JP2014533009A - 時間領域スイッチを用い加速度感度および位相ノイズの低い共振器 - Google Patents

時間領域スイッチを用い加速度感度および位相ノイズの低い共振器 Download PDF

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Publication number
JP2014533009A
JP2014533009A JP2014537097A JP2014537097A JP2014533009A JP 2014533009 A JP2014533009 A JP 2014533009A JP 2014537097 A JP2014537097 A JP 2014537097A JP 2014537097 A JP2014537097 A JP 2014537097A JP 2014533009 A JP2014533009 A JP 2014533009A
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JP
Japan
Prior art keywords
vibrator
position switch
relative position
resonator
vibration
Prior art date
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Pending
Application number
JP2014537097A
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English (en)
Japanese (ja)
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JP2014533009A5 (enExample
Inventor
ウォーターズ リチャード
ウォーターズ リチャード
ディー．スワンソン ポール
ディー．スワンソン ポール
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US Department of Navy
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US Department of Navy
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Publication date
Application filed by US Department of Navy filed Critical US Department of Navy
Publication of JP2014533009A publication Critical patent/JP2014533009A/ja
Publication of JP2014533009A5 publication Critical patent/JP2014533009A5/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H03H2009/02267—Driving or detection means having dimensions of atomic scale, e.g. involving electron transfer across vibration gap

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
JP2014537097A 2011-10-19 2012-10-04 時間領域スイッチを用い加速度感度および位相ノイズの低い共振器 Pending JP2014533009A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/276,948 US8427249B1 (en) 2011-10-19 2011-10-19 Resonator with reduced acceleration sensitivity and phase noise using time domain switch
US13/276,948 2011-10-19
PCT/US2012/058794 WO2013058993A1 (en) 2011-10-19 2012-10-04 Resonator with reduced acceleration sensitivity and phase noise using time domain switch

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2016030432A Division JP2016154333A (ja) 2011-10-19 2016-02-19 時間領域スイッチを用い加速度感度および位相ノイズの低い共振器

Publications (2)

Publication Number Publication Date
JP2014533009A true JP2014533009A (ja) 2014-12-08
JP2014533009A5 JP2014533009A5 (enExample) 2015-01-22

Family

ID=48094842

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2014537097A Pending JP2014533009A (ja) 2011-10-19 2012-10-04 時間領域スイッチを用い加速度感度および位相ノイズの低い共振器
JP2016030432A Pending JP2016154333A (ja) 2011-10-19 2016-02-19 時間領域スイッチを用い加速度感度および位相ノイズの低い共振器

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2016030432A Pending JP2016154333A (ja) 2011-10-19 2016-02-19 時間領域スイッチを用い加速度感度および位相ノイズの低い共振器

Country Status (5)

