JP2015177064A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2015177064A JP2015177064A JP2014052734A JP2014052734A JP2015177064A JP 2015177064 A JP2015177064 A JP 2015177064A JP 2014052734 A JP2014052734 A JP 2014052734A JP 2014052734 A JP2014052734 A JP 2014052734A JP 2015177064 A JP2015177064 A JP 2015177064A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- impurity concentration
- nitride semiconductor
- semiconductor layer
- high impurity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 89
- 239000012535 impurity Substances 0.000 claims abstract description 97
- 150000004767 nitrides Chemical class 0.000 claims abstract description 55
- 239000000203 mixture Substances 0.000 claims description 16
- 229910052782 aluminium Inorganic materials 0.000 claims description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 10
- 230000004888 barrier function Effects 0.000 description 19
- 229910002601 GaN Inorganic materials 0.000 description 18
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 17
- 229910002704 AlGaN Inorganic materials 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 230000005533 two-dimensional electron gas Effects 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- -1 for example Chemical compound 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1066—Gate region of field-effect devices with PN junction gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
- H01L21/02241—III-V semiconductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
Abstract
Description
前記第3の窒化物半導体層上に設けられるゲート電極と、を備える。
16 バリア層(第2の窒化物半導体層)
18 ソース電極
20 ドレイン電極
22 キャップ層(第3の窒化物半導体層)
22a 高不純物濃度層
22b 低不純物濃度層
26 ゲート電極
100 HEMT(半導体装置)
Claims (8)
- 第1の窒化物半導体層と、
前記第1の窒化物半導体層上に設けられ、前記第1の窒化物半導体層よりバンドギャップの大きい第2の窒化物半導体層と、
前記第2の窒化物半導体層上に設けられるソース電極と、
前記第2の窒化物半導体層上に設けられるドレイン電極と、
前記ソース電極と前記ドレイン電極の間の前記第2の窒化物半導体層上に設けられ、p型不純物を含有する高不純物濃度層と、前記高不純物濃度層よりも前記p型不純物の濃度が低くバンドギャップの大きい低不純物濃度層とが交互に積層し、最下層および最上層が前記高不純物濃度層である第3の窒化物半導体層と、
前記第3の窒化物半導体層上に設けられるゲート電極と、
を備えることを特徴とする半導体装置。 - 前記高不純物濃度層がAlXGa1−XN(0≦X<1)であり、
前記低不純物濃度層がAlYGa1−YN(0<Y≦1、X<Y)であることを特徴とする請求項1記載の半導体装置。 - 前記第1の窒化物半導体層がAlZGa1−ZN(0≦Z<1)であり、
前記第2の窒化物半導体層がAlUGa1−UN(0<U≦1、Z<U)であることを特徴とする請求項2記載の半導体装置。 - 前記第3の窒化物半導体層の平均アルミニウム組成が、前記第2の窒化物半導体層の平均アルミニウム組成よりも低いことを特徴とする請求項3記載の半導体装置。
- 前記低不純物濃度層の膜厚が1nm以上10nm以下であることを特徴とする請求項1ないし請求項4記載の半導体装置。
- 前記高不純物濃度層の膜厚が1nm以上10nm以下であることを特徴とする請求項1ないし請求項5記載の半導体装置。
- 前記高不純物濃度層のp型不純物濃度が1×1018atoms/cm3以上であることを特徴とする請求項1ないし請求項6記載の半導体装置。
- 前記第3の窒化物半導体層中の前記p型不純物の濃度が、最上層の前記高不純物濃度層で最大となることを特徴とする請求項1ないし請求項7記載の半導体装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014052734A JP6189235B2 (ja) | 2014-03-14 | 2014-03-14 | 半導体装置 |
TW103118878A TW201535739A (zh) | 2014-03-14 | 2014-05-29 | 半導體裝置 |
CN201410305195.0A CN104916633A (zh) | 2014-03-14 | 2014-06-30 | 半导体装置 |
US14/474,028 US9412856B2 (en) | 2014-03-14 | 2014-08-29 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014052734A JP6189235B2 (ja) | 2014-03-14 | 2014-03-14 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015177064A true JP2015177064A (ja) | 2015-10-05 |
JP6189235B2 JP6189235B2 (ja) | 2017-08-30 |
Family
ID=54069845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014052734A Active JP6189235B2 (ja) | 2014-03-14 | 2014-03-14 | 半導体装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9412856B2 (ja) |
JP (1) | JP6189235B2 (ja) |
CN (1) | CN104916633A (ja) |
TW (1) | TW201535739A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016207890A (ja) * | 2015-04-24 | 2016-12-08 | トヨタ自動車株式会社 | ヘテロ接合半導体装置 |
WO2023238852A1 (ja) * | 2022-06-09 | 2023-12-14 | ローム株式会社 | 窒化物半導体装置 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5828435B1 (ja) * | 2015-02-03 | 2015-12-09 | 株式会社パウデック | 半導体素子、電気機器、双方向電界効果トランジスタおよび実装構造体 |
CN105895687B (zh) * | 2016-04-18 | 2019-03-05 | 中国电子科技集团公司第五十五研究所 | 一种基于再生长技术降低GaN HEMT器件欧姆接触电阻的方法及GaN HEMT器件 |
JP6685870B2 (ja) * | 2016-09-15 | 2020-04-22 | 株式会社東芝 | 半導体装置 |
TWI608608B (zh) * | 2017-02-20 | 2017-12-11 | 新唐科技股份有限公司 | 電晶體 |
CN107393956A (zh) * | 2017-07-06 | 2017-11-24 | 中国科学院半导体研究所 | 包含p型超晶格的增强型高电子迁移率晶体管及制备方法 |
