JP2015002208A5 - - Google Patents

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Publication number
JP2015002208A5
JP2015002208A5 JP2013124847A JP2013124847A JP2015002208A5 JP 2015002208 A5 JP2015002208 A5 JP 2015002208A5 JP 2013124847 A JP2013124847 A JP 2013124847A JP 2013124847 A JP2013124847 A JP 2013124847A JP 2015002208 A5 JP2015002208 A5 JP 2015002208A5
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JP
Japan
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gas
vertical
flow path
ejection hole
ejected
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JP2013124847A
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English (en)
Japanese (ja)
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JP6199619B2 (ja
JP2015002208A (ja
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Priority to JP2013124847A priority Critical patent/JP6199619B2/ja
Priority claimed from JP2013124847A external-priority patent/JP6199619B2/ja
Priority to TW103117491A priority patent/TWI574306B/zh
Priority to US14/301,703 priority patent/US9803282B2/en
Priority to KR1020140072118A priority patent/KR101699815B1/ko
Publication of JP2015002208A publication Critical patent/JP2015002208A/ja
Publication of JP2015002208A5 publication Critical patent/JP2015002208A5/ja
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Publication of JP6199619B2 publication Critical patent/JP6199619B2/ja
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JP2013124847A 2013-06-13 2013-06-13 気相成長装置 Active JP6199619B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013124847A JP6199619B2 (ja) 2013-06-13 2013-06-13 気相成長装置
TW103117491A TWI574306B (zh) 2013-06-13 2014-05-19 Gas growth device
US14/301,703 US9803282B2 (en) 2013-06-13 2014-06-11 Vapor phase growth apparatus
KR1020140072118A KR101699815B1 (ko) 2013-06-13 2014-06-13 기상 성장 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013124847A JP6199619B2 (ja) 2013-06-13 2013-06-13 気相成長装置

Publications (3)

Publication Number Publication Date
JP2015002208A JP2015002208A (ja) 2015-01-05
JP2015002208A5 true JP2015002208A5 (enExample) 2016-06-30
JP6199619B2 JP6199619B2 (ja) 2017-09-20

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ID=52018122

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JP2013124847A Active JP6199619B2 (ja) 2013-06-13 2013-06-13 気相成長装置

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US (1) US9803282B2 (enExample)
JP (1) JP6199619B2 (enExample)
KR (1) KR101699815B1 (enExample)
TW (1) TWI574306B (enExample)

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