JP2015008261A - 配線基板およびその製造方法 - Google Patents
配線基板およびその製造方法 Download PDFInfo
- Publication number
- JP2015008261A JP2015008261A JP2013157267A JP2013157267A JP2015008261A JP 2015008261 A JP2015008261 A JP 2015008261A JP 2013157267 A JP2013157267 A JP 2013157267A JP 2013157267 A JP2013157267 A JP 2013157267A JP 2015008261 A JP2015008261 A JP 2015008261A
- Authority
- JP
- Japan
- Prior art keywords
- resin layer
- conductor
- via hole
- wiring board
- lower wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/115—Via connections; Lands around holes or via connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
- H05K3/0035—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material of blind holes, i.e. having a metal layer at the bottom
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/0353—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
- H05K1/036—Multilayers with layers of different types
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/0353—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
- H05K1/0373—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement containing additives, e.g. fillers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0209—Inorganic, non-metallic particles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0263—Details about a collection of particles
- H05K2201/0269—Non-uniform distribution or concentration of particles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/06—Thermal details
- H05K2201/068—Thermal details wherein the coefficient of thermal expansion is important
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09854—Hole or via having special cross-section, e.g. elliptical
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/20—Details of printed circuits not provided for in H05K2201/01 - H05K2201/10
- H05K2201/2054—Light-reflecting surface, e.g. conductors, substrates, coatings, dielectrics
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/20—Details of printed circuits not provided for in H05K2201/01 - H05K2201/10
- H05K2201/2072—Anchoring, i.e. one structure gripping into another
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/14—Related to the order of processing steps
- H05K2203/1476—Same or similar kind of process performed in phases, e.g. coarse patterning followed by fine patterning
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/421—Blind plated via connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4673—Application methods or materials of intermediate insulating layers not specially adapted to any one of the previous methods of adding a circuit layer
- H05K3/4676—Single layer compositions
Abstract
Description
2・・・上層の絶縁層
2a・・・第1樹脂層
2b・・・第2樹脂層
3・・・ビア導体
5・・・ビアホール
5a・・・ビアホールの溝部
Claims (4)
- 下層の配線導体と、該下層の配線導体上に積層されており、該下層の配線導体を底面とするビアホールを有する上層の絶縁層と、前記下層の配線導体に接続されて前記ビアホール内を充填するビア導体とを具備して成る配線基板において、前記上層の絶縁層は、前記下層の配線導体上に積層された第1樹脂層と、該第1樹脂層上に積層された第2樹脂層とから成り、前記ビアホールは、前記第1樹脂層と前記第2樹脂層との境界に、該ビアホールの内壁が全周にわたり水平方向に凹む環状の溝部を有し、該溝部内に前記ビア導体が食い込んで充填されていることを特徴とする配線基板。
- 前記第1樹脂層は、そのヤング率が5〜10GPaであるとともに、その熱膨張係数が0〜40ppm/℃(30〜150℃)であり、前記第2樹脂層は、そのヤング率が0.5〜4GPaであることを特徴とする請求項1記載の配線基板。
- 下層の配線導体上に、無機絶縁フィラーの含有量が高い第1樹脂層と前記無機絶縁フィラーの含有率が低い第2樹脂層とを積層して該第1および第2樹脂層から成る上層の絶縁層を形成する工程と、該上層の絶縁層に上面側からレーザを照射して前記下層の配線導体を底面とするビアホールを形成するとともに、前記照射の途中で前記レーザの一部を第1樹脂層で反射させて前記ビアホール周辺の前記第1樹脂層と前記第2樹脂層との境界に侵入させることにより、該ビアホール内壁の前記第1樹脂層と前記第2樹脂層との境界に前記ビアホールの内壁が全周にわたり水平方向に凹む環状の溝部を形成する工程と、前記ビアホール内にビア導体を、前記溝部内に食い込んだ状態で充填する工程と、を含むことを特徴とする配線基板の製造方法。
- 前記第1樹脂層は、そのヤング率が5〜10GPaであるとともに、その熱膨張係数が0〜40ppm/℃(30〜150℃)であり、前記第2樹脂層は、そのヤング率が0.5〜4GPaであることを特徴とする請求項3記載の配線基板の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013157267A JP2015008261A (ja) | 2013-05-28 | 2013-07-30 | 配線基板およびその製造方法 |
CN201410219504.2A CN104219877A (zh) | 2013-05-28 | 2014-05-22 | 布线基板及其制造方法 |
TW103117879A TW201513749A (zh) | 2013-05-28 | 2014-05-22 | 配線基板及其製造方法 |
US14/285,733 US9237649B2 (en) | 2013-05-28 | 2014-05-23 | Wiring board and method of manufacturing the same |
KR1020140064138A KR20140139988A (ko) | 2013-05-28 | 2014-05-28 | 배선 기판 및 그 제조 방법 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013111879 | 2013-05-28 | ||
