JP2014511567A5 - - Google Patents

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Publication number
JP2014511567A5
JP2014511567A5 JP2013553894A JP2013553894A JP2014511567A5 JP 2014511567 A5 JP2014511567 A5 JP 2014511567A5 JP 2013553894 A JP2013553894 A JP 2013553894A JP 2013553894 A JP2013553894 A JP 2013553894A JP 2014511567 A5 JP2014511567 A5 JP 2014511567A5
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JP
Japan
Prior art keywords
chamber
charged particle
coil
magnetic field
lithographic apparatus
Prior art date
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JP2013553894A
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English (en)
Japanese (ja)
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JP2014511567A (ja
JP5902201B2 (ja
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Priority claimed from PCT/EP2012/052431 external-priority patent/WO2012110465A2/en
Publication of JP2014511567A publication Critical patent/JP2014511567A/ja
Publication of JP2014511567A5 publication Critical patent/JP2014511567A5/ja
Application granted granted Critical
Publication of JP5902201B2 publication Critical patent/JP5902201B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013553894A 2011-02-16 2012-02-13 磁気シールド用システム Expired - Fee Related JP5902201B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161443475P 2011-02-16 2011-02-16
US61/443,475 2011-02-16
US201161561288P 2011-11-18 2011-11-18
US61/561,288 2011-11-18
PCT/EP2012/052431 WO2012110465A2 (en) 2011-02-16 2012-02-13 System for magnetic shielding

Publications (3)

Publication Number Publication Date
JP2014511567A JP2014511567A (ja) 2014-05-15
JP2014511567A5 true JP2014511567A5 (OSRAM) 2015-04-23
JP5902201B2 JP5902201B2 (ja) 2016-04-13

Family

ID=45768189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013553894A Expired - Fee Related JP5902201B2 (ja) 2011-02-16 2012-02-13 磁気シールド用システム

Country Status (8)

Country Link
US (1) US8884253B2 (OSRAM)
EP (1) EP2676168B1 (OSRAM)
JP (1) JP5902201B2 (OSRAM)
KR (1) KR101586202B1 (OSRAM)
CN (1) CN103477285A (OSRAM)
RU (1) RU2558646C2 (OSRAM)
TW (1) TW201246261A (OSRAM)
WO (1) WO2012110465A2 (OSRAM)

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