JP2014241380A - 炭化珪素半導体装置の製造方法 - Google Patents
炭化珪素半導体装置の製造方法 Download PDFInfo
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Abstract
Description
(1)実施の形態に係る炭化珪素半導体装置の製造方法は、エピタキシャル層81が形成されている炭化珪素基板10を準備する工程(S10)と、エピタキシャル層81上に上層膜(二酸化珪素層63、層間絶縁膜93)を成膜する工程(S20,S90)と、炭化珪素基板10の外周部において上層膜(二酸化珪素層63、層間絶縁膜93)の少なくとも一部を除去するとともに、上層膜(二酸化珪素層63、層間絶縁膜93)をパターニングする工程(S30,S100)とを備える。
まず、図1および図2を参照して、実施の形態1に係る炭化珪素半導体装置の製造方法に用いられる、炭化珪素基板10の構成について説明する。実施の形態1に係る炭化珪素基板10は、炭化珪素単結晶基板80と、炭化珪素エピタキシャル層81とを主に有している。炭化珪素単結晶基板80は、たとえばポリタイプ4Hの六方晶炭化珪素からなる。炭化珪素単結晶基板80は、たとえば窒素などの不純物元素を含んでおり、炭化珪素単結晶基板80の導電型はn型(第1導電型)である。炭化珪素単結晶基板80に含まれる窒素などの不純物の濃度は、たとえば1×1018cm−3程度以上1×1019cm−3程度以下である。炭化珪素単結晶基板80は、第1の主面80aと、第1の主面80aと反対側の第2の主面80bと、第1の主面80aと第2の主面80bとを繋ぐ第1の側端部80eとを有している。第1の側端部80eは、面取り加工された面であり、断面視(第1の主面に平行な方向の視野)において外周方向に凸となる曲率を有する部分である。第1の主面80aは、たとえば{0001}面であってもよいし、{0001}面から10°以下程度オフした面であってもよいし、{0001}面から0.25°以下程度オフした面であってもよい。言い換えれば、第1の主面80aは、たとえば(0001)面または(000−1)面であってもよいし、(0001)面または(000−1)面から10°以下程度オフした面であってもよいし、(0001)面または(000−1)面から0.25°以下程度オフした面であってもよい。
Claims (8)
- エピタキシャル層が形成されている炭化珪素基板を準備する工程と、
前記エピタキシャル層上に上層膜を成膜する工程と、
前記炭化珪素基板の外周部において前記上層膜の少なくとも一部を除去するとともに、前記上層膜をパターニングする工程とを備える、炭化珪素半導体装置の製造方法。 - 前記パターニングする工程では、前記炭化珪素基板の外周部において前記上層膜の少なくとも一部を除去した後、前記上層膜をパターニングする、請求項1に記載の炭化珪素半導体装置の製造方法。
- 前記パターニングする工程では、前記上層膜のパターニングと、前記炭化珪素基板の外周部における前記上層膜の少なくとも一部の除去とが1つの工程として実施される、請求項1に記載の炭化珪素半導体装置の製造方法。
- 前記パターニングする工程では、前記外周部において前記エピタキシャル層に段差部が形成されている領域上の前記上層膜の少なくとも一部を除去する、請求項1〜3のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記パターニングする工程では、前記外周部の全周に渡って前記上層膜を除去する、請求項1〜4のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記パターニングする工程において、前記上層膜の少なくとも一部が除去される領域は、前記炭化珪素基板の外周端部から中心側に向かう方向での幅が0.3mm以上3mm以下の帯状領域である、請求項1〜5のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記上層膜は二酸化珪素で構成されている、請求項1〜6のいずれか1項に記載の炭化珪素半導体装置の製造方法。
- 前記炭化珪素基板は、外径が100mm以上である、請求項1〜7のいずれか1項に記載の炭化珪素半導体装置の製造方法。
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JP2010212440A (ja) * | 2009-03-10 | 2010-09-24 | Fuji Electric Systems Co Ltd | 半導体装置の製造方法 |
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