006-06-23 | 2011-10-18 | Qimonda Ag | Sputter deposition method for forming integrated circuit |
KR101113145B1 (ko) | 2007-04-05 | 2012-03-13 | 후지쯔 세미컨덕터 가부시키가이샤 | 표면 형상 센서와 그 제조 방법 |
US7961427B2 (en) * | 2007-05-22 | 2011-06-14 | Galleon International Corporation | High performance computer hard disk drive with a carbon overcoat and method of improving hard disk performance |
US8427925B2 (en) | 2010-02-23 | 2013-04-23 | Seagate Technology Llc | HAMR NFT materials with improved thermal stability |
US9224416B2 (en) | 2012-04-24 | 2015-12-29 | Seagate Technology Llc | Near field transducers including nitride materials |
US9251837B2 (en) | 2012-04-25 | 2016-02-02 | Seagate Technology Llc | HAMR NFT materials with improved thermal stability |
JP5679423B2 (ja) * | 2010-11-02 | 2015-03-04 | 富士電機株式会社 | Dlc薄膜製造方法および装置 |
JP2013037731A (ja) | 2011-08-04 | 2013-02-21 | Fuji Electric Co Ltd | 記録媒体 |
JP2015517020A (ja) | 2012-02-03 | 2015-06-18 | シーゲイト テクノロジー エルエルシー | 層を形成する方法 |
WO2014120233A1 (en) * | 2013-02-01 | 2014-08-07 | Seagate Technology Llc | Methods of forming layers |
US8830800B1 (en) | 2013-06-21 | 2014-09-09 | Seagate Technology Llc | Magnetic devices including film structures |
US9280989B2 (en) | 2013-06-21 | 2016-03-08 | Seagate Technology Llc | Magnetic devices including near field transducer |
US20140376351A1 (en) | 2013-06-24 | 2014-12-25 | Seagate Technology Llc | Materials for near field transducers and near field transducers containing same |
US8976634B2 (en) | 2013-06-24 | 2015-03-10 | Seagate Technology Llc | Devices including at least one intermixing layer |
US9245573B2 (en) | 2013-06-24 | 2016-01-26 | Seagate Technology Llc | Methods of forming materials for at least a portion of a NFT and NFTs formed using the same |
US9058824B2 (en) | 2013-06-24 | 2015-06-16 | Seagate Technology Llc | Devices including a gas barrier layer |
CN103342573B (zh) * | 2013-07-10 | 2014-07-02 | 航天材料及工艺研究所 | 一种金刚石薄膜增强碳/碳复合材料热导率的方法 |
KR102111019B1 (ko) * | 2013-07-12 | 2020-06-09 | 삼성디스플레이 주식회사 | 기상 증착 장치, 이를 이용한 증착 방법 및 유기 발광 표시 장치 제조 방법 |
JP5627148B1 (ja) * | 2013-07-24 | 2014-11-19 | 株式会社リケン | ピストンリング及びその製造方法 |
JP6186500B2 (ja) * | 2013-11-14 | 2017-08-23 | フジ エレクトリック (マレーシア) エスディーエヌ ビーエイチディー | カーボン系保護膜の製造方法 |
US9570098B2 (en) | 2013-12-06 | 2017-02-14 | Seagate Technology Llc | Methods of forming near field transducers and near field transducers formed thereby |
US9697856B2 (en) | 2013-12-06 | 2017-07-04 | Seagate Techology LLC | Methods of forming near field transducers and near field transducers formed thereby |
US9305572B2 (en) | 2014-05-01 | 2016-04-05 | Seagate Technology Llc | Methods of forming portions of near field transducers (NFTS) and articles formed thereby |
US9552833B2 (en) | 2014-11-11 | 2017-01-24 | Seagate Technology Llc | Devices including a multilayer gas barrier layer |
US9822444B2 (en) | 2014-11-11 | 2017-11-21 | Seagate Technology Llc | Near-field transducer having secondary atom higher concentration at bottom of the peg |
US9620150B2 (en) | 2014-11-11 | 2017-04-11 | Seagate Technology Llc | Devices including an amorphous gas barrier layer |
US10510364B2 (en) | 2014-11-12 | 2019-12-17 | Seagate Technology Llc | Devices including a near field transducer (NFT) with nanoparticles |
US20160275972A1 (en) | 2015-03-22 | 2016-09-22 | Seagate Technology Llc | Devices including metal layer |
WO2016191707A1 (en) | 2015-05-28 | 2016-12-01 | Seagate Technology Llc | Multipiece near field transducers (nfts) |
