JP2014511039A - 支持端子パッドを有する半導体チップ - Google Patents
支持端子パッドを有する半導体チップ Download PDFInfo
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Abstract
【選択図】図2
Description
Claims (24)
- 第1の導体パッド(85)と、パッシベーション構造(45)とを有する半導体チップ(15)を提供するステップと、
前記パッシベーション構造(45)の一部を保護するように適用される第2の導体パッド(120)を、前記第1の導体パッド(85)の周囲に、間隙(125)を残すために前記第1の導体パッド(85)と物理的に接触することなく形成するステップと、
を含む製造方法。 - 前記第2の導体パッドは、前記第1の導体パッドの周囲に完全に伸びている、請求項1に記載の製造方法。
- 前記第1の導体パッドと電気的に接触するアンダーバンプメタライゼーション構造(75)を形成するステップを備える、請求項1に記載の製造方法。
- はんだ構造(50)を前記アンダーバンプメタライゼーション構造に結合するステップを備える、請求項3に記載の製造方法。
- 前記はんだ構造は、はんだバンプ(60)及びはんだ接合(50)のうち一方を備える、請求項4に記載の製造方法。
- 回路基板(20)を前記はんだ構造に電気的に結合するステップを備える、請求項4に記載の製造方法。
- 前記回路基板は、半導体チップパッケージ基板を備えている、請求項6に記載の製造方法。
- コンピュータ可読媒体内に格納された命令を用いて、前記第1の導体パッドと前記第2の導体パッドとを形成するステップを備える、請求項1に記載の製造方法。
- 高分子膜(80’)を前記半導体チップ上に形成するステップと、
前記間隙の近くの前記パッシベーション構造の一部を保護するために、第3の導体パッド(180)を、前記間隙の近くの前記高分子膜上に形成するステップとを備える、請求項1に記載の製造方法。 - 前記第3の導体パッドは、前記第2の導体パッドと物理的に接触していない、請求項9に記載の製造方法。
- パッシベーション構造(45)と、互いに隣接するが高分子層(80)により隔てられて間隙(125)を残す第1の導体パッド(85)及び第2の導体パッド(120)とを有する半導体チップ(15)であって、前記第1の導体パッド(85)が、前記第2の導体パッド(120)に亘って延びるが前記高分子層(80)により前記第2の導体パッド(120)と隔てられるアンダーバンプメタライゼーション構造(75)と電気的に接触する半導体チップ(15)を、回路基板(20)に結合する方法において、
はんだ構造(50)を前記アンダーバンプメタライゼーション構造に結合するステップと、
前記はんだ構造を前記回路基板に結合するステップと、
を含む方法。 - 前記はんだ構造は、はんだバンプ(60)及びはんだ接合(50)のうち一方を備える、請求項11に記載の方法。
- 前記はんだ構造を前記回路基板に結合するステップは、前記はんだ構造を、前記回路基板に結合された予備はんだ(65)に結合するステップを備える、請求項11に記載の方法。
- 前記回路基板は、半導体チップパッケージ基板を備える、請求項11に記載の方法。
- 前記間隙の近くの前記パッシベーション構造の一部を保護するために、第3の導体パッド(180)を、前記間隙の近くの前記高分子膜(80’)上に形成するステップを備える、請求項11に記載の方法。
- 前記第3の導体パッドは、前記第2の導体パッドと物理的に接触していない、請求項15に記載の方法。
- 第1の導体パッド(85)と、パッシベーション構造(45)とを有する半導体チップ(15)と、
前記第1の導体パッド(85)の周囲に、間隙(125)を残すために前記第1の導体パッド(85)と物理的に接触することなく存在する第2の導体パッド(120)であって、前記パッシベーション構造の一部を保護するように適用される第2の導体パッド(120)と、
を備える装置。 - 前記第2の導体パッドは、前記第1の導体パッドの周囲に完全に伸びている、請求項17に記載の装置。
- 前記第2の導体パッドと電気的に接触するアンダーバンプメタライゼーション構造(75)を備える、請求項17に記載の装置。
- 前記アンダーバンプメタライゼーション構造に結合されたはんだ構造(50)を備える、請求項19に記載の装置。
- 前記はんだ構造は、はんだバンプ(60)及びはんだ接合(50)のうち一方を備える、請求項20に記載の装置。
- 前記半導体チップに結合された回路基板(20)を備える、請求項17に記載の装置。
- 前記半導体チップ上の高分子膜(80)と、
前記間隙の近くの前記パッシベーション構造の一部を保護するために、前記間隙の近くの前記高分子膜上に存在する第3の導体パッド(180)とを備える、請求項17に記載の装置。 - 前記第3の導体パッドは、前記第2の導体パッドと物理的に接触していない、請求項23に記載の装置。
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