JP2014514743A - ウェハの汚染測定装置およびウェハの汚染測定方法 - Google Patents
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Abstract
【選択図】図1
Description
Claims (12)
- ウェハを整列するウェハ整列装置と、
前記整列されたウェハを移動させローディングするローディングロボットと、
前記ローディングされたウェハを回転させる回転ステージと、
前記ウェハに対する自然酸化膜エッチング液と金属汚染回収液をホールディング(holding)できるスキャンロボットと、
所定のエッチング液と回収液を収容できる容器と、を含み、
前記スキャンロボットは、前記ウェハのエッジ部に存在する酸化膜を除去できるウェハの汚染測定装置。 - 前記スキャンロボットは、前記酸化膜が除去されたウェハのエッジ部表面の金属汚染を、前記回収液を利用して採取できる請求項1に記載のウェハの汚染測定装置。
- 前記スキャンロボットは、前記スキャンロボットの下端に備えられ、前記エッチング液および前記回収液をホールディングできるチューブをさらに含む請求項1に記載のウェハの汚染測定装置。
- 前記チューブの下部形状は、斜線方向に切断された形状である請求項3に記載のウェハの汚染測定装置。
- 前記チューブの下端中の切断された領域が、前記ウェハのエッジ部の側面に位置する請求項4に記載のウェハの汚染測定装置。
- ウェハを整列させた後ローディングロボットによって回転ステージ上に前記ウェハをローディングするステップと、
前記ウェハのエッジ部に存在する酸化膜を除去するステップと、
前記酸化膜が除去されたウェハのエッジ部表面の金属汚染を、回収液を利用して採取するステップと、
前記抽出された回収液を利用して金属汚染を分析するステップと、を含むウェハの汚染測定方法。 - 前記ウェハのエッジ部に存在する酸化膜を除去するステップは、
スキャンロボットがエッチング液を採取してホールディングした状態で、前記ウェハのエッジ部に接近するステップと、
前記ウェハのエッジ部に接触せず前記ウェハのエッジ部から所定の距離を維持した状態で、前記ウェハを載置した前記回転ステージを回転させるステップと、を含む請求項6に記載のウェハの汚染測定方法。 - 前記スキャンロボットが採取してホールディングするエッチング液の量V1は、100μL≦V1≦1000μLである請求項6に記載のウェハの汚染測定方法。
- 前記酸化膜が除去されたウェハのエッジ部表面の金属汚染を採取するステップは、
回収液を前記スキャンロボットを利用して供給するステップと、
前記回収液と前記ウェハのエッジ部を接触させるステップと、
前記ウェハの前記回転ステージを回転させながら前記ウェハのエッジ部の金属汚染を抽出するステップと、を含む請求項6に記載のウェハの汚染測定方法。 - 前記スキャンロボットが採取してホールディングする回収液の量V2は、100μL≦V2≦1000μLである請求項9に記載のウェハの汚染測定方法。
- 前記回収液はフッ化水素酸と過酸化水素の混合溶液である請求項6に記載のウェハの汚染測定方法。
- 前記回収液はX%HFY%H2O2の化学組成(ただし、0.1≦X≦5、1≦Y≦28)である請求項11に記載のウェハの汚染測定方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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KR1020110024738A KR101242246B1 (ko) | 2011-03-21 | 2011-03-21 | 웨이퍼 오염 측정장치 및 웨이퍼의 오염 측정 방법 |
KR10-2011-0024738 | 2011-03-21 | ||
PCT/KR2012/002030 WO2012128556A2 (en) | 2011-03-21 | 2012-03-21 | Apparatus for measuring impurities on wafer and method of measuring impurities on wafer |
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JP2014514743A true JP2014514743A (ja) | 2014-06-19 |
JP6047551B2 JP6047551B2 (ja) | 2016-12-21 |
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JP2014501000A Active JP6047551B2 (ja) | 2011-03-21 | 2012-03-21 | ウェハの汚染測定装置およびウェハの汚染測定方法 |
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US (2) | US9484273B2 (ja) |
EP (1) | EP2689452A4 (ja) |
JP (1) | JP6047551B2 (ja) |
KR (1) | KR101242246B1 (ja) |
CN (1) | CN103443911A (ja) |
WO (1) | WO2012128556A2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020106303A (ja) * | 2018-12-26 | 2020-07-09 | 株式会社 イアス | 基板分析方法および基板分析装置 |
JP2021522505A (ja) * | 2018-05-04 | 2021-08-30 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 処理チャンバのためのナノ粒子測定 |
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KR101523943B1 (ko) * | 2013-12-24 | 2015-06-01 | 주식회사 엘지실트론 | 웨이퍼 제조 공정의 오염 분석 방법 |
KR101629069B1 (ko) * | 2013-12-27 | 2016-06-09 | 주식회사 엘지실트론 | 표준 웨이퍼 제조 방법 |
WO2016144107A1 (ko) * | 2015-03-12 | 2016-09-15 | 엔비스아나(주) | 기판 오염물 분석 장치 및 기판 오염물 분석 방법 |
JP6108367B1 (ja) * | 2015-12-22 | 2017-04-05 | 株式会社 イアス | シリコン基板用分析装置 |
KR101820680B1 (ko) * | 2016-12-05 | 2018-01-22 | 에스케이실트론 주식회사 | 반도체 기판 제조 방법 |
CN108426978B (zh) * | 2017-02-14 | 2021-01-01 | 无锡华瑛微电子技术有限公司 | 晶圆局部处理方法 |
CN112802767A (zh) * | 2020-12-23 | 2021-05-14 | 上海新昇半导体科技有限公司 | 测量晶圆表面金属含量的方法 |
TWI832365B (zh) * | 2021-10-14 | 2024-02-11 | 德商PVA TePla有限責任公司 | 高精度氣相分解-液滴收集(vpd-dc)掃描 |
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- 2012-03-21 WO PCT/KR2012/002030 patent/WO2012128556A2/en active Application Filing
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- 2012-03-21 CN CN201280013923XA patent/CN103443911A/zh active Pending
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JPH10242228A (ja) * | 1997-02-28 | 1998-09-11 | Mitsubishi Electric Corp | シリコンウエハ表面の不純物回収方法およびその装置 |
US20040163670A1 (en) * | 2003-02-21 | 2004-08-26 | Yong-Kyun Ko | Apparatus and method for collecting impurities on a semiconductor wafer |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021522505A (ja) * | 2018-05-04 | 2021-08-30 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 処理チャンバのためのナノ粒子測定 |
JP7228600B2 (ja) | 2018-05-04 | 2023-02-24 | アプライド マテリアルズ インコーポレイテッド | 処理チャンバのためのナノ粒子測定 |
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Publication number | Publication date |
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EP2689452A2 (en) | 2014-01-29 |
KR101242246B1 (ko) | 2013-03-11 |
US20120260750A1 (en) | 2012-10-18 |
US20170069515A1 (en) | 2017-03-09 |
US9721817B2 (en) | 2017-08-01 |
CN103443911A (zh) | 2013-12-11 |
WO2012128556A2 (en) | 2012-09-27 |
JP6047551B2 (ja) | 2016-12-21 |
EP2689452A4 (en) | 2014-10-29 |
KR20120107190A (ko) | 2012-10-02 |
US9484273B2 (en) | 2016-11-01 |
WO2012128556A3 (en) | 2013-01-03 |
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