JP2016114547A5 - - Google Patents
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- JP2016114547A5 JP2016114547A5 JP2014255020A JP2014255020A JP2016114547A5 JP 2016114547 A5 JP2016114547 A5 JP 2016114547A5 JP 2014255020 A JP2014255020 A JP 2014255020A JP 2014255020 A JP2014255020 A JP 2014255020A JP 2016114547 A5 JP2016114547 A5 JP 2016114547A5
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- JP
- Japan
- Prior art keywords
- electrons
- sample
- energy
- detected
- irradiating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000001228 spectrum Methods 0.000 claims 8
- 238000001514 detection method Methods 0.000 claims 7
- 230000001678 irradiating effect Effects 0.000 claims 6
- 238000000691 measurement method Methods 0.000 claims 6
- 238000000034 method Methods 0.000 claims 3
- 238000005520 cutting process Methods 0.000 claims 2
- 238000009826 distribution Methods 0.000 claims 2
- 238000005430 electron energy loss spectroscopy Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 2
- 238000000682 scanning probe acoustic microscopy Methods 0.000 claims 2
- 239000007787 solid Substances 0.000 claims 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims 1
- 230000001133 acceleration Effects 0.000 claims 1
- 229910052744 lithium Inorganic materials 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 230000007704 transition Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014255020A JP6646290B2 (ja) | 2014-12-17 | 2014-12-17 | 試料中の元素の測定方法、及び濃度分布の可視化方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014255020A JP6646290B2 (ja) | 2014-12-17 | 2014-12-17 | 試料中の元素の測定方法、及び濃度分布の可視化方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016114547A JP2016114547A (ja) | 2016-06-23 |
| JP2016114547A5 true JP2016114547A5 (enExample) | 2017-11-09 |
| JP6646290B2 JP6646290B2 (ja) | 2020-02-14 |
Family
ID=56140044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014255020A Active JP6646290B2 (ja) | 2014-12-17 | 2014-12-17 | 試料中の元素の測定方法、及び濃度分布の可視化方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6646290B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6795010B2 (ja) * | 2018-05-16 | 2020-12-02 | Ｊｆｅスチール株式会社 | Ｘ線分析方法及びｘ線分析装置 |
| AT524288B1 (de) * | 2020-09-16 | 2024-05-15 | Gatan Inc | Computergestütztes Verfahren zur Bestimmung eines Elementanteiles eines Bestimmungselementes kleiner Ordnungszahl, insbesondere eines Li-Anteiles, und Vorrichtung zur Datenverarbeitung hierzu |
| CN114460114B (zh) * | 2022-04-13 | 2022-06-21 | 季华实验室 | 样品分析方法、装置、设备及存储介质 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01155251A (ja) * | 1987-12-11 | 1989-06-19 | Shimadzu Corp | 表面分析装置 |
| JP2000241369A (ja) * | 1999-02-24 | 2000-09-08 | Canon Inc | フラーレン評価方法 |
| GB0002367D0 (en) * | 2000-02-03 | 2000-03-22 | Limited | Spectrometer |
| JP2001312987A (ja) * | 2000-04-28 | 2001-11-09 | Nippon Telegr & Teleph Corp <Ntt> | 電子ビームフィラメントおよびこれを用いた表面分析装置 |
| JP3910884B2 (ja) * | 2002-07-02 | 2007-04-25 | 独立行政法人科学技術振興機構 | Ｒｈｅｅｄのエネルギー損失スペクトル計測装置及び方法 |
| JP5719019B2 (ja) * | 2010-06-03 | 2015-05-13 | カール ツァイス エスエムエス ゲーエムベーハー | フォトリソグラフィマスクの性能を判断する方法 |
| CN103518283A (zh) * | 2011-05-19 | 2014-01-15 | 丰田自动车株式会社 | 锂固体电池 |
-
2014
- 2014-12-17 JP JP2014255020A patent/JP6646290B2/ja active Active
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