JP2014517923A - 圧力センサおよび圧力センサの製造方法 - Google Patents
圧力センサおよび圧力センサの製造方法 Download PDFInfo
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- JP2014517923A JP2014517923A JP2014511809A JP2014511809A JP2014517923A JP 2014517923 A JP2014517923 A JP 2014517923A JP 2014511809 A JP2014511809 A JP 2014511809A JP 2014511809 A JP2014511809 A JP 2014511809A JP 2014517923 A JP2014517923 A JP 2014517923A
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- pressure sensor
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- liquid medium
- solder
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 238000002347 injection Methods 0.000 claims abstract description 76
- 239000007924 injection Substances 0.000 claims abstract description 76
- 239000007788 liquid Substances 0.000 claims abstract description 62
- 229910000679 solder Inorganic materials 0.000 claims abstract description 52
- 238000000034 method Methods 0.000 claims abstract description 31
- 238000003466 welding Methods 0.000 claims abstract description 26
- 238000005476 soldering Methods 0.000 claims abstract description 20
- 239000012528 membrane Substances 0.000 claims abstract description 18
- 238000007789 sealing Methods 0.000 claims description 54
- 239000002184 metal Substances 0.000 claims description 46
- 239000000463 material Substances 0.000 claims description 12
- 239000000919 ceramic Substances 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 6
- 239000004033 plastic Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 20
- 229910052710 silicon Inorganic materials 0.000 description 20
- 239000010703 silicon Substances 0.000 description 20
- 239000003921 oil Substances 0.000 description 15
- 235000019198 oils Nutrition 0.000 description 15
- 230000008569 process Effects 0.000 description 14
- 230000008901 benefit Effects 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229920002545 silicone oil Polymers 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 235000019489 Almond oil Nutrition 0.000 description 2
- 239000008168 almond oil Substances 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000011326 mechanical measurement Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0627—Protection against aggressive medium in general
- G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0004—Resistance soldering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K11/00—Resistance welding; Severing by resistance heating
- B23K11/002—Resistance welding; Severing by resistance heating specially adapted for particular articles or work
- B23K11/0026—Welding of thin articles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0046—Fluidic connecting means using isolation membranes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/022—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges constructional details, e.g. mounting of elastically-deformable gauges
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
【選択図】図1
Description
2 ハウジング
3 膜
4 小室
5 液状媒体
6 注入開口部
7 はんだ封止
70 はんだ
8 溶接封止
9 センサ素子
10 金属層
11 封止部材
12 突部
13 通路
14 ボンディングワイヤ
20,21,22 方法ステップ
Claims (15)
- ハウジング(2)と、
前記ハウジング(2)と共に、液状媒体(5)が充填され、外側に対し閉じた小室(4)を形成する膜(3)と、
前記液状媒体(5)で前記小室(4)を充填するための、前記ハウジング(2)の注入開口部(6)と、を備えた圧力センサ(1)であって、
前記注入開口部(6)は、はんだ封止(7)または溶接封止(8)を用いて封止されている圧力センサ。 - 請求項1に記載の圧力センサにおいて、
前記小室(4)にはセンサ素子(9)が配設されている圧力センサ。 - 請求項1または2に記載の圧力センサにおいて、
前記ハウジング(2)は、セラミック、ガラス、プラスチック、金属の内1つ以上の材質を含む圧力センサ。 - 請求項1乃至3のいずれか1項に記載の圧力センサにおいて、
前記ハウジング(2)は、前記注入開口部(6)を周回する領域に金属層(10)を備える圧力センサ。 - 請求項4に記載の圧力センサにおいて、
封止部材(11)が前記金属層(10)と溶接またははんだ付けされている圧力センサ。 - 請求項1乃至4のいずれか1項に記載の圧力センサにおいて、
前記注入開口部(6)は、直接はんだ(70)で封止されている圧力センサ。 - 請求項6に記載の圧力センサにおいて、
前記はんだ(70)および前記液状媒体(5)は、それぞれ表面張力を有し、前記はんだ(70)の表面張力は前記液状媒体(5)の表面張力より大きい圧力センサ。 - 圧力センサ(1)の製造方法であって、
以下のステップ:
A)膜(3)と共に小室(4)を形成するハウジング(2)を準備するステップと、
B)前記ハウジング(2)の注入開口部(6)を通って液状媒体(5)を充填するステップと、
C)はんだ付けまたは溶接を用いて前記注入開口部(6)を封止するステップと、を備える圧力センサの製造方法。 - 請求項8に記載の圧力センサの製造方法において、
前記注入開口部(6)は、前記小室(4)の封止の際に、前記液状媒体(5)で覆われている圧力センサの製造方法。 - 請求項8または9に記載の圧力センサの製造方法において、
前記圧力センサ(1)は、前記小室(4)の封止の際に、前記液状媒体(5)に全体が浸漬されている圧力センサの製造方法。 - 請求項8乃至10のいずれか1項に記載の圧力センサの製造方法において、