JP2013111879 | 2013-05-28 | ||
JP2013157267A JP2015008261A (ja) | 2013-05-28 | 2013-07-30 | 配線基板およびその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2015008261A true JP2015008261A (ja) | 2015-01-15 |
Family
ID=51983846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013157267A Pending JP2015008261A (ja) | 2013-05-28 | 2013-07-30 | 配線基板およびその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9237649B2 (ja) |
JP (1) | JP2015008261A (ja) |
KR (1) | KR20140139988A (ja) |
CN (1) | CN104219877A (ja) |
TW (1) | TW201513749A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016219478A (ja) * | 2015-05-15 | 2016-12-22 | イビデン株式会社 | 配線基板及びその製造方法 |
JP2019057590A (ja) * | 2017-09-20 | 2019-04-11 | 新光電気工業株式会社 | 半導体素子用基板及びその製造方法、半導体装置及びその製造方法 |
JP2020021928A (ja) * | 2018-07-30 | 2020-02-06 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | プリント回路基板 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101483875B1 (ko) * | 2013-07-31 | 2015-01-16 | 삼성전기주식회사 | 글라스 코어기판 및 그 제조방법 |
JP2018014446A (ja) * | 2016-07-22 | 2018-01-25 | イビデン株式会社 | ソルダーレジスト及びプリント配線板 |
JP6885800B2 (ja) * | 2017-06-26 | 2021-06-16 | 京セラ株式会社 | 配線基板およびその製造方法 |
CN107911935B (zh) * | 2017-10-31 | 2020-05-15 | 广东和润新材料股份有限公司 | 一种具有加强筋的pcb板加工方法 |
JP7135364B2 (ja) * | 2018-03-23 | 2022-09-13 | 三菱マテリアル株式会社 | 絶縁回路基板、及び、絶縁回路基板の製造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000244125A (ja) * | 1999-02-22 | 2000-09-08 | Ibiden Co Ltd | 多層ビルドアップ配線板及びその製造方法 |
JP2005044914A (ja) * | 2003-07-25 | 2005-02-17 | Cmk Corp | プリント配線板とその製造方法 |
WO2009069791A1 (ja) * | 2007-11-28 | 2009-06-04 | Kyocera Corporation | 配線基板、実装構造体及び配線基板の製造方法 |
JP2011009649A (ja) * | 2009-06-29 | 2011-01-13 | Kyocera Corp | 電気配線基板および光モジュール |
JP2011249785A (ja) * | 2010-04-27 | 2011-12-08 | Kyocera Corp | 配線基板の製造方法及びその実装構造体の製造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3348990A (en) * | 1963-12-23 | 1967-10-24 | Sperry Rand Corp | Process for electrically interconnecting elements on different layers of a multilayer printed circuit assembly |
US6632512B1 (en) * | 1999-11-10 | 2003-10-14 | Ibiden Co., Ltd. | Ceramic substrate |
JP2002252436A (ja) | 2001-02-23 | 2002-09-06 | Asahi Kasei Corp | 両面積層板およびその製造方法 |
TW521361B (en) * | 2002-02-27 | 2003-02-21 | Advanced Semiconductor Eng | Bump process |
US7385472B1 (en) * | 2006-06-28 | 2008-06-10 | Emc Corporation | Multi-level printed circuit board interstitial vias |
CN102934530A (zh) * | 2010-06-04 | 2013-02-13 | 揖斐电株式会社 | 电路板的制造方法 |
JP2012134456A (ja) * | 2010-11-29 | 2012-07-12 | Kyocera Corp | 配線基板およびその実装構造体 |
JP6081693B2 (ja) * | 2011-09-12 | 2017-02-15 | 新光電気工業株式会社 | 配線基板及び配線基板の製造方法 |
-
2013
- 2013-07-30 JP JP2013157267A patent/JP2015008261A/ja active Pending
-
2014
- 2014-05-22 TW TW103117879A patent/TW201513749A/zh unknown
- 2014-05-22 CN CN201410219504.2A patent/CN104219877A/zh active Pending
- 2014-05-23 US US14/285,733 patent/US9237649B2/en not_active Expired - Fee Related
- 2014-05-28 KR KR1020140064138A patent/KR20140139988A/ko not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000244125A (ja) * | 1999-02-22 | 2000-09-08 | Ibiden Co Ltd | 多層ビルドアップ配線板及びその製造方法 |
JP2005044914A (ja) * | 2003-07-25 | 2005-02-17 | Cmk Corp | プリント配線板とその製造方法 |
WO2009069791A1 (ja) * | 2007-11-28 | 2009-06-04 | Kyocera Corporation | 配線基板、実装構造体及び配線基板の製造方法 |
JP2011009649A (ja) * | 2009-06-29 | 2011-01-13 | Kyocera Corp | 電気配線基板および光モジュール |
JP2011249785A (ja) * | 2010-04-27 | 2011-12-08 | Kyocera Corp | 配線基板の製造方法及びその実装構造体の製造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016219478A (ja) * | 2015-05-15 | 2016-12-22 | イビデン株式会社 | 配線基板及びその製造方法 |
JP2019057590A (ja) * | 2017-09-20 | 2019-04-11 | 新光電気工業株式会社 | 半導体素子用基板及びその製造方法、半導体装置及びその製造方法 |
JP2020021928A (ja) * | 2018-07-30 | 2020-02-06 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | プリント回路基板 |
Also Published As
Publication number | Publication date |
---|---|
KR20140139988A (ko) | 2014-12-08 |
CN104219877A (zh) | 2014-12-17 |
US20140353021A1 (en) | 2014-12-04 |
US9237649B2 (en) | 2016-01-12 |
TW201513749A (zh) | 2015-04-01 |
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