JP2014515777A5 - - Google Patents
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- Publication number
- JP2014515777A5 JP2014515777A5 JP2014505325A JP2014505325A JP2014515777A5 JP 2014515777 A5 JP2014515777 A5 JP 2014515777A5 JP 2014505325 A JP2014505325 A JP 2014505325A JP 2014505325 A JP2014505325 A JP 2014505325A JP 2014515777 A5 JP2014515777 A5 JP 2014515777A5
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- JP
- Japan
- Prior art keywords
- polymer
- composition
- poly
- ppm
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 229920000642 polymer Polymers 0.000 claims description 50
- 239000000203 mixture Substances 0.000 claims description 49
- 238000005498 polishing Methods 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 18
- KGIGUEBEKRSTEW-UHFFFAOYSA-N 2-vinylpyridine Chemical compound C=CC1=CC=CC=N1 KGIGUEBEKRSTEW-UHFFFAOYSA-N 0.000 claims description 17
- 229920006317 cationic polymer Polymers 0.000 claims description 15
- 125000001453 quaternary ammonium group Chemical group 0.000 claims description 12
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 11
- 239000008365 aqueous carrier Substances 0.000 claims description 10
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims description 10
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 7
- 230000002378 acidificating effect Effects 0.000 claims description 5
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical class CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 claims description 4
- 150000001252 acrylic acid derivatives Chemical class 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000008367 deionised water Substances 0.000 claims description 2
- 229910021641 deionized water Inorganic materials 0.000 claims description 2
- 239000000178 monomer Substances 0.000 claims 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 6
- 229920001577 copolymer Polymers 0.000 claims 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 5
- 229920001223 polyethylene glycol Polymers 0.000 claims 5
- 229920001400 block copolymer Polymers 0.000 claims 3
- -1 poly (methacryloyloxyethyltrimethyl ammonium halide Chemical class 0.000 claims 3
- 235000012239 silicon dioxide Nutrition 0.000 claims 3
- 239000000377 silicon dioxide Substances 0.000 claims 3
- 125000002091 cationic group Chemical group 0.000 claims 2
- 229920000885 poly(2-vinylpyridine) Polymers 0.000 claims 2
- 229920000075 poly(4-vinylpyridine) Polymers 0.000 claims 2
- 239000002245 particle Substances 0.000 description 4
- 239000000725 suspension Substances 0.000 description 4
- 239000003125 aqueous solvent Substances 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- IDGUHHHQCWSQLU-UHFFFAOYSA-N ethanol;hydrate Chemical compound O.CCO IDGUHHHQCWSQLU-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- GBMDVOWEEQVZKZ-UHFFFAOYSA-N methanol;hydrate Chemical compound O.OC GBMDVOWEEQVZKZ-UHFFFAOYSA-N 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/087,857 US8808573B2 (en) | 2011-04-15 | 2011-04-15 | Compositions and methods for selective polishing of silicon nitride materials |
| US13/087,857 | 2011-04-15 | ||
| PCT/US2012/033463 WO2012142374A2 (en) | 2011-04-15 | 2012-04-13 | Compositions and methods for selective polishing of silicon nitride materials |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014515777A JP2014515777A (ja) | 2014-07-03 |
| JP2014515777A5 true JP2014515777A5 (enExample) | 2015-07-02 |
| JP5792889B2 JP5792889B2 (ja) | 2015-10-14 |
Family
ID=47006699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014505325A Active JP5792889B2 (ja) | 2011-04-15 | 2012-04-13 | 窒化ケイ素材料の選択的研磨のための組成物および方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8808573B2 (enExample) |
| EP (1) | EP2697330B1 (enExample) |
| JP (1) | JP5792889B2 (enExample) |
| KR (1) | KR101549766B1 (enExample) |
| CN (1) | CN103492519B (enExample) |
| SG (1) | SG193528A1 (enExample) |
| TW (1) | TWI470047B (enExample) |
| WO (1) | WO2012142374A2 (enExample) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102956450B (zh) * | 2011-08-16 | 2015-03-11 | 中芯国际集成电路制造(北京)有限公司 | 一种制作半导体器件的方法 |
| US8859428B2 (en) | 2012-10-19 | 2014-10-14 | Air Products And Chemicals, Inc. | Chemical mechanical polishing (CMP) composition for shallow trench isolation (STI) applications and methods of making thereof |
| US8906252B1 (en) * | 2013-05-21 | 2014-12-09 | Cabot Microelelctronics Corporation | CMP compositions selective for oxide and nitride with high removal rate and low defectivity |
