JP2015504533A - 表示装置、薄膜トランジスター、アレイ基板及びその製造方法 - Google Patents
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Abstract
Description
3 画素電極
4 活性層
5 ゲート絶縁層
6 ゲート電極
7 共通電極ライン
8 一層目の導電性薄膜
9 フォトレジスト
10 二層目の導電性薄膜
11 共通電極
21 ソース電極
22 ドレイン電極
HP フォトレジスト部分保留領域
NP フォトレジスト保留領域
WP フォトレジスト未保留領域
Claims (14)
- アレイ基板を製造する方法であって、
ソース電極、ドレイン電極、データライン及び画素電極のパターンを形成するステップAと、
活性層及びゲート絶縁層を順次形成し、更に前記ゲート絶縁層にデータライン及び外部回路への接続貫通穴を形成するステップBと、
ゲート電極、ゲートライン及び共通電極ラインのパターンを形成するステップCと、
を含み、
前記共通電極ラインと前記画素電極との一部を重ねることによってストレージコンデンサを形成し、又は、前記ゲート電極、前記ゲートライン及び前記共通電極ラインのパターンを形成し、前記共通電極ラインは、画素電極と共に駆動電界を形成することを特徴とするアレイ基板の製造方法。 - ステップAは、基板に一層目の導電性透明薄膜を形成し、1回目のパターニング工程によって前記ソース電極、前記ドレイン電極、前記データライン及び前記画素電極のパターンを形成することを含み、
ステップBは、前記活性層及び前記ゲート絶縁層を形成し、更に2回目のパターニング工程によって前記データライン及び前記外部回路への接続貫通穴を形成することを含み、
ステップCは、二層目の導電性透明薄膜を形成し、更に3回目のパターニング工程によって前記ゲート電極、前記ゲートライン及び前記共通電極ラインのパターンを形成する、又はパターニング工程によって前記ゲート電極、前記ゲートライン及び前記共通電極のパターンを形成することを含む、
ことを特徴とする請求項1に記載のアレイ基板の製造方法。 - 前記1回目のパターニング工程によって、前記ソース電極、前記ドレイン電極、前記データライン及び前記画像電極のパターンを形成する工程は、
前記一層目の導電性透明薄膜の上にフォトレジストを形成するステップと、
デュアルトーンマスクを使って前記フォトレジストを露光させ、フォトレジスト未保留領域、フォトレジスト部分保留領域及びフォトレジスト保留領域を形成するための潜像を形成するステップと、
現像処理を行うステップと、
前記フォトレジスト未保留領域域内の前記一層目の導電性透明薄膜をエッチングにより除去し、前記ソース電極、前記ドレイン電極、及び前記データラインのパターンを形成するステップと、
アッシングによって前記フォトレジスト保留領域内の前記フォトレジストを保留して、前記フォトレジスト部分保留領域内のフォトレジストを除去するステップと、
更に前記フォトレジスト部分保留領域内の保留された前記一層目の導電性透明薄膜をエッチングし、前記フォトレジスト部分保留領域内の前記一層目の導電性透明薄膜を薄くし、前記画素電極パターンを形成するステップと、
残存するフォトレジストを除去するステップと、を含むことを特徴とする請求項2に記載のアレイ基板の製造方法。 - 前記2回目のパターニング工程によって、前記データライン及び前記外部回路への接続貫通穴を形成する工程は、
前記ゲート絶縁層にフォトレジストを塗るステップと、
マスクを使って前記フォトレジストを露光させ、フォトレジスト保留領域及びフォトレジスト未保留領域を形成するための潜像を形成するステップと、
現像処理を行うステップと、
前記フォトレジスト未保留領域内の前記ゲート絶縁層と前記活性層をエッチングして除去し、前記貫通穴のパターンを形成するステップと、
残存フォトレジストを除去するステップと、を含むことを特徴とする請求項2に記載のアレイ基板の製造方法。 - 前記3回目のパターニング工程によって前記ゲート電極、前記ゲートライン及び前記共通電極ラインのパターンを形成する工程は、
前記二層目の導電性透明薄膜の上にフォトレジストを塗るステップと、
マスクを使って前記フォトレジストを露光させ、前記フォトレジスト保留領域及び前記フォトレジスト未保留領域を形成するための潜像を形成するステップと、
現像処理を行うステップと、
前記フォトレジスト未保留領域内の前記二層目の導電性透明薄膜をエッチングにより除去し、前記ゲート電極、前記ゲートライン及び前記共通電極ラインのパターンを形成するステップと、
残存するフォトレジストを除去するステップと、を含むことを特徴とする請求項2に記載のアレイ基板の製造方法。 - 前記3回目のパターニング工程によって前記ゲート電極、前記ゲートライン及び前記共通電極のパターンを形成する工程は、
前記二層目の導電性透明薄膜の上にフォトレジストを塗るステップと、
マスクを使って前記フォトレジストを露光させ、前記フォトレジスト保留領域及び前記フォトレジスト未保留領域を形成するための潜像を形成するステップと、
現像処理を行うステップと、
前記フォトレジスト未保留領域内の前記二層目の導電性透明薄膜をエッチングにより除去し、前記ゲート電極、前記ゲートライン及び前記共通電極のパターンを形成するステップと、