前記注入開口部(6)の封止は、抵抗溶接を用いて行われる圧力センサの製造方法。 - 請求項11に記載の圧力センサの製造方法において、
前記ハウジング(2)は、前記注入開口部(6)を周回する領域に金属層(10)を備え、
このような1つの突部あるいは複数の突部(12)を備えた、前記注入開口部(6)の封止のための封止部材(11)が、1つ以上の前記突部(12)で前記金属層(10)に配設され、前記金属層(10)と接続される、圧力センサの製造方法。 - 請求項8乃至10のいずれか1項に記載の圧力センサの製造方法において、
前記注入開口部(6)の封止で、封止部材(11)がはんだ付けされる圧力センサの製造方法。 - 請求項8乃至10のいずれか1項に記載の圧力センサの製造方法において、
前記注入開口部(6)の封止は、直接はんだ(70)によって行われる圧力センサの製造方法。 - 請求項13または14に記載の圧力センサの製造方法において、
前記はんだ(70)および前記液状媒体(5)は、それぞれ表面張力を有し、前記はんだ(70)の表面張力は前記液状媒体(5)の表面張力より大きい圧力センサの製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011102837.8 | 2011-05-30 | ||
DE102011102837A DE102011102837A1 (de) | 2011-05-30 | 2011-05-30 | Drucksensor und Verfahren zur Herstellung eines Drucksensors |
PCT/EP2012/058667 WO2012163650A1 (de) | 2011-05-30 | 2012-05-10 | Drucksensor und verfahren zur herstellung eines drucksensors |
Publications (2)
Publication Number | Publication Date |
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JP2014517923A true JP2014517923A (ja) | 2014-07-24 |
JP5739583B2 JP5739583B2 (ja) | 2015-06-24 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2014511809A Active JP5739583B2 (ja) | 2011-05-30 | 2012-05-10 | 圧力センサおよび圧力センサの製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9625336B2 (ja) |
EP (1) | EP2715301B8 (ja) |
JP (1) | JP5739583B2 (ja) |
CN (2) | CN108106777B (ja) |
DE (1) | DE102011102837A1 (ja) |
WO (1) | WO2012163650A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018016481A1 (ja) * | 2016-07-19 | 2018-01-25 | 日本精工株式会社 | 車両の重量測定装置 |
JP2018017710A (ja) * | 2016-07-19 | 2018-02-01 | 日本精工株式会社 | 車両の重量測定装置 |
JP2020197469A (ja) * | 2019-06-04 | 2020-12-10 | アズビル株式会社 | 封入液の封止装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105527042B (zh) * | 2014-10-15 | 2020-06-05 | 浙江盾安人工环境股份有限公司 | 压力传感器及其制造方法 |
US10544040B2 (en) * | 2017-05-05 | 2020-01-28 | Dunan Microstaq, Inc. | Method and structure for preventing solder flow into a MEMS pressure port during MEMS die attachment |
DE102018206477B3 (de) * | 2018-04-26 | 2019-02-07 | Robert Bosch Gmbh | Vorrichtung zur Abdichtung zweier mit unterschiedlichen Fluiden gefüllter Räume bei einer MEMS-Sensoranordnung |
DE102020210143A1 (de) | 2020-08-11 | 2022-02-17 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung eines Sensors sowie Sensor |
CN112284608B (zh) * | 2020-09-15 | 2022-08-02 | 南京高华科技股份有限公司 | 电容式微机械气压传感器及其制备方法 |
DE102020214384A1 (de) | 2020-11-17 | 2022-05-19 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zum Herstellen eines Sensors sowie Sensor |
DE102021127844A1 (de) | 2021-10-26 | 2023-04-27 | Endress+Hauser SE+Co. KG | Druckmittler und Druckmessaufnehmer mit einem solchen Druckmittler |
DE102022104697A1 (de) | 2022-02-28 | 2023-08-31 | Tdk Electronics Ag | Mediengetrennter Sensor |
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2011
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2012
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- 2012-05-10 EP EP12720490.7A patent/EP2715301B8/de active Active
- 2012-05-10 CN CN201280026158.5A patent/CN103562697A/zh active Pending
- 2012-05-10 WO PCT/EP2012/058667 patent/WO2012163650A1/de active Application Filing
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018016481A1 (ja) * | 2016-07-19 | 2018-01-25 | 日本精工株式会社 | 車両の重量測定装置 |
JP2018017710A (ja) * | 2016-07-19 | 2018-02-01 | 日本精工株式会社 | 車両の重量測定装置 |
JP2018017711A (ja) * | 2016-07-19 | 2018-02-01 | 日本精工株式会社 | 車両の重量測定装置 |
JPWO2018016481A1 (ja) * | 2016-07-19 | 2019-05-09 | 日本精工株式会社 | 車両の重量測定装置 |
JP2020197469A (ja) * | 2019-06-04 | 2020-12-10 | アズビル株式会社 | 封入液の封止装置 |
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EP2715301B8 (de) | 2018-12-26 |
EP2715301A1 (de) | 2014-04-09 |
CN108106777A (zh) | 2018-06-01 |
JP5739583B2 (ja) | 2015-06-24 |
CN108106777B (zh) | 2020-11-24 |
DE102011102837A1 (de) | 2012-12-06 |
US20140216163A1 (en) | 2014-08-07 |
CN103562697A (zh) | 2014-02-05 |
EP2715301B1 (de) | 2018-11-07 |
WO2012163650A1 (de) | 2012-12-06 |
US9625336B2 (en) | 2017-04-18 |
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