CN108511522B (zh) * | 2018-03-16 | 2022-04-26 | 英诺赛科(珠海)科技有限公司 | p-GaN基增强型HEMT器件 |
TWI730516B (zh) * | 2018-12-12 | 2021-06-11 | 日商闊斯泰股份有限公司 | 氮化物半導體基板以及氮化物半導體裝置 |
CN112510087B (zh) * | 2020-12-01 | 2023-07-11 | 晶能光电股份有限公司 | p型栅增强型GaN基HEMT器件及其制备方法 |
US11942326B2 (en) * | 2020-12-16 | 2024-03-26 | Semiconductor Components Industries, Llc | Process of forming an electronic device including a doped gate electrode |
KR102578828B1 (ko) * | 2021-03-29 | 2023-09-15 | 삼성전자주식회사 | 고전자이동도 트랜지스터 |
KR20220153962A (ko) * | 2021-05-12 | 2022-11-21 | 삼성전자주식회사 | 반도체 집적 회로 소자 및 그 제조 방법 |
CN114122107B (zh) * | 2021-10-28 | 2023-07-18 | 华南理工大学 | 一种周期栅结构的p-GaN常闭型功率器件 |
CN114400246A (zh) * | 2021-12-13 | 2022-04-26 | 晶通半导体(深圳)有限公司 | 反向导通高迁移率晶体管 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011233751A (ja) * | 2010-04-28 | 2011-11-17 | Panasonic Corp | 窒化物半導体トランジスタ |
JP2012124327A (ja) * | 2010-12-08 | 2012-06-28 | Nichia Chem Ind Ltd | 高電子移動度トランジスタ |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6064480A (ja) * | 1983-09-20 | 1985-04-13 | Toshiba Corp | 電界効果トランジスタの製造方法 |
JP4705481B2 (ja) * | 2006-01-25 | 2011-06-22 | パナソニック株式会社 | 窒化物半導体装置 |
JP2010103425A (ja) | 2008-10-27 | 2010-05-06 | Sanken Electric Co Ltd | 窒化物半導体装置 |
JP5457046B2 (ja) * | 2009-02-13 | 2014-04-02 | パナソニック株式会社 | 半導体装置 |
JP5367637B2 (ja) | 2010-05-24 | 2013-12-11 | 株式会社東芝 | 半導体素子 |
JP5620767B2 (ja) | 2010-09-17 | 2014-11-05 | パナソニック株式会社 | 半導体装置 |
US8604486B2 (en) | 2011-06-10 | 2013-12-10 | International Rectifier Corporation | Enhancement mode group III-V high electron mobility transistor (HEMT) and method for fabrication |
-
2014
- 2014-03-14 JP JP2014052734A patent/JP6189235B2/ja active Active
- 2014-05-29 TW TW103118878A patent/TW201535739A/zh unknown
- 2014-06-30 CN CN201410305195.0A patent/CN104916633A/zh active Pending
- 2014-08-29 US US14/474,028 patent/US9412856B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011233751A (ja) * | 2010-04-28 | 2011-11-17 | Panasonic Corp | 窒化物半導体トランジスタ |
JP2012124327A (ja) * | 2010-12-08 | 2012-06-28 | Nichia Chem Ind Ltd | 高電子移動度トランジスタ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016207890A (ja) * | 2015-04-24 | 2016-12-08 | トヨタ自動車株式会社 | ヘテロ接合半導体装置 |
WO2023238852A1 (ja) * | 2022-06-09 | 2023-12-14 | ローム株式会社 | 窒化物半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
US9412856B2 (en) | 2016-08-09 |
CN104916633A (zh) | 2015-09-16 |
JP6189235B2 (ja) | 2017-08-30 |
US20150263154A1 (en) | 2015-09-17 |
TW201535739A (zh) | 2015-09-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6189235B2 (ja) | 半導体装置 | |
JP6270572B2 (ja) | 半導体装置及びその製造方法 | |
JP6230456B2 (ja) | 半導体装置 | |
US8390029B2 (en) | Semiconductor device for reducing and/or preventing current collapse | |
US8519439B2 (en) | Nitride semiconductor element with N-face semiconductor crystal layer | |
JP5591776B2 (ja) | 窒化物半導体装置およびそれを用いた回路 | |
JP5654512B2 (ja) | 窒化物半導体装置 | |
JP6229172B2 (ja) | 半導体装置 | |
US10784361B2 (en) | Semiconductor device and method for manufacturing the same | |
JP2015060896A (ja) | 半導体装置 | |
US20150263155A1 (en) | Semiconductor device | |
US9076850B2 (en) | High electron mobility transistor | |
JP2009032713A (ja) | GaNをチャネル層とする窒化物半導体トランジスタ及びその作製方法 | |
JP2015173151A (ja) | 半導体装置 | |
TW201633538A (zh) | 半導體裝置 | |
US20160211357A1 (en) | Semiconductor device | |
JP2018037435A (ja) | 半導体装置 | |
JP2012069662A (ja) | 電界効果トランジスタ | |
US20220029006A1 (en) | Semiconductor device | |
JP2015056413A (ja) | 窒化物半導体装置 | |
US20170069747A1 (en) | Semiconductor device | |
US9627489B2 (en) | Semiconductor device | |
KR102005451B1 (ko) | 고전자 이동도 트랜지스터 | |
JP6313509B2 (ja) | 半導体装置 | |
JP6139494B2 (ja) | 窒化物半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160215 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20161117 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170104 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170227 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170704 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170802 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 6189235 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |