JP2015017976A5 - - Google Patents

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Publication number
JP2015017976A5
JP2015017976A5 JP2014135604A JP2014135604A JP2015017976A5 JP 2015017976 A5 JP2015017976 A5 JP 2015017976A5 JP 2014135604 A JP2014135604 A JP 2014135604A JP 2014135604 A JP2014135604 A JP 2014135604A JP 2015017976 A5 JP2015017976 A5 JP 2015017976A5
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JP
Japan
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feature
raman
sample
identification
microscope
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JP2014135604A
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Japanese (ja)
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JP6116529B2 (ja
JP2015017976A (ja
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Priority claimed from EP13180398.3A external-priority patent/EP2824445B1/en
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JP2014135604A 2013-07-08 2014-07-01 ラマン分光機能を有する荷電粒子顕微鏡 Active JP6116529B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201361843747P 2013-07-08 2013-07-08
US61/843,747 2013-07-08
EP13180398.3A EP2824445B1 (en) 2013-07-08 2013-08-14 Charged-particle microscopy combined with raman spectroscopy
EP13180398.3 2013-08-14

Publications (3)

Publication Number Publication Date
JP2015017976A JP2015017976A (ja) 2015-01-29
JP2015017976A5 true JP2015017976A5 (enExample) 2017-03-16
JP6116529B2 JP6116529B2 (ja) 2017-04-19

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JP2014135604A Active JP6116529B2 (ja) 2013-07-08 2014-07-01 ラマン分光機能を有する荷電粒子顕微鏡

Country Status (4)

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US (1) US9406482B2 (enExample)
EP (1) EP2824445B1 (enExample)
JP (1) JP6116529B2 (enExample)
CN (1) CN104280377B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
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EP2993682A1 (en) 2014-09-04 2016-03-09 Fei Company Method of performing spectroscopy in a transmission charged-particle microscope
EP2998979A1 (en) 2014-09-22 2016-03-23 Fei Company Improved spectroscopy in a transmission charged-particle microscope
EP3104155A1 (en) 2015-06-09 2016-12-14 FEI Company Method of analyzing surface modification of a specimen in a charged-particle microscope
JP6622061B2 (ja) * 2015-11-04 2019-12-18 日本電子株式会社 荷電粒子線装置
WO2017131759A1 (en) * 2016-01-29 2017-08-03 Hewlett-Packard Development Company, L.P. Optical readers
EP3231682B1 (en) * 2016-04-15 2018-12-26 Volvo Car Corporation Handover notification arrangement, a vehicle and a method of providing a handover notification
JP6831190B2 (ja) * 2016-08-15 2021-02-17 トヨタ自動車株式会社 自動運転車両の制御システム及び制御方法
JP6814109B2 (ja) * 2017-08-25 2021-01-13 株式会社日立製作所 微細構造体の加工方法、および微細構造体の加工装置
JP7017437B2 (ja) * 2018-03-06 2022-02-08 Ｔａｓｍｉｔ株式会社 反射電子のエネルギースペクトルを測定する装置および方法
CN110044875B (zh) * 2019-04-26 2024-04-19 南京信息工程大学 一种用于激光诱导击穿光谱技术的气溶胶检测瞄准装置
WO2021021656A1 (en) * 2019-07-26 2021-02-04 The Board Of Trustees Of The Leland Stanford Junior University Sub-wavelength raman imaging with combined optical and electron excitation
KR102739071B1 (ko) * 2019-08-05 2024-12-06 삼성전자주식회사 미세먼지 측정 장치 및 방법
DE102020122535B4 (de) * 2020-08-28 2022-08-11 Carl Zeiss Microscopy Gmbh Verfahren zum Betrieb eines Strahlgeräts, Computerprogrammprodukt und Strahlgerät zum Durchführen des Verfahrens
TWI789957B (zh) * 2021-10-21 2023-01-11 炳碩生醫股份有限公司 配合拉曼光譜儀於檢體中尋找取樣點的方法和系統

Family Cites Families (17)

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JPH06347405A (ja) * 1993-06-10 1994-12-22 Hitachi Ltd ラマンスペクトル測定装置及びその測定方法
NL9400111A (nl) * 1994-01-24 1995-09-01 Biomat Res Group Stichting Azl Elektronenmicroscoop met Ramanspectroscopie.
US6118123A (en) * 1997-02-05 2000-09-12 Jeol Ltd. Electron probe microanalyzer
JP4092037B2 (ja) * 1999-03-05 2008-05-28 株式会社堀場製作所 物質同定装置
US6654118B2 (en) * 2002-02-04 2003-11-25 Ortho-Mcneil Pharmaceutical, Inc. Method and apparatus for obtaining molecular data from a pharmaceutical specimen
JP2005534041A (ja) * 2002-07-24 2005-11-10 ヨットペーカー、インストルメンツ、アクチエンゲゼルシャフト 走査プローブ技術を用いた局部的に高分解能な表層の質量分光学的特性調査のための方法
JP4101812B2 (ja) * 2005-02-09 2008-06-18 株式会社リガク 分子構造複合同定装置
US7532314B1 (en) 2005-07-14 2009-05-12 Battelle Memorial Institute Systems and methods for biological and chemical detection
EP1801593A1 (en) * 2005-12-22 2007-06-27 Koninklijke Philips Electronics N.V. A method of imaging biological specimens using inorganic nanoparticles as label agents
JP2010181352A (ja) * 2009-02-09 2010-08-19 Fuji Electric Holdings Co Ltd ラマン分光装置
JP2010190595A (ja) * 2009-02-16 2010-09-02 Fuji Electric Holdings Co Ltd レーザー分光分析装置およびそれを用いたレーザー分光分析方法
EP2226830B1 (en) 2009-03-06 2014-01-08 FEI Company Charged particle beam processing
DE102009015341A1 (de) * 2009-03-27 2010-10-07 Carl Zeiss Ag Verfahren und Vorrichtungen zur optischen Untersuchung von Proben
US8704176B2 (en) * 2011-08-10 2014-04-22 Fei Company Charged particle microscope providing depth-resolved imagery
EP2557584A1 (en) * 2011-08-10 2013-02-13 Fei Company Charged-particle microscopy imaging method
JP2013195192A (ja) * 2012-03-19 2013-09-30 Sumitomo Metal Mining Co Ltd 絶縁性試料の前処理方法、及び表面分析方法
EP2757402B1 (en) 2013-01-22 2016-03-30 FEI Company Method of observing samples with a fluorescent microscope

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