JP2015090495A - 薄膜トランジスタ表示板 - Google Patents
薄膜トランジスタ表示板 Download PDFInfo
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- JP2015090495A JP2015090495A JP2014182680A JP2014182680A JP2015090495A JP 2015090495 A JP2015090495 A JP 2015090495A JP 2014182680 A JP2014182680 A JP 2014182680A JP 2014182680 A JP2014182680 A JP 2014182680A JP 2015090495 A JP2015090495 A JP 2015090495A
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- 239000010409 thin film Substances 0.000 title claims abstract description 56
- 239000010408 film Substances 0.000 claims abstract description 144
- 239000004065 semiconductor Substances 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 230000001681 protective effect Effects 0.000 claims description 28
- 239000010410 layer Substances 0.000 claims description 23
- 239000011241 protective layer Substances 0.000 claims 1
- 238000009413 insulation Methods 0.000 abstract 6
- 230000000052 comparative effect Effects 0.000 description 14
- 239000004973 liquid crystal related substance Substances 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 229910052814 silicon oxide Inorganic materials 0.000 description 10
- 239000004020 conductor Substances 0.000 description 9
- 230000005684 electric field Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 229910004205 SiNX Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 239000012212 insulator Substances 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
- G02F1/134363—Electrodes characterised by their geometrical arrangement for applying an electric field parallel to the substrate, i.e. in-plane switching [IPS]
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
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- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78636—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with supplementary region or layer for improving the flatness of the device
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
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- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
薄膜トランジスタ表示板に二つの電界生成電極を形成する場合、薄膜トランジスタと電界生成電極との間に複数の絶縁膜が配置され、複数の絶縁膜のうちの少なくとも一層に有機絶縁膜を用いることができる。薄膜トランジスタと電界生成電極とを電気的に接続するための接触孔が複数の絶縁膜に形成される。
前記第3接触孔は、前記ドレイン電極の一端部を露出させ得る。
前記第3接触孔の一面は、前記有機絶縁膜に一部重畳し得る。
前記有機絶縁膜に重畳しない前記第3接触孔の一面と該一面に対向する前記第1接触孔との間の直線距離(A)及び前記第3接触孔の残りの面と該残りの面に対向する前記第1接触孔との間の直線距離(B)は、下記の数式1を満足し得る。
A>1.2×B(式1)
前記直線距離(A)は、1μm〜6μmであり得る。
前記画素電極と前記ドレイン電極が重畳する距離は、1μm〜6μmであり得る。
前記第3接触孔は、前記有機絶縁膜に3面で重畳し得る。
前記ドレイン電極は、一方向に延長されて前記第1保護膜上に位置する前記有機絶縁膜及び前記共通電極に一部重畳し得る。
前記第3接触孔は、前記ドレイン電極が延長された方向の反対方向である他方向に配置し、前記画素電極は、前記第3接触孔の一面に重畳し得る。
また、薄膜トランジスタのソース電極及びドレイン電極をデータ線の延長方向に並べて配置し、薄膜トランジスタのドレイン電極と画素電極との接触孔の位置を画素電極端から離すことによってゲート線を覆う遮光部材の幅が減少し、開口率及び透過率が向上した表示装置を提供することができる。
なお、図8以降では、抵抗性接触部材の表示は省略する。
81、82 連結部材
110 絶縁基板
121 ゲート線
124 ゲート電極
129 ゲートパッド部
131 共通電極
138 第2接触孔
140 ゲート絶縁膜
151 半導体膜
152 (半導体膜の)突出部
154 半導体膜(のチャネル領域)
159 (半導体膜の)端部
161、163、165、169 抵抗性接触部材
171 データ線(データ導電体)
173 ソース電極
175 ドレイン電極
179 データパッド部
180x 第1保護膜
180y 第2保護膜
181 第4接触孔
182 第5接触孔
185a 第1接触孔
185b 第3接触孔
191 画素電極
192 横部
193 枝電極
220 遮光部材
Claims (10)
- 絶縁基板と、
前記絶縁基板上に位置してゲート電極及びゲートパッド部を含むゲート線と、
前記ゲート線が形成された前記絶縁基板上にゲート絶縁膜を介して形成された半導体膜と、
前記ゲート線と絶縁して交差し、前記半導体膜上に形成されたソース電極及びデータパッド部を含むデータ線と、
前記ソース電極に対向して前記半導体膜上に形成されたドレイン電極と、
前記データ線及びドレイン電極上の第1保護膜上に位置して第1接触孔を含む有機絶縁膜と、
前記有機絶縁膜上に位置して第2接触孔を含む共通電極と、
前記共通電極上に位置して第3接触孔を含む第2保護膜と、
前記第2保護膜上に位置して前記第3接触孔を通じて前記ドレイン電極と接触する画素電極と、を有し、
前記第3接触孔は前記第1接触孔の一面に隣接して位置することを特徴とする薄膜トランジスタ表示板。 - 前記第1接触孔は、前記第2接触孔より小さく、
前記第3接触孔は、前記第2接触孔より小さく且つ該第3接触孔の一部が前記ドレイン電極に重畳することを特徴とする請求項1に記載の薄膜トランジスタ表示板。 - 前記第3接触孔は、前記ドレイン電極の一端部を露出させることを特徴とする請求項1に記載の薄膜トランジスタ表示板。
- 前記第3接触孔の一面は、前記有機絶縁膜に一部重畳することを特徴とする請求項3に記載の薄膜トランジスタ表示板。
- 前記有機絶縁膜に重畳しない前記第3接触孔の一面と該一面に対向する前記第1接触孔との間の直線距離(A)及び
前記第3接触孔の残りの面と該残りの面に対向する前記第1接触孔との間の直線距離(B)は、下記の数式1を満足することを特徴とする請求項4に記載の薄膜トランジスタ表示板。
A>1.2×B (式1) - 前記直線距離(A)は、1μm〜6μmであることを特徴とする請求項5に記載の薄膜トランジスタ表示板。
- 前記第3接触孔に前記ドレイン電極が重畳する距離は、1μm〜6μmであることを特徴とする請求項5に記載の薄膜トランジスタ表示板。
- 前記第3接触孔は、前記有機絶縁膜に3面で重畳することを特徴とする請求項3に記載の薄膜トランジスタ表示板。
- 前記ドレイン電極は、一方向に延長されて前記第1保護膜上に位置する前記有機絶縁膜及び前記共通電極に一部重畳することを特徴とする請求項1に記載の薄膜トランジスタ表示板。
- 前記第3接触孔は、前記ドレイン電極が延長された方向の反対方向である他方向に位置し、
前記画素電極は、前記第3接触孔の一面に重畳することを特徴とする請求項9に記載の薄膜トランジスタ表示板。
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KR1020130132962A KR102198111B1 (ko) | 2013-11-04 | 2013-11-04 | 박막 트랜지스터 표시판 및 그 제조 방법 |
KR10-2013-0132962 | 2013-11-04 |
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JP2015090495A true JP2015090495A (ja) | 2015-05-11 |
JP6510779B2 JP6510779B2 (ja) | 2019-05-08 |
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US (3) | US9837447B2 (ja) |
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CN (3) | CN104614906A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018098188A (ja) * | 2016-12-14 | 2018-06-21 | エルジー ディスプレイ カンパニー リミテッド | 発光表示装置及びその製造方法 |
JP2018098185A (ja) * | 2016-12-14 | 2018-06-21 | エルジー ディスプレイ カンパニー リミテッド | 発光表示装置とその製造方法 |
WO2019193856A1 (ja) * | 2018-04-04 | 2019-10-10 | 株式会社ジャパンディスプレイ | 表示装置 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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KR102198111B1 (ko) * | 2013-11-04 | 2021-01-05 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 및 그 제조 방법 |
JP6457879B2 (ja) * | 2015-04-22 | 2019-01-23 | 株式会社ジャパンディスプレイ | 表示装置及びその製造方法 |
KR102415807B1 (ko) * | 2015-09-17 | 2022-07-01 | 엘지디스플레이 주식회사 | 박막 트랜지스터 기판 및 그 제조 방법 |
KR102511886B1 (ko) * | 2016-07-04 | 2023-03-21 | 삼성디스플레이 주식회사 | 액정 표시 장치 |
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CN110888272A (zh) | 2020-03-17 |
US20150123113A1 (en) | 2015-05-07 |
JP6510779B2 (ja) | 2019-05-08 |
US10431605B2 (en) | 2019-10-01 |
US20180090519A1 (en) | 2018-03-29 |
CN104614906A (zh) | 2015-05-13 |
CN114709226A (zh) | 2022-07-05 |
KR20150051464A (ko) | 2015-05-13 |
US9837447B2 (en) | 2017-12-05 |
US20200052006A1 (en) | 2020-02-13 |
CN110888272B (zh) | 2022-08-09 |
KR102198111B1 (ko) | 2021-01-05 |
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