WO2016191666A1 (en) | 2015-05-28 | 2016-12-01 | Seagate Technology Llc | Near field transducers (nfts) including barrier layer and methods of forming |
US9852748B1 (en) | 2015-12-08 | 2017-12-26 | Seagate Technology Llc | Devices including a NFT having at least one amorphous alloy layer |
KR101701440B1 (ko) * | 2016-06-07 | 2017-02-01 | (주)디쉬뱅크 | 플라즈마 하이브리드 코팅장치를 이용한 식기류 제조방법 |
US9899193B1 (en) * | 2016-11-02 | 2018-02-20 | Varian Semiconductor Equipment Associates, Inc. | RF ion source with dynamic volume control |
JP6809610B2 (ja) * | 2017-07-10 | 2021-01-06 | 日本製鉄株式会社 | 軌道部材、軸受け及び装置 |
EP3921860A2 (de) * | 2019-02-06 | 2021-12-15 | Evatec AG | Verfahren zur erzeugung von ionen und vorrichtung |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1550853A (en) * | 1975-10-06 | 1979-08-22 | Hitachi Ltd | Apparatus and process for plasma treatment |
DE3708716C2 (de) * | 1987-03-18 | 1993-11-04 | Hans Prof Dr Rer Nat Oechsner | Hochfrequenz-ionenquelle |
DE3708717A1 (de) * | 1987-03-18 | 1988-09-29 | Hans Prof Dr Rer Nat Oechsner | Verfahren und vorrichtung zur bearbeitung von festkoerperoberflaechen durch teilchenbeschuss |
US4822466A (en) * | 1987-06-25 | 1989-04-18 | University Of Houston - University Park | Chemically bonded diamond films and method for producing same |
JPH02168540A (ja) * | 1988-12-20 | 1990-06-28 | Mitsubishi Electric Corp | プラズマ処理装置 |
US5091049A (en) * | 1989-06-13 | 1992-02-25 | Plasma & Materials Technologies, Inc. | High density plasma deposition and etching apparatus |
US5352493A (en) * | 1991-05-03 | 1994-10-04 | Veniamin Dorfman | Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films |
DE69226253T2 (de) * | 1992-01-24 | 1998-12-17 | Applied Materials, Inc., Santa Clara, Calif. | Plasmaätzverfahren und Reaktor zur Plasmabearbeitung |
JPH06349054A (ja) * | 1993-06-08 | 1994-12-22 | Fuji Electric Co Ltd | 磁気記録媒体およびその製造方法 |
-
1997
- 1997-05-29 EP EP97928753A patent/EP0909445A1/de not_active Withdrawn
- 1997-05-29 AU AU32242/97A patent/AU3224297A/en not_active Abandoned
- 1997-05-29 DE DE69733350T patent/DE69733350T2/de not_active Expired - Lifetime
- 1997-05-29 JP JP09543012A patent/JP2000512053A/ja not_active Withdrawn
- 1997-05-29 WO PCT/US1997/009375 patent/WO1997045834A1/en not_active Application Discontinuation
- 1997-05-29 AU AU32930/97A patent/AU3293097A/en not_active Abandoned
- 1997-05-29 AT AT97927892T patent/ATE296482T1/de not_active IP Right Cessation
- 1997-05-29 EP EP97927892A patent/EP0906636B1/de not_active Expired - Lifetime
- 1997-05-29 WO PCT/US1997/009393 patent/WO1997045855A1/en active IP Right Grant
-
2007
- 2007-12-07 JP JP2007317765A patent/JP2008123671A/ja active Pending
- 2007-12-07 JP JP2007317766A patent/JP2008077833A/ja not_active Withdrawn
- 2007-12-07 JP JP2007317761A patent/JP2008091022A/ja not_active Withdrawn
- 2007-12-07 JP JP2007317763A patent/JP2008120676A/ja not_active Withdrawn
- 2007-12-07 JP JP2007317764A patent/JP2008117521A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2000512053A (ja) | 2000-09-12 |
AU3293097A (en) | 1998-01-05 |
WO1997045855A1 (en) | 1997-12-04 |
DE69733350T2 (de) | 2006-04-27 |
JP2008077833A (ja) | 2008-04-03 |
EP0906636B1 (de) | 2005-05-25 |
AU3224297A (en) | 1998-01-05 |
EP0909445A1 (de) | 1999-04-21 |
WO1997045834A1 (en) | 1997-12-04 |
JP2008120676A (ja) | 2008-05-29 |
JP2008091022A (ja) | 2008-04-17 |
JP2008117521A (ja) | 2008-05-22 |
DE69733350D1 (de) | 2005-06-30 |
EP0906636A1 (de) | 1999-04-07 |
JP2008123671A (ja) | 2008-05-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |