JP2014529902A - 圧電デバイスおよび圧電デバイスの製造方法 - Google Patents
圧電デバイスおよび圧電デバイスの製造方法 Download PDFInfo
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- JP2014529902A JP2014529902A JP2014527553A JP2014527553A JP2014529902A JP 2014529902 A JP2014529902 A JP 2014529902A JP 2014527553 A JP2014527553 A JP 2014527553A JP 2014527553 A JP2014527553 A JP 2014527553A JP 2014529902 A JP2014529902 A JP 2014529902A
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- sintering
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- 238000000034 method Methods 0.000 title claims description 75
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000000919 ceramic Substances 0.000 claims abstract description 45
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 14
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 11
- 150000002910 rare earth metals Chemical class 0.000 claims abstract description 11
- 239000010949 copper Substances 0.000 claims description 78
- 238000005245 sintering Methods 0.000 claims description 46
- 229910052760 oxygen Inorganic materials 0.000 claims description 34
- 239000001301 oxygen Substances 0.000 claims description 33
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 24
- 239000000203 mixture Substances 0.000 claims description 19
- 239000012700 ceramic precursor Substances 0.000 claims description 18
- 239000011230 binding agent Substances 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 238000001354 calcination Methods 0.000 claims description 9
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 6
- 238000000227 grinding Methods 0.000 claims description 6
- 238000002156 mixing Methods 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 2
- 229910052691 Erbium Inorganic materials 0.000 claims description 2
- 229910052689 Holmium Inorganic materials 0.000 claims description 2
- 229910052765 Lutetium Inorganic materials 0.000 claims description 2
- 229910052775 Thulium Inorganic materials 0.000 claims description 2
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 2
- 229910052745 lead Inorganic materials 0.000 claims description 2
- 229910052727 yttrium Inorganic materials 0.000 claims description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 16
- 230000015572 biosynthetic process Effects 0.000 description 14
- 230000007547 defect Effects 0.000 description 13
- 230000003647 oxidation Effects 0.000 description 11
- 238000007254 oxidation reaction Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- 239000000370 acceptor Substances 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 10
- 239000013078 crystal Substances 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- 239000002002 slurry Substances 0.000 description 6
- 150000001768 cations Chemical class 0.000 description 5
- 230000002950 deficient Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000006386 neutralization reaction Methods 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000008187 granular material Substances 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000002612 dispersion medium Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000010298 pulverizing process Methods 0.000 description 2
- 238000007873 sieving Methods 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000002609 medium Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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Abstract
Description
これらの外部電極は内部電極と同じ材料で製造されているか、または内部電極と異なる材料を有する。ここで内部電極は、2つのグループに分けられており、内部電極の1つのグループは一方の外部電極と接続され、内部電極の他のグループは他方の外部電極と接続されている。
セラミックの体積中での結晶粒界の厚さが小さいほど、あるいは焼き締め(Sinterverdichtung)のプロセスにおいて最適な中程度の結晶粒サイズまで結晶粒成長が行われるほど、この移動度の制限は小さくなる。結晶粒成長は、PZTセラミックにおいては、受容体によって誘導されて形成される酸素空位によって促進される。
AサイトにおけるPbIIは、高酸化数の陽イオンによって置換されるが、これは正電荷欠陥(positiver Defekt)(このAサイトに正電荷がより多く局在しているため)を示しているが、これにより負に帯電した欠陥の形成が誘導される(電子供与体)。中和はBサイトにおけるTiIIIの形成かまたは隣接するPbIIあるいはAサイトにおける空位、たとえばV''/2(欠損三重項;Defekttripel)の形成によって行われる。さらにAサイトにおけるPbIIは、低酸化数の陽イオンと置換されるが、これは負電荷欠陥(negativer Defekt)を示しているが、これはより少ない正電荷がAサイトに局在しているからであり、これにより正に帯電した欠陥が誘導される(電子供与体)。中和は、酸素位置における空位VO''の形成、たとえばVO''/2(欠損三重項)の形成によって行われる。VO''は、1/2 O2で占有されることができ、さらに2 Oを形成し、受容体機能を有する酸素の価電子帯における電子欠損状態(Defektelektronenzustande)を形成し、これは障害となる電子導電を阻止する。
A)一般式Pb1-x-y-(2a-b)/2V(2a-b)/2''BaxSry[(TizZr1-z)1-a-bWaSEb]O3のセラミック前駆体材料を製造するステップ。
B)このセラミック前駆体材料を焼結助剤と混合するステップ。
C)セラミック前駆体材料を含む層とCuを含む層とを交互に備えた積層体を形成するステップ。
D)積層体のバインダ除去および焼結を行うステップであって、ここでデバイスはCu電極と少なくとも1つの圧電セラミック層を有して形成され、このセラミック層は、Pb1-x-y-[(2a-b)/2]-p/2V[(2a-b)/2-p/2]''CupBaxSry[(TizZr1-z)1-a-bWaSEb]O3を含み、ここで0≦x≦0.035,0≦y≦0.025,0.42≦z≦0.5,0.0045≦a≦0.009,0.009≦b≦0.011,2a>b,p≦2a−bであり、SEは希土類金属であり、V''はPbの空位である。
A1)原材料の混合体を準備するステップ。この原材料はPb3O4,TiO2,ZrO2,WO3,SE2O3,BaCO3およびSrCO3を含むグループから選択される。
A2)この混合体を第1の温度でか焼(Kalzinieren)し、そしてこの混合体を第1の平均的直径に粉砕するステップ。
A3)第1の温度より高い第2の温度でこの混合体をか焼するステップ。
高い特定の表面エネルギーとBサイトでの供与体-受容体-ドーピングの組み合わせは、結果的に焼き締めを効果的に促進するように作用することができる。
N2およびH2O蒸気の量が一定の場合、フォーミングガスを調整することによって焼結の際の酸素分圧を調整することができる。
Pb0.9451V0.00128''Cu0.003Ba0.0295Sr0.0211[Ti0.467Zr0.516W0.00753Yb0.0095]O3
焼結助剤として2.5mol%のPbOを含む試料においては、1000℃での焼結の後では密度はρ=7.83±0.04g/cm3となり、理論密度の97.5%に対応し、同様に950℃での焼結では、同様な値ρ=8.81±0.04g/cm3となり、理論密度の97.3%に対応する値が得られる。この所定のプロセス条件で得られる焼結密度は7.7〜7.9g/cm3である。Pb3O4の状態でのPbOの添加を行わない場合、1000℃での焼結の後には、相対密度の値はρrel=84.9%にしかならない。
kp=0.65と算出される。
本発明は実施例を参照した上記の記載に限定されない。むしろ本発明はいかなる特徴およびいかなる特徴の組み合わせ、とりわけ請求項における特徴のあらゆる組み合わせを含んでいる。また、特徴またはこれらの組み合わせ自体が請求項または実施例に顕わに示されていない場合も含んでいる。
10 :圧電セラミック層
20 :内部電極
30 :外部電極
Int :強度
λ :角度
I :第1のか焼層のX線回折図
II :第2のか焼層のX線回折図
T :温度
P(OP2) :酸素分圧
PCu/Cu2O :Cu/Cu2Oの平衡分圧
PPbO/Pb :PbO/Pbの平衡分圧
Claims (15)
- 少なくとも1つの圧電セラミック層(10)と、少なくとも1つの当該圧電セラミック層に接する電極(20)とを備えた圧電デバイスであって、
前記圧電セラミック層(10)は、一般式Pb1-x-y-[(2a-b)/2]-p/2V[(2a-b)/2-p/2]''CupBaxSry[(TizZr1-z)1-a-bWaSEb]O3の圧電セラミック材料を備え、0≦x≦0.035,0≦y≦0.025,0.42≦z≦0.5,0.0045≦a≦0.009,0.009≦b≦0.011,2a>b,p≦2a−bであり、SEは希土類金属であり、V''はPbの空位である、ことを特徴とするデバイス。 - 請求項1に記載のデバイスにおいて、
前記SEは、Lu,Yb,Tm,Er,Y,HoおよびDyを含むグループから選択されることを特徴とするデバイス。 - 請求項1または2に記載のデバイスにおいて、
前記電極(20)は銅を含むことを特徴とするデバイス。 - 請求項2または3に記載の多層デバイスにおいて、前記圧電セラミック材料は、Pb0.9451V0.00128''Cu0.003Ba0.0295Sr0.0211[Ti0.467Zr0.516W0.00753Yb0.0095]O3であることを特徴とする多層デバイス。
- 圧電デバイスの製造方法であって、以下のステップ、
A)一般式Pb1-x-y-(2a-b)/2V(2a-b)/2''BaxSry[(TizZr1-z)1-a-bWaSEb]O3のセラミック前駆体材料を製造するステップと、
B)このセラミック前駆体材料を焼結助剤と混合するステップと、
C)セラミック前駆体材料を含む層とCuを含む層とを交互に備えた積層体(1)を形成するステップと、
D)前記積層体(1)のバインダ除去および焼結を行うステップと、を備え、
デバイスはCu電極(20)と少なくとも1つの圧電セラミック層(10)を有して形成され、当該セラミック層は、Pb1-x-y-[(2a-b)/2]-p/2V[(2a-b)/2-p/2]''CupBaxSry[(TizZr1-z)1-a-bWaSEb]O3を含み、ここで0≦x≦0.035,0≦y≦0.025,0.42≦z≦0.5,0.0045≦a≦0.009,0.009≦b≦0.011,2a>b,p≦2a−bであり、SEは希土類金属であり、V''はPbの空位であることを特徴とする方法。 - 請求項5に記載の方法において、
前記ステップA)は、以下のステップ、
A1) Pb3O4,TiO2,ZrO2,WO3,SE2O3,BaCO3およびSrCO3を含むグループから選択された原材料の混合体を準備するステップと、
A2) この混合体を第1の温度でか焼し、そしてこの混合体を第1の平均的直径に粉砕するステップと、
A3) 第1の温度より高い第2の温度でこの混合体をか焼するステップと、
を備えることを特徴とする方法。 - 請求項5または6に記載の方法において、
前記ステップB)では、PbOまたはPb3O4が焼結助剤として添加され、前記焼結助剤の分量は、1molのセラミック前駆体材料に対して0.5〜3mol%の間で選択されることを特徴とする方法。 - 請求項5乃至7のいずれか1項に記載の方法において、
前記ステップB)において、前記ステップA)で得られた混合体が、前記第1の平均的直径より小さい第2の平均的直径に粉砕されることを特徴とする方法。 - 請求項7または8に記載の方法において、
前記ステップB)では、追加的に、0.05〜0.1mol%のCu2Oが添加されることを特徴とする方法。 - 請求項5乃至9のいずれか1項に記載の方法において、
前記ステップC)で、前記セラミック前駆体材料を含む層がCuでスパッタリングされ、あるいはCuペーストで印刷されることを特徴とする方法。 - 請求項5乃至10のいずれか1項に記載の方法において、
前記ステップD)で、酸素を除いた水蒸気下で脱バインダが行われることを特徴とする方法。 - 請求項5乃至11のいずれか1項に記載の方法において、
前記方法ステップD)で、前記焼結は、PbO/Pbの平衡分圧とCu/Cu2Oの平衡分圧との間の酸素分圧で行われることを特徴とする方法。 - 請求項5乃至12のいずれか1項に記載の方法において、
前記酸素分圧は、水蒸気とフォーミングガスの混合により調整されることを特徴とする方法。 - 請求項5乃至13のいずれか1項に記載の方法において、
前記ステップD)での焼結は、1000〜1050℃の範囲から選択された温度で行われることを特徴とする方法。 - 請求項5乃至14のいずれか1項に記載の方法において、
x=0.0295,y=0.0211,z=0.475,a=0.00753,b=0.0095およびSE=Ybが選択され、前記ステップD)において、Pb0.9451V0.00128''Cu0.003Ba0.0295Sr0.0211[Ti0.467Zr0.516W0.00753Yb0.0095]O3を含む圧電セラミック層(10)が生成されることを特徴とする方法。
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