JP2015002240A - フリップチップ実装方法 - Google Patents
フリップチップ実装方法 Download PDFInfo
- Publication number
- JP2015002240A JP2015002240A JP2013125571A JP2013125571A JP2015002240A JP 2015002240 A JP2015002240 A JP 2015002240A JP 2013125571 A JP2013125571 A JP 2013125571A JP 2013125571 A JP2013125571 A JP 2013125571A JP 2015002240 A JP2015002240 A JP 2015002240A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor element
- contact surface
- flip
- surface roughness
- chip mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
Abstract
Description
1a 接触面
2 吸引ノズル
2a 吸着面
3 基板
4 電極
5 バンプ
6 電極
Claims (4)
- 半導体素子を吸引ノズルで吸引把持して基板上に配置し、半導体素子を基板側に加重しつつ超音波振動を加えることで、前記半導体素子を前記基板にフリップチップ実装するフリップチップ実装方法において、
実装前の前記半導体素子の前記吸引ノズルへの接触面の表面粗さRaを、0.1μm以上0.5μm未満とした
ことを特徴とするフリップチップ実装方法。 - 前記半導体素子の前記接触面にラップ処理を行うことで、前記接触面の表面粗さRaを、0.1μm以上0.5μm未満とした
請求項1記載のフリップチップ実装方法。 - 前記半導体素子の前記接触面が、GaAs基板またはシリコン基板から構成される
請求項1または2記載のフリップチップ実装方法。 - 前記吸引ノズルとして、前記半導体素子を吸着把持する吸着面の表面粗さRaが0.35μmのものを用いる
請求項1〜3いずれかに記載のフリップチップ実装方法。
Priority Applications (1)
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---|---|---|---|
JP2013125571A JP6179209B2 (ja) | 2013-06-14 | 2013-06-14 | フリップチップ実装方法 |
Applications Claiming Priority (1)
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---|---|---|---|
JP2013125571A JP6179209B2 (ja) | 2013-06-14 | 2013-06-14 | フリップチップ実装方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015002240A true JP2015002240A (ja) | 2015-01-05 |
JP6179209B2 JP6179209B2 (ja) | 2017-08-16 |
Family
ID=52296582
Family Applications (1)
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JP2013125571A Active JP6179209B2 (ja) | 2013-06-14 | 2013-06-14 | フリップチップ実装方法 |
Country Status (1)
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JP (1) | JP6179209B2 (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10107078A (ja) * | 1996-09-30 | 1998-04-24 | Toshiba Electron Eng Corp | 電子部品の製造方法及び電子部品 |
JP2001298251A (ja) * | 2000-02-10 | 2001-10-26 | Murata Mfg Co Ltd | 電子デバイス素子の実装方法、電子部品および通信機装置 |
JP2003163240A (ja) * | 2001-11-28 | 2003-06-06 | Sony Corp | 半導体装置およびその製造方法 |
JP2003203953A (ja) * | 2002-01-08 | 2003-07-18 | Toshiba Corp | 超音波ボンディング装置と、そのボンディング方法 |
JP2003347362A (ja) * | 2002-05-24 | 2003-12-05 | Matsushita Electric Ind Co Ltd | 部品保持部材再生装置及び部品装着装置、並びに部品装着方法 |
JP2006019342A (ja) * | 2004-06-30 | 2006-01-19 | Tdk Corp | 半導体ic内蔵基板 |
-
2013
- 2013-06-14 JP JP2013125571A patent/JP6179209B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10107078A (ja) * | 1996-09-30 | 1998-04-24 | Toshiba Electron Eng Corp | 電子部品の製造方法及び電子部品 |
JP2001298251A (ja) * | 2000-02-10 | 2001-10-26 | Murata Mfg Co Ltd | 電子デバイス素子の実装方法、電子部品および通信機装置 |
JP2003163240A (ja) * | 2001-11-28 | 2003-06-06 | Sony Corp | 半導体装置およびその製造方法 |
JP2003203953A (ja) * | 2002-01-08 | 2003-07-18 | Toshiba Corp | 超音波ボンディング装置と、そのボンディング方法 |
JP2003347362A (ja) * | 2002-05-24 | 2003-12-05 | Matsushita Electric Ind Co Ltd | 部品保持部材再生装置及び部品装着装置、並びに部品装着方法 |
JP2006019342A (ja) * | 2004-06-30 | 2006-01-19 | Tdk Corp | 半導体ic内蔵基板 |
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JP6179209B2 (ja) | 2017-08-16 |
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