JP6646290B2 - 試料中の元素の測定方法、及び濃度分布の可視化方法 - Google Patents
試料中の元素の測定方法、及び濃度分布の可視化方法 Download PDFInfo
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- JP6646290B2 JP6646290B2 JP2014255020A JP2014255020A JP6646290B2 JP 6646290 B2 JP6646290 B2 JP 6646290B2 JP 2014255020 A JP2014255020 A JP 2014255020A JP 2014255020 A JP2014255020 A JP 2014255020A JP 6646290 B2 JP6646290 B2 JP 6646290B2
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- 238000000034 method Methods 0.000 title claims description 26
- 238000009826 distribution Methods 0.000 title claims description 25
- 238000012800 visualization Methods 0.000 title 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 80
- 229910052744 lithium Inorganic materials 0.000 claims description 80
- 238000001228 spectrum Methods 0.000 claims description 52
- 238000001514 detection method Methods 0.000 claims description 29
- 238000005430 electron energy loss spectroscopy Methods 0.000 claims description 28
- 230000001678 irradiating effect Effects 0.000 claims description 8
- 238000000691 measurement method Methods 0.000 claims description 6
- 230000007704 transition Effects 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- 238000007794 visualization technique Methods 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 100
- 238000005259 measurement Methods 0.000 description 50
- 238000010894 electron beam technology Methods 0.000 description 39
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 30
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 28
- 238000004458 analytical method Methods 0.000 description 21
- 230000001133 acceleration Effects 0.000 description 15
- 239000010936 titanium Substances 0.000 description 12
- 239000002245 particle Substances 0.000 description 9
- 238000002056 X-ray absorption spectroscopy Methods 0.000 description 7
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 6
- 150000002642 lithium compounds Chemical class 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 4
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000005315 distribution function Methods 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910013870 LiPF 6 Inorganic materials 0.000 description 2
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 238000000619 electron energy-loss spectrum Methods 0.000 description 2
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000005469 synchrotron radiation Effects 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 238000004402 ultra-violet photoelectron spectroscopy Methods 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910013553 LiNO Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001941 electron spectroscopy Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000000491 multivariate analysis Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000000513 principal component analysis Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Description
ビーム電流:1.5nA
スキャン速度:5msec/step
スキャン範囲:0〜320eV (1stepあたり0.8eVの範囲を測定)
ビーム電流:2.5nA
スキャン速度:1msec/step
スキャン範囲:0〜320eV (1stepあたり1.6eVの範囲を測定)
測定範囲(ポイント分析範囲):64x64ピクセル
加速電圧:1000V(弾性散乱ピーク半値幅:4.7eV)
ビーム電流:0.5nA
スキャン速度:5msec/step
スキャン範囲:0〜320eV (1stepあたり0.8eVの範囲を測定)
加速電圧:5000V
ビーム電流:10nA
スキャン速度:5msec/step
スキャン範囲:0〜1200eV (1stepあたり4eVの範囲を測定)
ビーム電流:2.5nA
スキャン速度:5msec/step(1stepあたり0.8eVの範囲を測定)
102 照射部
104 検出部
106 制御部
120 試料
122 薄片状の試料
200 電子線(試料到達前)
202 電子線(試料到達後)
Claims (5)
- 電子の照射装置により、電子を収束して試料の表面に照射する照射ステップと、
前記試料により前記試料の表面から前記照射装置の側に反射された電子を、前記照射装置が配置された側の立体角2πの範囲で、当該電子の運動エネルギーに応じて検出する検出ステップと、
前記検出ステップによる運動エネルギーに応じた検出値から、電子のエネルギー損失スペクトルを生成する生成ステップとを含み、
前記生成ステップにより生成されるエネルギー損失スペクトルは、検出対象の元素の、電子エネルギー損失分光法による損失ピークが検出されるエネルギー範囲を含み、
前記検出対象の元素はリチウムであり、
前記照射ステップにより前記試料の表面に照射される電子の照射方向と前記試料の表面との成す角度は、30〜90°の範囲であり、
前記エネルギー範囲は、55eV以上75eV以下の範囲である、測定方法。 - 前記試料は、リチウム及び遷移元素を含む、請求項1に記載の測定方法。
- 前記照射装置による電子の加速電圧は、100V以上である請求項1又は2に記載の測定方法。
- スパッタにより前記試料の前記表面を切削する切削ステップをさらに含み、
切削された前記試料の前記表面に対して、前記照射ステップ、前記検出ステップ及び前記スペクトル生成ステップを実行する、請求項1から3の何れか1項に記載の測定方法。 - 請求項1〜4に記載の測定方法により得られる電子のエネルギー損失スペクトルを用いた、検出対象の元素であるリチウムの分布の可視化方法であって、
前記照射装置により電子を照射する、前記試料の前記表面上の位置を変更するステップと、
電子を照射する、前記試料の前記表面上の位置が変更される毎に、前記照射ステップ、前記検出ステップ及び前記スペクトル生成ステップを実行するステップと、
前記試料の前記表面上の前記位置を特定する情報と、対応する前記エネルギー損失スペクトルから得られる検出対象の前記元素の前記損失ピークの強度又は前記損失ピークの形状に対応する色又は輝度とを用いて、検出対象の前記元素の存在分布を生成するステップとを含む、可視化方法。
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JP6795010B2 (ja) * | 2018-05-16 | 2020-12-02 | Jfeスチール株式会社 | X線分析方法及びx線分析装置 |
CN114460114B (zh) * | 2022-04-13 | 2022-06-21 | 季华实验室 | 样品分析方法、装置、设备及存储介质 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPH01155251A (ja) * | 1987-12-11 | 1989-06-19 | Shimadzu Corp | 表面分析装置 |
JP2000241369A (ja) * | 1999-02-24 | 2000-09-08 | Canon Inc | フラーレン評価方法 |
GB0002367D0 (en) * | 2000-02-03 | 2000-03-22 | Limited | Spectrometer |
JP2001312987A (ja) * | 2000-04-28 | 2001-11-09 | Nippon Telegr & Teleph Corp <Ntt> | 電子ビームフィラメントおよびこれを用いた表面分析装置 |
JP3910884B2 (ja) * | 2002-07-02 | 2007-04-25 | 独立行政法人科学技術振興機構 | Rheedのエネルギー損失スペクトル計測装置及び方法 |
WO2011151116A1 (en) * | 2010-06-03 | 2011-12-08 | Carl Zeiss Sms Gmbh | A method for determining the performance of a photolithographic mask |
WO2012157119A1 (ja) * | 2011-05-19 | 2012-11-22 | トヨタ自動車株式会社 | リチウム固体電池 |
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