残存するフォトレジストを除去するステップと、を含むことを特徴とする請求項2に記載のアレイ基板の製造方法。 - 前記共通電極は、スリットを含むことを特徴とする請求項1〜4、6の何れか一項に記載のアレイ基板の製造方法。
- 前記活性層の材料として酸化物半導体を使用することを特徴とする請求項1〜7の何れか一項に記載のアレイ基板の製造方法。
- ベース基板の上に形成されたソース電極、ドレイン電極、データライン及び画素電極と、
前記ソース電極、前記ドレイン電極、前記データライン及び前記画素電極の上に形成された活性層と、
前記活性層の上に形成されたゲート絶縁層と、
前記ゲート絶縁層の上に形成されたゲート電極、ゲートライン及び共通電極ラインと、を含み、
前記ソース電極と前記ドレイン電極との間にチャネルが形成され、前記ドレイン電極と前記画素電極は電気的に接続され、前記データラインは貫通穴を通して外部回路へ接続し、
前記共通電極ラインと前記画素電極との一部を重ねることによってストレージコンデンサを形成し、又は、前記ゲート絶縁層の上に前記ゲート電極、前記ゲートライン及び前記共通電極ラインを形成し、前記共通電極ラインは前記画素電極と共に駆動電界を形成することを特徴とするアレイ基板。 - 前記活性層の材料として酸化物を使用することを特徴とする請求項9に記載のアレイ基板。
- 前記共通電極が、スリットを含むことを特徴とする請求項9又は10に記載のアレイ基板。
- 前記ソース電極、前記ドレイン電極、前記データライン及び前記画素電極は、同一の導電性透明薄膜によって形成されることを特徴とする請求項9〜11の何れか一項に記載のアレイ基板。
- 請求項9〜12の何れか一項に記載のアレイ基板を含む表示装置。
- 前記表示装置は、液晶表示装置又は有機エレクトロルミネッセンス装置(OLED)であることを特徴とする請求項13に記載の表示装置。
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CN201110366515.XA CN102629585B (zh) | 2011-11-17 | 2011-11-17 | 一种显示装置、薄膜晶体管、阵列基板及其制造方法 |
CN201110366515.X | 2011-11-17 | ||
PCT/CN2012/082450 WO2013071800A1 (zh) | 2011-11-17 | 2012-09-29 | 显示装置、薄膜晶体管、阵列基板及其制造方法 |
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CN102629585B (zh) | 2011-11-17 | 2014-07-23 | 京东方科技集团股份有限公司 | 一种显示装置、薄膜晶体管、阵列基板及其制造方法 |
TWI477867B (zh) | 2012-07-16 | 2015-03-21 | E Ink Holdings Inc | 畫素結構及其製造方法 |
CN103018974B (zh) * | 2012-11-30 | 2016-05-25 | 京东方科技集团股份有限公司 | 液晶显示装置、多晶硅阵列基板及制作方法 |
CN103022147A (zh) * | 2012-12-07 | 2013-04-03 | 京东方科技集团股份有限公司 | 阵列基板及其制备方法、薄膜晶体管及显示装置 |
CN103018977B (zh) * | 2012-12-14 | 2016-08-17 | 京东方科技集团股份有限公司 | 一种阵列基板及其制造方法 |
JP6180200B2 (ja) * | 2013-06-24 | 2017-08-16 | 三菱電機株式会社 | アクティブマトリクス基板およびその製造方法 |
US20150187825A1 (en) * | 2013-12-31 | 2015-07-02 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Method of Manufacturing Array Substrate of LCD |
CN103928406B (zh) * | 2014-04-01 | 2016-08-17 | 京东方科技集团股份有限公司 | 阵列基板的制备方法、阵列基板、显示装置 |
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CN102629585A (zh) | 2012-08-08 |
WO2013071800A1 (zh) | 2013-05-23 |
EP2782153B1 (en) | 2020-03-25 |
JP6223987B2 (ja) | 2017-11-01 |
KR101447343B1 (ko) | 2014-10-06 |
KR20130066627A (ko) | 2013-06-20 |
EP2782153A4 (en) | 2015-09-23 |
EP2782153A1 (en) | 2014-09-24 |
CN102629585B (zh) | 2014-07-23 |
US9754979B2 (en) | 2017-09-05 |
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