| US9303187B2 (en) * | 2013-07-22 | 2016-04-05 | Cabot Microelectronics Corporation | Compositions and methods for CMP of silicon oxide, silicon nitride, and polysilicon materials |
| US9850402B2 (en) * | 2013-12-09 | 2017-12-26 | Cabot Microelectronics Corporation | CMP compositions and methods for selective removal of silicon nitride |
| WO2015153597A1 (en) | 2014-04-03 | 2015-10-08 | 3M Innovative Properties Company | Polishing pads and systems and methods of making and using the same |
| US9597768B1 (en) * | 2015-09-09 | 2017-03-21 | Cabot Microelectronics Corporation | Selective nitride slurries with improved stability and improved polishing characteristics |
| JP6533439B2 (ja) * | 2015-09-15 | 2019-06-19 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
| KR101715931B1 (ko) * | 2015-12-11 | 2017-03-14 | 주식회사 케이씨텍 | 연마입자-분산층 복합체 및 그를 포함하는 연마 슬러리 조성물 |
| KR20170076191A (ko) * | 2015-12-24 | 2017-07-04 | 주식회사 케이씨텍 | 연마입자-분산층 복합체 및 그를 포함하는 연마 슬러리 조성물 |
| JP2017132944A (ja) * | 2016-01-29 | 2017-08-03 | 株式会社フジミインコーポレーテッド | 濃縮研磨用組成物の製造方法および安定化方法 |
| KR102524928B1 (ko) * | 2016-10-17 | 2023-04-25 | 씨엠씨 머티리얼즈, 인코포레이티드 | 개선된 디싱 및 패턴 선택성을 갖는, 산화물 및 질화물에 대해 선택적인 cmp 조성물 |
| KR102758095B1 (ko) * | 2016-12-14 | 2025-01-22 | 솔브레인 주식회사 | 화학적 기계적 연마 슬러리 조성물 및 반도체 소자의 제조방법 |
| KR102704751B1 (ko) * | 2016-12-14 | 2024-09-10 | 솔브레인 주식회사 | 화학 기계적 연마 슬러리 조성물 및 반도체 소자의 제조방법 |
| US10711158B2 (en) * | 2017-09-28 | 2020-07-14 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Aqueous silica slurry and amine carboxylic acid compositions for use in shallow trench isolation and methods of using them |
| US10428241B2 (en) | 2017-10-05 | 2019-10-01 | Fujifilm Electronic Materials U.S.A., Inc. | Polishing compositions containing charged abrasive |
| US10626298B1 (en) | 2019-03-20 | 2020-04-21 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing compositions and methods for suppressing the removal rate of amorphous silicon |
| WO2021081145A1 (en) | 2019-10-22 | 2021-04-29 | Cmc Materials, Inc. | Polishing composition and method with high selectivity for silicon nitride and polysilicon over silicon oxide |
| WO2022140334A1 (en) * | 2020-12-21 | 2022-06-30 | Cmc Materials, Inc. | Self-stopping polishing composition and method for high topological selectivity |
| KR20240010727A (ko) | 2021-05-20 | 2024-01-24 | 버슘머트리얼즈 유에스, 엘엘씨 | 이미다졸륨계 폴리(이온성 액체) 및 그의 용도 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1691401B1 (en) * | 1999-06-18 | 2012-06-13 | Hitachi Chemical Co., Ltd. | Method for polishing a substrate using CMP abrasive |
| JP2001269859A (ja) * | 2000-03-27 | 2001-10-02 | Jsr Corp | 化学機械研磨用水系分散体 |
| JP4668528B2 (ja) * | 2003-09-05 | 2011-04-13 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
| US20070218811A1 (en) * | 2004-09-27 | 2007-09-20 | Hitachi Chemical Co., Ltd. | Cmp polishing slurry and method of polishing substrate |
| KR100864996B1 (ko) * | 2004-09-28 | 2008-10-23 | 히다치 가세고교 가부시끼가이샤 | Ｃｍｐ연마제 및 기판의 연마방법 |
| US7504044B2 (en) * | 2004-11-05 | 2009-03-17 | Cabot Microelectronics Corporation | Polishing composition and method for high silicon nitride to silicon oxide removal rate ratios |
| US7531105B2 (en) * | 2004-11-05 | 2009-05-12 | Cabot Microelectronics Corporation | Polishing composition and method for high silicon nitride to silicon oxide removal rate ratios |
| US7297633B1 (en) * | 2006-06-05 | 2007-11-20 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Compositions for chemical mechanical polishing silica and silicon nitride having improved endpoint detection |
| WO2007146680A1 (en) * | 2006-06-06 | 2007-12-21 | Florida State University Research Foundation , Inc. | Stabilized silica colloid |
| US20090047870A1 (en) * | 2007-08-16 | 2009-02-19 | Dupont Air Products Nanomaterials Llc | Reverse Shallow Trench Isolation Process |
| KR101232585B1 (ko) * | 2007-09-21 | 2013-02-12 | 캐보트 마이크로일렉트로닉스 코포레이션 | 아미노실란으로 처리된 연마제 입자를 이용한 연마 조성물 및 방법 |
| EP2329519B1 (en) * | 2008-09-26 | 2013-10-23 | Rhodia Opérations | Abrasive compositions for chemical mechanical polishing and methods for using same |
-
2011
- 2011-04-15 US US13/087,857 patent/US8808573B2/en active Active
-
2012
- 2012-04-13 CN CN201280018534.6A patent/CN103492519B/zh active Active
- 2012-04-13 SG SG2013070305A patent/SG193528A1/en unknown
- 2012-04-13 JP JP2014505325A patent/JP5792889B2/ja active Active
- 2012-04-13 KR KR1020137030350A patent/KR101549766B1/ko active Active
- 2012-04-13 TW TW101113210A patent/TWI470047B/zh active
- 2012-04-13 EP EP12771215.6A patent/EP2697330B1/en active Active
- 2012-04-13 WO PCT/US2012/033463 patent/WO2012142374A2/en not_active Ceased
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