Country Link
US (1) US8427249B1 (enExample)
EP (1) EP2769467B8 (enExample)
JP (2) JP2014533009A (enExample)
TW (2) TWI536622B (enExample)
WO (1) WO2013058993A1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7956621B2 (en) * 2008-06-11 2011-06-07 Analog Devices, Inc. Anti-capture method and apparatus for micromachined devices
US8505382B2 (en) * 2011-02-10 2013-08-13 Ut-Battelle, Llc Nonlinear nanomechanical oscillators for ultrasensitive inertial detection
US9705450B2 (en) 2011-06-24 2017-07-11 The United States Of America As Represented By The Secretary Of The Navy Apparatus and methods for time domain measurement of oscillation perturbations
US9128496B2 (en) 2011-10-26 2015-09-08 The United States Of America As Represented By Secretary Of The Navy Auto-ranging for time domain extraction of perturbations to sinusoidal oscillation
US8683862B2 (en) * 2011-11-03 2014-04-01 The United States Of America As Represented By The Secretary Of The Navy Oscillation apparatus with atomic-layer proximity switch
US8650955B2 (en) * 2012-01-18 2014-02-18 The United States Of America As Represented By The Secretary Of The Navy Time domain switched gyroscope
US8991250B2 (en) * 2012-09-11 2015-03-31 The United States Of America As Represented By Secretary Of The Navy Tuning fork gyroscope time domain inertial sensor
EP3103191B1 (en) 2014-02-07 2018-07-11 The Regents of the University of California Frequency tuning and/or frequency tracking of a mechanical system with low sensitivity to electrical feedthrough
FI126019B (en) * 2014-02-12 2016-05-31 Murata Manufacturing Co MEMS resonator drive current circuitry
FI126557B (en) * 2014-05-07 2017-02-15 Murata Manufacturing Co Improved gyroscope structure and gyroscope
US9910062B2 (en) 2014-06-26 2018-03-06 Lumedyne Technologies Incorporated Systems and methods for extracting system parameters from nonlinear periodic signals from sensors
TWI650558B (zh) * 2015-05-20 2019-02-11 美商路梅戴尼科技公司 用於決定慣性參數之方法及系統
US20170003314A1 (en) * 2015-06-30 2017-01-05 Lumedyne Technologies Incorporated Z-axis physical proximity switch
US9577633B1 (en) * 2016-06-17 2017-02-21 The United States Of America As Represented By Secretary Of The Navy Capacitive charge triggered proximity switch for use with time domain switched inertial sensors
US20180031603A1 (en) * 2016-07-27 2018-02-01 Lumedyne Technologies Incorporated Systems and methods for detecting inertial parameters using a vibratory accelerometer with multiple degrees of freedom
US10234477B2 (en) 2016-07-27 2019-03-19 Google Llc Composite vibratory in-plane accelerometer
US9977046B2 (en) 2016-08-08 2018-05-22 The United States Of America As Represented By The Secretary Of The Navy Pinch contact switch for determining bending surface states
JP7410935B2 (ja) 2018-05-24 2024-01-10 ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク 容量性センサ
US10823759B2 (en) * 2018-11-05 2020-11-03 Xilinx, Inc. Test system and method of testing a wafer for integrated circuit devices
JP6961638B2 (ja) * 2019-03-14 2021-11-05 株式会社東芝 センサモジュール
CN113111527A (zh) * 2021-04-20 2021-07-13 华北电力大学 一种单机水电系统切换型频率振荡的近似解析方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5545232A (en) * 1978-09-26 1980-03-29 Seiko Instr & Electronics Ltd Piezo-electric vibrator
JP2004515992A (ja) * 2000-12-21 2004-05-27 ウーテーアー・エス・アー・マニファクチュール・オロロジェール・スイス 集積されたマイクロメカニカル音叉共振器を備えるタイムベース
JP2008066799A (ja) * 2006-09-04 2008-03-21 Seiko Instruments Inc 発振器
JP2008521015A (ja) * 2004-11-20 2008-06-19 センテラ インコーポレイテッド 高周波信号検出センサー
JP2008522492A (ja) * 2004-11-20 2008-06-26 センテラ インコーポレイテッド 高周波信号放出装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5023503A (en) 1990-01-03 1991-06-11 Motorola, Inc. Super high frequency oscillator/resonator
JP3158825B2 (ja) * 1993-12-21 2001-04-23 富士電機株式会社 加速度センサ
WO1995019571A1 (de) * 1994-01-18 1995-07-20 Siemens Aktiengesellschaft Tunneleffekt-sensor
GB9524241D0 (en) * 1995-11-28 1996-01-31 Smiths Industries Plc Rate sensors
CN100483941C (zh) * 1999-11-02 2009-04-29 伊塔瑞士钟表制造股份有限公司 用于微机械式环形谐振器的温度补偿装置和方法
US6636655B2 (en) * 2000-08-29 2003-10-21 Memscap S.A. MEMS optical switches having obliquely angled inputs and outputs relative to a face thereof and moveable reflectors with parallel positions therein and methods of forming same
GB0116393D0 (en) * 2001-07-05 2001-08-29 Druck Ltd Improved sensor
US6718825B1 (en) * 2003-01-17 2004-04-13 Honeywell International Inc. Methods and systems for reducing stick-down within MEMS structures
JP2004317484A (ja) 2003-03-31 2004-11-11 Denso Corp 振動型角速度センサ
KR100599115B1 (ko) * 2004-07-20 2006-07-12 삼성전자주식회사 진동형 멤스 스위치 및 그 제조방법
JP4887034B2 (ja) * 2005-12-05 2012-02-29 日立オートモティブシステムズ株式会社 慣性センサ
US8502198B2 (en) * 2006-04-28 2013-08-06 Hewlett-Packard Development Company, L.P. Switching device and methods for controlling electron tunneling therein
US7332849B2 (en) * 2006-05-19 2008-02-19 Nanyang Technological University Method and transducers for dynamic testing of structures and materials
US7444868B2 (en) * 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing for MEMS inertial sensors using time-varying voltages
GB2439606B (en) * 2006-06-29 2011-08-17 C Mac Quartz Crystals Ltd An oscillator
JP4432990B2 (ja) * 2007-03-22 2010-03-17 セイコーエプソン株式会社 センサ及び電子機器
EP2345052A2 (en) 2008-10-01 2011-07-20 Joseph F. Pinkerton Nanoelectromechanical tunneling current switch
WO2010054099A1 (en) * 2008-11-07 2010-05-14 Greenray Industries, Inc. Crystal oscillator with reduced acceleration sensitivity
US8629795B2 (en) * 2009-09-09 2014-01-14 Taiwan Semiconductor Manufacturing Company, Ltd. Micro-electro-mechanical systems (MEMS), systems, and operating methods thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5545232A (en) * 1978-09-26 1980-03-29 Seiko Instr & Electronics Ltd Piezo-electric vibrator
JP2004515992A (ja) * 2000-12-21 2004-05-27 ウーテーアー・エス・アー・マニファクチュール・オロロジェール・スイス 集積されたマイクロメカニカル音叉共振器を備えるタイムベース
JP2008521015A (ja) * 2004-11-20 2008-06-19 センテラ インコーポレイテッド 高周波信号検出センサー
JP2008522492A (ja) * 2004-11-20 2008-06-26 センテラ インコーポレイテッド 高周波信号放出装置
JP2008066799A (ja) * 2006-09-04 2008-03-21 Seiko Instruments Inc 発振器

Also Published As

Publication number Publication date
TW201330339A (zh) 2013-07-16
JP2016154333A (ja) 2016-08-25
EP2769467A4 (en) 2015-04-22
EP2769467B8 (en) 2016-12-21
TW201637251A (zh) 2016-10-16
US8427249B1 (en) 2013-04-23
WO2013058993A1 (en) 2013-04-25
EP2769467B1 (en) 2016-09-28
TWI536622B (zh) 2016-06-01
EP2769467A1 (en) 2014-08-27

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