TWI536622B - 具有使用時域轉換器所降低的加速度靈敏度及相位雜訊之共振器 - Google Patents
具有使用時域轉換器所降低的加速度靈敏度及相位雜訊之共振器 Download PDFInfo
- Publication number
- TWI536622B TWI536622B TW101137740A TW101137740A TWI536622B TW I536622 B TWI536622 B TW I536622B TW 101137740 A TW101137740 A TW 101137740A TW 101137740 A TW101137740 A TW 101137740A TW I536622 B TWI536622 B TW I536622B
- Authority
- TW
- Taiwan
- Prior art keywords
- vibrator
- resonator
- relative position
- converter
- position converter
- Prior art date
Links
- 230000001133 acceleration Effects 0.000 title claims description 16
- 230000035945 sensitivity Effects 0.000 title description 3
- 230000010355 oscillation Effects 0.000 claims description 34
- 230000005641 tunneling Effects 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 7
- 230000009977 dual effect Effects 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000009471 action Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 230000036962 time dependent Effects 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 241000549343 Myadestes Species 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000005428 wave function Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02433—Means for compensation or elimination of undesired effects
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02259—Driving or detection means
- H03H2009/02267—Driving or detection means having dimensions of atomic scale, e.g. involving electron transfer across vibration gap
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/276,948 US8427249B1 (en) | 2011-10-19 | 2011-10-19 | Resonator with reduced acceleration sensitivity and phase noise using time domain switch |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201330339A TW201330339A (zh) | 2013-07-16 |
| TWI536622B true TWI536622B (zh) | 2016-06-01 |
Family
ID=48094842
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101137740A TWI536622B (zh) | 2011-10-19 | 2012-10-12 | 具有使用時域轉換器所降低的加速度靈敏度及相位雜訊之共振器 |
| TW105106318A TW201637251A (zh) | 2011-10-19 | 2012-10-12 | 具有使用時域轉換器所降低的加速度靈敏度及相位雜訊之共振器 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW105106318A TW201637251A (zh) | 2011-10-19 | 2012-10-12 | 具有使用時域轉換器所降低的加速度靈敏度及相位雜訊之共振器 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8427249B1 (enExample) |
| EP (1) | EP2769467B8 (enExample) |
| JP (2) | JP2014533009A (enExample) |
| TW (2) | TWI536622B (enExample) |
| WO (1) | WO2013058993A1 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7956621B2 (en) * | 2008-06-11 | 2011-06-07 | Analog Devices, Inc. | Anti-capture method and apparatus for micromachined devices |
| US8505382B2 (en) * | 2011-02-10 | 2013-08-13 | Ut-Battelle, Llc | Nonlinear nanomechanical oscillators for ultrasensitive inertial detection |
| US9705450B2 (en) | 2011-06-24 | 2017-07-11 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus and methods for time domain measurement of oscillation perturbations |
| US9128496B2 (en) | 2011-10-26 | 2015-09-08 | The United States Of America As Represented By Secretary Of The Navy | Auto-ranging for time domain extraction of perturbations to sinusoidal oscillation |
| US8683862B2 (en) * | 2011-11-03 | 2014-04-01 | The United States Of America As Represented By The Secretary Of The Navy | Oscillation apparatus with atomic-layer proximity switch |
| US8650955B2 (en) * | 2012-01-18 | 2014-02-18 | The United States Of America As Represented By The Secretary Of The Navy | Time domain switched gyroscope |
| US8991250B2 (en) * | 2012-09-11 | 2015-03-31 | The United States Of America As Represented By Secretary Of The Navy | Tuning fork gyroscope time domain inertial sensor |
| EP3103191B1 (en) | 2014-02-07 | 2018-07-11 | The Regents of the University of California | Frequency tuning and/or frequency tracking of a mechanical system with low sensitivity to electrical feedthrough |
| FI126019B (en) * | 2014-02-12 | 2016-05-31 | Murata Manufacturing Co | MEMS resonator drive current circuitry |
| FI126557B (en) * | 2014-05-07 | 2017-02-15 | Murata Manufacturing Co | Improved gyroscope structure and gyroscope |
| US9910062B2 (en) | 2014-06-26 | 2018-03-06 | Lumedyne Technologies Incorporated | Systems and methods for extracting system parameters from nonlinear periodic signals from sensors |
| TWI650558B (zh) * | 2015-05-20 | 2019-02-11 | 美商路梅戴尼科技公司 | 用於決定慣性參數之方法及系統 |
| US20170003314A1 (en) * | 2015-06-30 | 2017-01-05 | Lumedyne Technologies Incorporated | Z-axis physical proximity switch |
| US9577633B1 (en) * | 2016-06-17 | 2017-02-21 | The United States Of America As Represented By Secretary Of The Navy | Capacitive charge triggered proximity switch for use with time domain switched inertial sensors |
| US20180031603A1 (en) * | 2016-07-27 | 2018-02-01 | Lumedyne Technologies Incorporated | Systems and methods for detecting inertial parameters using a vibratory accelerometer with multiple degrees of freedom |
| US10234477B2 (en) | 2016-07-27 | 2019-03-19 | Google Llc | Composite vibratory in-plane accelerometer |
| US9977046B2 (en) | 2016-08-08 | 2018-05-22 | The United States Of America As Represented By The Secretary Of The Navy | Pinch contact switch for determining bending surface states |
| JP7410935B2 (ja) | 2018-05-24 | 2024-01-10 | ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク | 容量性センサ |
| US10823759B2 (en) * | 2018-11-05 | 2020-11-03 | Xilinx, Inc. | Test system and method of testing a wafer for integrated circuit devices |
| JP6961638B2 (ja) * | 2019-03-14 | 2021-11-05 | 株式会社東芝 | センサモジュール |
| CN113111527A (zh) * | 2021-04-20 | 2021-07-13 | 华北电力大学 | 一种单机水电系统切换型频率振荡的近似解析方法 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5545232A (en) * | 1978-09-26 | 1980-03-29 | Seiko Instr & Electronics Ltd | Piezo-electric vibrator |
| US5023503A (en) | 1990-01-03 | 1991-06-11 | Motorola, Inc. | Super high frequency oscillator/resonator |
| JP3158825B2 (ja) * | 1993-12-21 | 2001-04-23 | 富士電機株式会社 | 加速度センサ |
| WO1995019571A1 (de) * | 1994-01-18 | 1995-07-20 | Siemens Aktiengesellschaft | Tunneleffekt-sensor |
| GB9524241D0 (en) * | 1995-11-28 | 1996-01-31 | Smiths Industries Plc | Rate sensors |
| CN100483941C (zh) * | 1999-11-02 | 2009-04-29 | 伊塔瑞士钟表制造股份有限公司 | 用于微机械式环形谐振器的温度补偿装置和方法 |
| US6636655B2 (en) * | 2000-08-29 | 2003-10-21 | Memscap S.A. | MEMS optical switches having obliquely angled inputs and outputs relative to a face thereof and moveable reflectors with parallel positions therein and methods of forming same |
| EP1217735B1 (en) * | 2000-12-21 | 2007-11-14 | ETA SA Manufacture Horlogère Suisse | Time base comprising an integrated micromechanical tuning fork resonator |
| GB0116393D0 (en) * | 2001-07-05 | 2001-08-29 | Druck Ltd | Improved sensor |
| US6718825B1 (en) * | 2003-01-17 | 2004-04-13 | Honeywell International Inc. | Methods and systems for reducing stick-down within MEMS structures |
| JP2004317484A (ja) | 2003-03-31 | 2004-11-11 | Denso Corp | 振動型角速度センサ |
| KR100599115B1 (ko) * | 2004-07-20 | 2006-07-12 | 삼성전자주식회사 | 진동형 멤스 스위치 및 그 제조방법 |
| EP1825560A4 (en) * | 2004-11-20 | 2010-09-15 | Kenneth E Salsman | DEVICE FOR EMISSION OF HIGH FREQUENCY SIGNALS |
| US7280078B2 (en) * | 2004-11-20 | 2007-10-09 | Scenterra, Inc. | Sensor for detecting high frequency signals |
| JP4887034B2 (ja) * | 2005-12-05 | 2012-02-29 | 日立オートモティブシステムズ株式会社 | 慣性センサ |
| US8502198B2 (en) * | 2006-04-28 | 2013-08-06 | Hewlett-Packard Development Company, L.P. | Switching device and methods for controlling electron tunneling therein |
| US7332849B2 (en) * | 2006-05-19 | 2008-02-19 | Nanyang Technological University | Method and transducers for dynamic testing of structures and materials |
| US7444868B2 (en) * | 2006-06-29 | 2008-11-04 | Honeywell International Inc. | Force rebalancing for MEMS inertial sensors using time-varying voltages |
| GB2439606B (en) * | 2006-06-29 | 2011-08-17 | C Mac Quartz Crystals Ltd | An oscillator |
| JP5105345B2 (ja) * | 2006-09-04 | 2012-12-26 | セイコーインスツル株式会社 | 発振器 |
| JP4432990B2 (ja) * | 2007-03-22 | 2010-03-17 | セイコーエプソン株式会社 | センサ及び電子機器 |
| EP2345052A2 (en) | 2008-10-01 | 2011-07-20 | Joseph F. Pinkerton | Nanoelectromechanical tunneling current switch |
| WO2010054099A1 (en) * | 2008-11-07 | 2010-05-14 | Greenray Industries, Inc. | Crystal oscillator with reduced acceleration sensitivity |
| US8629795B2 (en) * | 2009-09-09 | 2014-01-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Micro-electro-mechanical systems (MEMS), systems, and operating methods thereof |
-
2011
- 2011-10-19 US US13/276,948 patent/US8427249B1/en active Active
-
2012
- 2012-10-04 EP EP12842190.6A patent/EP2769467B8/en not_active Not-in-force
- 2012-10-04 JP JP2014537097A patent/JP2014533009A/ja active Pending
- 2012-10-04 WO PCT/US2012/058794 patent/WO2013058993A1/en not_active Ceased
- 2012-10-12 TW TW101137740A patent/TWI536622B/zh not_active IP Right Cessation
- 2012-10-12 TW TW105106318A patent/TW201637251A/zh unknown
-
2016
- 2016-02-19 JP JP2016030432A patent/JP2016154333A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014533009A (ja) | 2014-12-08 |
| TW201330339A (zh) | 2013-07-16 |
| JP2016154333A (ja) | 2016-08-25 |
| EP2769467A4 (en) | 2015-04-22 |
| EP2769467B8 (en) | 2016-12-21 |
| TW201637251A (zh) | 2016-10-16 |
| US8427249B1 (en) | 2013-04-23 |
| WO2013058993A1 (en) | 2013-04-25 |
| EP2769467B1 (en) | 2016-09-28 |
| EP2769467A1 (en) | 2014-08-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |