JP6116529B2 - ラマン分光機能を有する荷電粒子顕微鏡 - Google Patents

ラマン分光機能を有する荷電粒子顕微鏡 Download PDF

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JP6116529B2
JP6116529B2 JP2014135604A JP2014135604A JP6116529B2 JP 6116529 B2 JP6116529 B2 JP 6116529B2 JP 2014135604 A JP2014135604 A JP 2014135604A JP 2014135604 A JP2014135604 A JP 2014135604A JP 6116529 B2 JP6116529 B2 JP 6116529B2
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raman
sample
cpm
microscope
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JP2015017976A (ja
JP2015017976A5 (enExample
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ヤコバス ランベルトゥス ムルデルス ヨハネス
ヤコバス ランベルトゥス ムルデルス ヨハネス
カイパース ローレンス
カイパース ローレンス
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FEI Co
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3174—Etching microareas
    • H01J2237/31745—Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2014135604A 2013-07-08 2014-07-01 ラマン分光機能を有する荷電粒子顕微鏡 Active JP6116529B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201361843747P 2013-07-08 2013-07-08
US61/843,747 2013-07-08
EP13180398.3A EP2824445B1 (en) 2013-07-08 2013-08-14 Charged-particle microscopy combined with raman spectroscopy
EP13180398.3 2013-08-14

Publications (3)

Publication Number Publication Date
JP2015017976A JP2015017976A (ja) 2015-01-29
JP2015017976A5 JP2015017976A5 (enExample) 2017-03-16
JP6116529B2 true JP6116529B2 (ja) 2017-04-19

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JP2014135604A Active JP6116529B2 (ja) 2013-07-08 2014-07-01 ラマン分光機能を有する荷電粒子顕微鏡

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US (1) US9406482B2 (enExample)
EP (1) EP2824445B1 (enExample)
JP (1) JP6116529B2 (enExample)
CN (1) CN104280377B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2993682A1 (en) 2014-09-04 2016-03-09 Fei Company Method of performing spectroscopy in a transmission charged-particle microscope
EP2998979A1 (en) 2014-09-22 2016-03-23 Fei Company Improved spectroscopy in a transmission charged-particle microscope
EP3104155A1 (en) 2015-06-09 2016-12-14 FEI Company Method of analyzing surface modification of a specimen in a charged-particle microscope
JP6622061B2 (ja) * 2015-11-04 2019-12-18 日本電子株式会社 荷電粒子線装置
EP3345119A4 (en) * 2016-01-29 2019-04-24 Hewlett-Packard Development Company, L.P. OPTICAL READER
EP3231682B1 (en) * 2016-04-15 2018-12-26 Volvo Car Corporation Handover notification arrangement, a vehicle and a method of providing a handover notification
JP6831190B2 (ja) * 2016-08-15 2021-02-17 トヨタ自動車株式会社 自動運転車両の制御システム及び制御方法
JP6814109B2 (ja) * 2017-08-25 2021-01-13 株式会社日立製作所 微細構造体の加工方法、および微細構造体の加工装置
JP7017437B2 (ja) * 2018-03-06 2022-02-08 Ｔａｓｍｉｔ株式会社 反射電子のエネルギースペクトルを測定する装置および方法
CN110044875B (zh) * 2019-04-26 2024-04-19 南京信息工程大学 一种用于激光诱导击穿光谱技术的气溶胶检测瞄准装置
WO2021021656A1 (en) * 2019-07-26 2021-02-04 The Board Of Trustees Of The Leland Stanford Junior University Sub-wavelength raman imaging with combined optical and electron excitation
KR102739071B1 (ko) * 2019-08-05 2024-12-06 삼성전자주식회사 미세먼지 측정 장치 및 방법
DE102020122535B4 (de) * 2020-08-28 2022-08-11 Carl Zeiss Microscopy Gmbh Verfahren zum Betrieb eines Strahlgeräts, Computerprogrammprodukt und Strahlgerät zum Durchführen des Verfahrens
TWI789957B (zh) * 2021-10-21 2023-01-11 炳碩生醫股份有限公司 配合拉曼光譜儀於檢體中尋找取樣點的方法和系統

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06347405A (ja) * 1993-06-10 1994-12-22 Hitachi Ltd ラマンスペクトル測定装置及びその測定方法
NL9400111A (nl) * 1994-01-24 1995-09-01 Biomat Res Group Stichting Azl Elektronenmicroscoop met Ramanspectroscopie.
US6118123A (en) * 1997-02-05 2000-09-12 Jeol Ltd. Electron probe microanalyzer
JP4092037B2 (ja) * 1999-03-05 2008-05-28 株式会社堀場製作所 物質同定装置
US6654118B2 (en) * 2002-02-04 2003-11-25 Ortho-Mcneil Pharmaceutical, Inc. Method and apparatus for obtaining molecular data from a pharmaceutical specimen
DE50311375D1 (de) * 2002-07-24 2009-05-14 Jpk Instruments Ag Verfahren zur örtlich hochaufgelösten, massenspektroskopischen charakterisierung von oberflächen mittels einer rastersondentechnik
JP4101812B2 (ja) * 2005-02-09 2008-06-18 株式会社リガク 分子構造複合同定装置
WO2007009119A2 (en) * 2005-07-14 2007-01-18 Battelle Memorial Institute Systems and methods for biological and chemical detection
EP1801593A1 (en) * 2005-12-22 2007-06-27 Koninklijke Philips Electronics N.V. A method of imaging biological specimens using inorganic nanoparticles as label agents
JP2010181352A (ja) * 2009-02-09 2010-08-19 Fuji Electric Holdings Co Ltd ラマン分光装置
JP2010190595A (ja) * 2009-02-16 2010-09-02 Fuji Electric Holdings Co Ltd レーザー分光分析装置およびそれを用いたレーザー分光分析方法
EP2226830B1 (en) 2009-03-06 2014-01-08 FEI Company Charged particle beam processing
DE102009015341A1 (de) * 2009-03-27 2010-10-07 Carl Zeiss Ag Verfahren und Vorrichtungen zur optischen Untersuchung von Proben
US8704176B2 (en) * 2011-08-10 2014-04-22 Fei Company Charged particle microscope providing depth-resolved imagery
EP2557584A1 (en) * 2011-08-10 2013-02-13 Fei Company Charged-particle microscopy imaging method
JP2013195192A (ja) * 2012-03-19 2013-09-30 Sumitomo Metal Mining Co Ltd 絶縁性試料の前処理方法、及び表面分析方法
EP2757402B1 (en) 2013-01-22 2016-03-30 FEI Company Method of observing samples with a fluorescent microscope

Also Published As

Publication number Publication date
JP2015017976A (ja) 2015-01-29
US20150009489A1 (en) 2015-01-08
CN104280377B (zh) 2018-06-22
US9406482B2 (en) 2016-08-02
EP2824445B1 (en) 2016-03-02
CN104280377A (zh) 2015-01-14
EP2824445A1 (en) 2015-01-14

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